3.3.5Connecting the Emergency Vent. Valve
The emergency vent. valve stops the STP pump by introducing gases if any abnormality/error occurs in the STP pump.
Connect the emergency vent. valve (contained in the attached accessories) to the purge port as shown in Figure 3.7. Note that the side of the emergency vent. valve without filter is connected to the purge port.
Connect the cable for the emergency vent. valve to the connector, LEAK VALVE CON8A, of the STP control unit.
◇Always attach the emergency vent. valve.
◇DO NOT close the port of the emergency vent. valve (filter side) with a blank flange or other type of device.
◇The allowable gas pressure ranges from zero [atmospheric pressure] to
4.9x104Pa [gauge pressure] (zero [atmospheric pressure] to 0.5kgf/cm2 [gauge pressure]).
◇Use a dry N2 gas or other.
3.3.6Connecting the Purge Port
When sucking reactive or corrosive gases, introduce a dry N2 gas or other gas into the STP pump in order to protect the inside of the STP pump.
As shown in Figure 3.7, introduce a dry N2 gas through the electromagnetic vent. valve, needle valve or similar valve (must be prepared by the customer) from the purge port.
For instructions on how to introduce the purge gas, See Section 7.1, "Gas Suction."
◇The proper amount of gas purge is approx.
◇The allowable gas pressure ranges from zero [atmospheric pressure] to
4.9x104Pa [gauge pressure] (zero [atmospheric pressure] to 0.5kgf/cm2 [gauge pressure]).
◇When not introducing the purge gas, close the purge port with the blank flange (attached at delivery).
