Seiko Instruments MT-17E-003-D instruction manual Symptom

STP-H600/H1000 Series Instruction Manual

No.	Symptom		Probable Causes			Countermeasures	Referred
							Section
2	The STP pump	(1)	Baking temperature		Set the temperature to		7.3
	stops.		overheat.		120 ℃ or lower.
		(2)	Insufficient cooling.		Always cool during baking		7.2
					or gas suction.
		(3)	Power failure.		Check if power has failed.		6.1.1
		(4)	Over vibration		After the STP pump stops		6.1.3
		(5)	(vibration 100 ￿m p-p		thoroughly, power OFF
			or more).		and remove external
					vibration so as not to
					transmit it to the STP
					pump.
		(6)	Overheating inside the		Remove heat source or
			STP control unit.		shield for air route.
			1)	Ambient	1)	Keep ambient	4.2.1
				temperature		temperature 40 ￿C or
			2)	Insufficient		lower.	4.2.2
					2)	Remove obstacles at
				cooling of the STP		the ventilation port.	12.2
				control unit.		If the air cooling fan
						is broken, contact
						Seiko Seiki.
		(7)	Improper pressure of		Use the maximum		3.3.4
			the inlet port.		working pressure or less.		16.1
		(8)	Improper pressure of		Use the allowable backing		3.3.4
			the outlet port.		pressure or less.		16.1
3	Rotor falls during	(1)	Failure of the STP		Inspection is needed.		4.4.2
	operation.		connection cable.		Contact Seiko Seiki.
		(2)	Failure of the battery.		Inspection is needed.		9
					Contact Seiko Seiki.		10
4	Ultimate pressure	(1)	Failure of the auxiliary		Check the auxiliary pump		3.3
	is insufficient.		pump.		for its capacity and		16.1
					START state.
					(use a pump with the
					recommended capacity or
					more).
		(2)	Leakage of the piping		Check the piping system.		3.3.4
			system.
		(3)	Residual molecule.		If the main composition is		7.3
					H2 or H2O, perform
					baking; if it is other than
					H2 or H2O, clean the
					inside of the vacuum
					equipment		12.4
					(If gases remain inside
					the STP pump, contact
					Seiko Seiki when it is
					needed to be cleaned).

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