Rotor blade 2 Stator blade | Seiko Instruments MT-17E-003-D manual

(7) Touch down bearing

STP-H600/H1000 Series Instruction Manual

(7) Touch down bearing

(8) Touch down bearing

(1) Rotor blade

(2) Stator blade

(4) Radial electromagnet

(3) Radial sensor

(3) Radial sensor

(4) Radial electromagnet

(6) Axial electromagnet

(6) Axial electromagnet

(5) Axial sensor

Figure 11.1 Cross Sectional View of the STP Pump

11-2

Image 95

Seiko Instruments MT-17E-003-D Touch down bearing 8 Touch down bearing, Rotor blade 2 Stator blade, Axial electromagnet

Contents

MT-17E-003-D STP-H600/H1000SeriesThird Edition-d Death or Serious Personal Injury SAFETY PRECAUTIONSSymbols Operators can burn hands Connect or disconnect cables DO NOT put foreign objects into the STP pump. Doing so may result in product damage EC Electromagnetic Compatibility Directive INTRODUCTIONAPPLIED STANDARDS Applied Directives EC Machinery Directive Sales Office Japan PRECAUTIONSREQUEST Seiko Instruments Inc LIMITED WARRANTY Touch down bearing Heater 16Overhaul and replacement of maintenance partsindication “WARNING” message on the LCD display TABLE OF CONTENTS 7 Gas Suction, Cooling and Baking the STP Pump 12 Maintenance and Inspection TABLES FIGURES 1 Precautions for Safe Operation of the STP Pump 1.4Labels 1.3Inspection Precautions 3Heavy Product Caution Label 6Connector Caution Label 200～240V Tuning must be performed 浮上調整を行う場合は弊社のトレーニングまたは許可を受けてください。 2 Unpacking 2.2Unpacking the STP Control Unit NEVER remove it 3 Installation of the STP pump3.1Name and Function of Each Part Figure 3.1 Configuration of the STP Pump 9 Temperature Sensor Connector Optional Accessory6 Cooling Water Port 3 STP Connector 4 Motor Connector 8 Ground Terminal 3.2Precautions Before Installation 3.2.2Installation Area 3.3How to Install the STP Pump 3.3.1Cleaning the Seal Upside-down Horizontal STP Pump Slanted Vertical 3.3.2STP Pump Installation PositionsFigure 3.3 STP Pump Installation Positions 24.1 Size of boltTightening torque of bolt Nm 12.0 Secure the base a When the base is not securedWhen securing the inlet port with bolts Recommended fitting bolt for flange 4 or more Size of FlangeNumber of Claw Clamps ISO 160 or less Vacuum Equipment 3.3.4Vacuum Piping 1Piping at the Inlet Port Flange 3.3.5Connecting the Emergency Vent. Valve 3.3.7Connecting the Ground Cable 4.1.1Front Panel 4 Installation of the STP Control Unit4.1Name and Function of Each Part 8OVER TEMPERATURE Lamp red LED Figure 4.1 STP Control Unit Front Panel 4.1.2Rear Panel Figure 4.2 STP Control Unit Rear Panel 4.1.3Inside of the STP Control Unit Figure 4.3 Inside of the STP Control Unit 2530 4.2.1Operating Environment 4.2Precautions Before Installation 4.2.2Installation Area 4-10 part Secure with screw Support Angle STP Control Unit Side 4.4.1Name and Dimensions of Each CableFigure 4.6 External Dimensions of Each Cable 4.4Cable Connection Figure 4.7 External Dimensions of he Power Cable 4.4.2How to Connect the Cables STP-H600/H1000 Series Table 4.1 Connecting Primary Power Cable Cable Fitting Tool Figure 4.8 How to Secure Primary Power CableMagnified TB1 TB1 Cover Ground Cable for Cover 5 How to Start/Stop the STP Pump 5.3Start Procedures 5.5Manual Operation REMOTESelect one which fits your vacuum equipment 5.5.1Powering ON 5.5.5Powering OFF 5.6.3Starting the STP Pump After Stopping 5.6.1Powering ON5.6Remote Operation 5.6.2Starting/Stopping the STP Pump 5.6.4Powering OFF 6.1Safety Functions 6.1.1Power Failure Operation after a Power Recovery 6.1.5Overheating Inside the STP pump 6.1.2Abnormal State of Magnetic Bearing6.1.3Excessive Vibration 6.1.4Inverter Overload 6.1.8Abnormal Battery Voltage 6.2Restarting after Any Safety Function Operates 3Other Cases 6.3Operation of the Emergency Vent. Valve Abnormality Abnormality 7 Gas Suction, Cooling and Baking the STP Pump 7.2Cooling the STP Pump 7.2.2Air Cooling Method 7.3Baking the STP Pump This label is attached to the baking heater Failure to do so may result in electric shock 8 Remote Input/Output Signal Terminal Blocks N.O OUT I/O TB2 Remote Output Signal Terminal Block Table 8.3 Rated Contacts for Relays CR5 and Page L.VALVE DC I/O TB3 The screw for the terminal is M4*1 START INSTOP IN DO NOT apply excessive force to the remote cable START/STOP IN8.4START/STOP TB6 Terminal Block The screw for the terminal is M4*1 9 Internal Battery Figure 9.2 Allowable Shelf Life of the Internal Figure 9.1 Life of the Internal Battery9.3How to Charge the Internal Battery Battery 9.4BATTERY NG Lamp 9.5How to Replace the Internal Battery 2Disconnect battery internal connector 2 8 1 4 10 3 5 11 Affix this label to the front panel5 Figure 9.1 How to Replace the Internal Battery 9.6How to Dispose of the Internal Battery 10 External Battery 10.2Installation of the External Battery 10.3How to Charge the External Battery 11 Operation Principle of the STP Pump 3 Radial sensor 4 Radial electromagnet 7 Touch down bearing 8 Touch down bearing1 Rotor blade 2 Stator blade 4 Radial electromagnet 3 Radial sensor 12 Maintenance and Inspection 12.3Replacing the Fuses 12.4Inspecting for Deposit 12.5Overhaul 12.6Transporting for Repair or Overhaul 13.1The STP Pump 13 Storage 13.2The STP Control Unit 13.3Restarting Precautions 14 Disposal 14.3The Battery 15 Troubleshooting 3Other Cases 15.4Abnormalities While the STP Pump is Rotating Symptom The lamp is being lit Countermeasures PROCEDULamp Being Lit Probable Causes No.4 No.6 16-1 16 Specifications and Accessories16.1Specifications for the STP Pump 16.216.2 Specifications for the STP Control Unit Page 16-4 16.3AccessoriesTable 16.3 Accessories 16.4Recommended Spare Parts STP-H600/H1000 Unit SEIKO SEIKI InstructionManual Install pump securely caution with Handle performed be should TuningSAFETY INSTRUCTIONS SEIKO SEIKI Hot surface やけどします。触らないでください。 Name STP PUMP PROBLEM CHECK SHEETSeiko Seiki Comment Date Pressure LengthMass Sales Office Japan