3.3How to Install the STP Pump
Install the STP pump to the vacuum equipment as shown in Figure 3.2.
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STP |
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Front | Control Unit STP Connection Cable |
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Remote Cable
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Figure 3.2 Installation of the STP Pump to the Vacuum Equipment
CAUTION
◇Chlorine or fluorine system gases can be used in chemical specific pumps (type C). When you use gases including alkaline metals, but excluding Li, gases including Ga, Hg, In, or Sn, or HBr, contact Seiko Instruments.
◇NEVER use corrosive gases (chlorine, fluorine, or other system gases) in the
◇When you use the STP pump in a place subjected to exposure to radiation, contact Seiko Instruments.
◇DO NOT open the STP pump through the flange to atmospheric air while the STP pump is running.
If atmospheric air flows into the STP pump, it may not function normally.
◇Depending upon the type of the auxiliary pump used, atmospheric air may reverse flow into the STP pump when the auxiliary pump stops. Attach a vacuum valve to the middle of the piping between the STP pump outlet port flange and the auxiliary pump, and close the vacuum valve when the auxiliary pump stops.
