No. | Symptom |
| Probable Causes |
| Countermeasures | Referred | |
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| Section | |||||
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2 | The STP pump | (1) | Baking temperature | Set the temperature to | 7.3 | ||
| stops. |
| overheat. | 120 ℃ or lower. |
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| (2) | Insufficient cooling. | Always cool during baking | 7.2 | ||
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| or gas suction. |
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| (3) | Power failure. | Check if power has failed. | 6.1.1 | ||
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| (4) | Over vibration | After the STP pump stops | 6.1.3 | ||
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| (5) | (vibration 100 m | thoroughly, power OFF |
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| or more). | and remove external |
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| vibration so as not to |
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| transmit it to the STP |
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| pump. |
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| (6) | Overheating inside the | Remove heat source or |
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| STP control unit. | shield for air route. |
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| 1) | Ambient | 1) | Keep ambient | 4.2.1 |
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| temperature |
| temperature 40 C or |
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| 2) | Insufficient |
| lower. | 4.2.2 |
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| 2) | Remove obstacles at | |||
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| cooling of the STP |
| the ventilation port. | 12.2 |
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| control unit. |
| If the air cooling fan | |
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| is broken, contact |
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| Seiko Seiki. |
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| (7) | Improper pressure of | Use the maximum | 3.3.4 | ||
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| the inlet port. | working pressure or less. | 16.1 | ||
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| (8) | Improper pressure of | Use the allowable backing | 3.3.4 | ||
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| the outlet port. | pressure or less. | 16.1 | ||
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3 | Rotor falls during | (1) | Failure of the STP | Inspection is needed. | 4.4.2 | ||
| operation. |
| connection cable. | Contact Seiko Seiki. |
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| (2) | Failure of the battery. | Inspection is needed. | 9 | ||
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| Contact Seiko Seiki. | 10 | |
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4 | Ultimate pressure | (1) | Failure of the auxiliary | Check the auxiliary pump | 3.3 | ||
| is insufficient. |
| pump. | for its capacity and | 16.1 | ||
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| START state. |
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| (use a pump with the |
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| recommended capacity or |
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| more). |
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| (2) | Leakage of the piping | Check the piping system. | 3.3.4 | ||
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| system. |
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| (3) | Residual molecule. | If the main composition is | 7.3 | ||
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| H2 or H2O, perform |
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| baking; if it is other than |
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| H2 or H2O, clean the |
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| inside of the vacuum |
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| equipment | 12.4 | |
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| (If gases remain inside | ||
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| the STP pump, contact |
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| Seiko Seiki when it is |
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| needed to be cleaned). |
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Page 108
Image 108
