
Abnormality | Operation state of safety | Lamp indication | REMOTE | State of the STP pump | Probable causes of an |
/Error | functions | output signal | abnormality/error | ||
Overheating | Temperature of the STP | "OVER | "ALARM" | The STP pump stops. | Abnormal baking temperature. |
inside the | pump motor: 110 ℃ or | TEMPERATURE" |
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| Insufficient cooling. |
STP pump | more | "FAILURE" |
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| Leakage of vacuum equipment |
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| or piping. |
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| Continuous repetition of |
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| startup/shutdown. |
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| temperature. |
Overheating | 90℃ or more in the STP | "FAILURE" | "ALARM" | The STP pump stops. | Failure in the cooling fan. |
inside the | control unit and heat sink. |
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| Shielding of cooling air inlet |
STP control |
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| and ventilation port. |
unit |
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| temperature |
Overspeed | Rotational speed of the STP | "FAILURE" | "ALARM" | The STP pump stops. | Failure in the inverter. |
| pump:37,500 rpm or more. |
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Abnormal | Battery terminal voltage: | "FAILURE" *2 | "ALARM" | The STP pump does not start. | Incorrect connection of the |
battery | 42 V or lower*1 | ("EMERGENCY |
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| battery. |
terminal |
| OPERATION" or |
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| Battery capacity became less |
voltage |
| "BATTERY NG" |
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| than operating limit value. |
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| lamp may light) |
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*1 : When capacity of battery is less than operating limit value largely, there may be the thing that battery abnormal detection does not operate.
*2 : When the power is turned on again, this lamp goes out.