3 Installation of the STP pump
3.1Name and Function of Each Part
(1)Inlet Port Flange (ICF*1 , VG*2 , ASA, ISO, etc.)
Connected to the vacuum equipment (at the high vacuum side).
CAUTION 
◇A splinter shield is attached to the inlet port flange to prevent foreign particles from falling into the STP pump.
NEVER remove it.
(2)Outlet Port Flange (KF*2 40)
Connected to the inlet port side of the auxiliary pump.
(3)STP Connector (41 pins)
Connected to the STP connection cable.
(4)Motor Connector (5 pins)
Connected to the motor connection cable.
(5)Purge Port (KF*2 10)
Introduces a purge gas.
In order to protect the inside of the STP pump when sucking reactive or corrosive gases.
The STP pump is delivered with a blank flange attached to this port.
(6)Cooling Water Port (PT*2 (R/C)1/4 Female Screw)
Connected to the STP pump cooling water pipe. This port is used when water cooling the STP pump.
(7)Emergency Vent. Valve
Protects the STP pump.
It functions immediately after any abnormality/error occurs inside the STP pump.
(8)Ground Terminal
Used for grounding.
Connect the ground cable between this terminal and the ground terminal of the STP control unit .
The ground terminal is marked with label 
.
(9)Temperature Sensor Connector (optional accessory)
A temperature sensor is attached.
For use with the Temperature Management System (TMS) unit only.
*1 : JVIS
*2 : JIS
