12.5Overhaul
The recommended maintenance intervals for different process applications are tabulated below:
| Process | Period | Remarks |
| Metal Etch | 1 year | Ensure that TMS (Temperature Management |
|
|
| System) is fitted and operational to prevent |
Etching*1 |
|
| accumulation of |
|
| pump. | |
Other Etch | 2 years |
| |
Processes |
|
| |
|
|
| |
| It is recommended to | change the pump rotor after 5 years due to accumulated wear of | |
| the protective plating material |
| |
Other semiconductor | 2 years | Processes resulting in accumulation of deposits | |
process |
| in the pump will require more frequent service. | |
Clean applications | 5 years |
| |
(Only vacuum pumping) |
|
| |
Other use | (2 years) | Dependent on application, contact Seiko | |
|
|
| Instruments or our local Service Center. |
◇The touch down bearing inside the STP pump will be worn out after a number of full speed touch downs.
The costs of replacing parts that need to be replaced because of deterioration or abrasion will be at your own charge.
When overhaul of the STP pump or the STP control unit is needed, contact Seiko Instruments or our local Service Center.
*1 “Etching” includes semiconductor etching and LCD etching.
