16 Specifications and Accessories
16.1Specifications for the STP Pump
Table 16.1 Specifications for the STP Pump
| Item |
|
|
| ||
Flange size*1 | Inlet port flange |
| ICF203/VG150/ISO160 |
| ICF253/VG200/ISO200 | |
Outlet port flange |
| KF40 | ||||
|
| |||||
Pumping speed | N2 | L/s |
| 600 |
| 1000 |
He | L/s |
| 550 |
| 900 | |
| N2 | L/s |
| 500 |
| 800 |
Compression ratio | N2 |
|
| >108 | ||
He |
|
| 104 | |||
| N2 |
|
| 103 | ||
Ultimate pressure |
| Pa (Torr) |
| |||
Maximum working | When cooled water: |
| 67 (0.5) | |||
pressure | When cooled air: |
| 5.3 (0.04) | |||
Pa (Torr) | When cooled natural |
| 0.9 (0.007) | |||
| air: |
|
| |||
|
|
|
|
|
| |
| When TMS unit is |
| 13(0.1) | |||
| used: |
|
| |||
|
|
|
|
|
| |
Allowable backing | When cooled water: |
|
|
|
| |
pressure | When TMS unit is |
| 400 (3) | |||
Pa (Torr) | used: |
|
|
|
|
|
| When cooled air: |
|
|
|
| |
| When cooled natural |
| 267 (2) | |||
| air: |
|
|
|
|
|
Rated speed |
| rpm |
| 35,000 | ||
Starting time |
| min |
|
| 6 | |
Stopping time |
| min |
|
| 6 | |
Vibration |
| μm |
| ＜0.01 (at 35,000 rpm) | ||
Noise |
| dB |
| ＜50 (at 35,000 rpm) | ||
Baking temperature | C |
| ＜120 | |||
Lubricating oil |
|
|
| Not necessary | ||
Installation position |
|
| Free | |||
Cooling method*2 |
|
|
| Water cooled, Air cooled, Natural air cooled | ||
Recommended auxiliary pump | L/min |
| 240 | |||
Mass*3 |
| kg |
| 31 |
| 32 |
Ambient temperature range | C |
| 0 to | 40 | ||
Storage temperature range | C |
| - 25 to + 55 | |||
Values shown in the above table are typical. | They are not guaranteed. | |||||
*1 : ICF (JVIS) VG, KF (JIS)
*2 : Varies depending upon the operation pressure range.
*3 : Mass is a value of state that the only standard accessory was installed. (except the optional accessory)
