Seiko Instruments MT-17E-003-D instruction manual 7.3Baking the STP Pump

Models: MT-17E-003-D

1 124
Download 124 pages 22.02 Kb
Page 72
Image 72
7.3Baking the STP Pump

STP-H600/H1000 Series Instruction Manual

7.3Baking the STP Pump

To attain a lower pressure in a shorter time and reduce the exhaust time, bake the vacuum equipment and STP pump.

Manual backgroundManual background WARNINGManual background

The surfaces of the STP pump and its peripheral equipment will become extremely hot when performing baking. NEVER touch them with bare hands.

Manual backgroundManual background CAUTION Manual background

When baking the STP pump, always cool it to prevent overheating (for the cooling method, see Section 7.2, "Cooling the STP Pump").

Start baking after cooling is started.

Set the temperature of the baking heater to 120 or lower (an optional baking heater is set to 110 or lower).

DO NOT suck gases during baking to prevent overheating.

Manual backgroundNOTICEManual backgroundManual backgroundManual background

To exhaust the gas discharged from the vacuum equipment and the inner wall of the STP pump, run the STP pump during baking.

7.3.1Attaching a Baking Heater

1)Attach a baking heater (optional accessory) as near as possible to the inlet port flange.

2)Affix the "Hot Surface Warning Label" to the surface of the STP pump so that the operator can see it clearly at any time.

Manual backgroundManual background CAUTION Manual background

Check the rated voltage of the baking heater before use.

Wind the baking heater around the surface of the STP pump tightly. If the baking heater is not wound tightly, the loose parts will overheat.

Procure protective parts for the baking heater, such as a residual current operated circuit breaker and fuses when using the baking heater (remote terminal block TB2 incorporates fuses).

DO NOT apply excessive force to the cable for the baking heater.

7-4

Page 72
Image 72
Seiko Instruments MT-17E-003-D instruction manual 7.3Baking the STP Pump