Seiko Instruments MT-17E-003-D instruction manual 3.2.2Installation Area

STP-H600/H1000 Series Instruction Manual

3.2.2Installation Area

Leave enough space for the following in addition to that for the STP pump:

￿￿Space for maintenance and inspection

￿￿Space for connecting cables

◇The minimum bending radius of the STP connection cable is 150 mm (see Figure 16.1, "External Appearance of the STP Pump" [bending dimensions of the STP connection cable]).

DO NOT excessively bend the cables and beware of any obstacles when installing the STP pump.

Also, leave enough space to install other cables without bending them excessively.

3.2.3Bench

A bench must be prepared by the customer to secure the STP pump. The shape and size of the bench differ depending upon the type of STP pump. Follow the precautions of the WARNING, CAUTION, or NOTICE (See Section 3.3.3, "How to Secure the STP Pump").

◇The STP pump is provided with a high-speed rotor. Any internal abnormality/error may result in a jump in rotational torque leading to personal injury or peripheral equipment damage.

Design and secure the bench for the STP pump so that it can withstand the maximum torque generated due to the occurrence of an abnormality/error. Refer to Section 3.3.3 “How to Secure the STP Pump” for abnormal torque.

◇Secure the customer-prepared bench and the vacuum equipment on the floor or peripheral equipment and other equipment in accordance with the customer application. NEVER move them while the STP pump is in operation.

Use fitting bolts with a strength equal to or higher than SUS 304*1 . (Tensile strength class*1: 50 or more as a target)

◇The screw hole for leg for securing the STP pump is M12*1, and the depth is 24mm (8 positions).

For the external appearance of the STP pump, see Figure 16.1, "External Appearance of the STP Pump."

*1 :JIS

3-4