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Seiko Instruments MT-17E-003-D instruction manual 1 STP Control Unit Front Panel

Models: MT-17E-003-D

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STP-H600/H1000 Series Instruction Manual

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Figure 4.1 STP Control Unit Front Panel

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Seiko Instruments MT-17E-003-D instruction manual 1 STP Control Unit Front Panel

Contents

Third Edition-d STP-H600/H1000SeriesMT-17E-003-D Symbols SAFETY PRECAUTIONSDeath or Serious Personal Injury Operators can burn hands Connect or disconnect cables DO NOT put foreign objects into the STP pump. Doing so may result in product damage INTRODUCTION APPLIED STANDARDSApplied Directives EC Machinery Directive EC Electromagnetic Compatibility DirectivePRECAUTIONS REQUESTSeiko Instruments Inc Sales Office JapanLIMITED WARRANTY indication “WARNING” message on the LCD display 16Overhaul and replacement of maintenance partsTouch down bearing Heater TABLE OF CONTENTS 7 Gas Suction, Cooling and Baking the STP Pump 12 Maintenance and Inspection TABLES FIGURES 1 Precautions for Safe Operation of the STP Pump 1.3Inspection Precautions 1.4Labels3Heavy Product Caution Label 6Connector Caution Label 200～240V 浮上調整を行う場合は弊社のトレーニングまたは許可を受けてください。 Tuning must be performed2 Unpacking 2.2Unpacking the STP Control Unit 3.1Name and Function of Each Part 3 Installation of the STP pumpNEVER remove it 9 Temperature Sensor Connector Optional Accessory 6 Cooling Water Port 3 STP Connector4 Motor Connector 8 Ground Terminal Figure 3.1 Configuration of the STP Pump3.2Precautions Before Installation 3.2.2Installation Area 3.3How to Install the STP Pump 3.3.1Cleaning the Seal Figure 3.3 STP Pump Installation Positions 3.3.2STP Pump Installation PositionsUpside-down Horizontal STP Pump Slanted Vertical Size of bolt Tightening torque of bolt Nm12.0 24.1a When the base is not secured When securing the inlet port with boltsRecommended fitting bolt for flange Secure the baseSize of Flange Number of Claw ClampsISO 160 or less 4 or moreVacuum Equipment 3.3.4Vacuum Piping 1Piping at the Inlet Port Flange 3.3.5Connecting the Emergency Vent. Valve 3.3.7Connecting the Ground Cable 4.1Name and Function of Each Part 4 Installation of the STP Control Unit4.1.1Front Panel 8OVER TEMPERATURE Lamp red LED Figure 4.1 STP Control Unit Front Panel 4.1.2Rear Panel Figure 4.2 STP Control Unit Rear Panel 4.1.3Inside of the STP Control Unit 2530 Figure 4.3 Inside of the STP Control Unit4.2Precautions Before Installation 4.2.1Operating Environment4.2.2Installation Area part Secure with screw Support Angle 4-104.4.1Name and Dimensions of Each Cable Figure 4.6 External Dimensions of Each Cable4.4Cable Connection STP Control Unit SideFigure 4.7 External Dimensions of he Power Cable 4.4.2How to Connect the Cables STP-H600/H1000 Series Table 4.1 Connecting Primary Power Cable Magnified TB1 TB1 Cover Ground Cable for Cover Figure 4.8 How to Secure Primary Power CableCable Fitting Tool 5 How to Start/Stop the STP Pump 5.3Start Procedures REMOTE Select one which fits your vacuum equipment5.5.1Powering ON 5.5Manual Operation5.5.5Powering OFF 5.6.1Powering ON 5.6Remote Operation5.6.2Starting/Stopping the STP Pump 5.6.3Starting the STP Pump After Stopping5.6.4Powering OFF 6.1Safety Functions 6.1.1Power Failure Operation after a Power Recovery 6.1.2Abnormal State of Magnetic Bearing 6.1.3Excessive Vibration6.1.4Inverter Overload 6.1.5Overheating Inside the STP pump6.1.8Abnormal Battery Voltage 6.2Restarting after Any Safety Function Operates 3Other Cases 6.3Operation of the Emergency Vent. Valve Abnormality Abnormality 7 Gas Suction, Cooling and Baking the STP Pump 7.2Cooling the STP Pump 7.2.2Air Cooling Method 7.3Baking the STP Pump This label is attached to the baking heater Failure to do so may result in electric shock 8 Remote Input/Output Signal Terminal Blocks N.O OUT I/O TB2 Remote Output Signal Terminal Block Table 8.3 Rated Contacts for Relays CR5 and Page L.VALVE DC I/O TB3 STOP IN START INThe screw for the terminal is M4*1 START/STOP IN 8.4START/STOP TB6 Terminal BlockThe screw for the terminal is M4*1 DO NOT apply excessive force to the remote cable9 Internal Battery Figure 9.1 Life of the Internal Battery 9.3How to Charge the Internal BatteryBattery Figure 9.2 Allowable Shelf Life of the Internal9.4BATTERY NG Lamp 9.5How to Replace the Internal Battery 2Disconnect battery internal connector 5 Figure 9.1 How to Replace the Internal Battery Affix this label to the front panel2 8 1 4 10 3 5 11 9.6How to Dispose of the Internal Battery 10 External Battery 10.2Installation of the External Battery 10.3How to Charge the External Battery 11 Operation Principle of the STP Pump 7 Touch down bearing 8 Touch down bearing 1 Rotor blade 2 Stator blade4 Radial electromagnet 3 Radial sensor 3 Radial sensor 4 Radial electromagnet12 Maintenance and Inspection 12.3Replacing the Fuses 12.4Inspecting for Deposit 12.5Overhaul 12.6Transporting for Repair or Overhaul 13 Storage 13.1The STP Pump13.3Restarting Precautions 13.2The STP Control Unit14 Disposal 14.3The Battery 15 Troubleshooting 3Other Cases 15.4Abnormalities While the STP Pump is Rotating Symptom The lamp is being lit PROCEDU Lamp Being LitProbable Causes CountermeasuresNo.4 No.6 16.1Specifications for the STP Pump 16 Specifications and Accessories16-1 16.216.2 Specifications for the STP Control Unit Page 16.3Accessories Table 16.3 Accessories16.4Recommended Spare Parts 16-4STP-H600/H1000 Unit Instruction ManualInstall pump securely SEIKO SEIKIperformed be should Tuning SAFETY INSTRUCTIONSSEIKO SEIKI caution with Handleやけどします。触らないでください。 Hot surfaceSTP PUMP PROBLEM CHECK SHEET Seiko Seiki CommentDate NameMass LengthPressure Sales Office Japan