Seiko Instruments MT-17E-003-D instruction manual 1Piping at the Inlet Port Flange

STP-H600/H1000 Series Instruction Manual

(1)Piping at the Inlet Port Flange

Attach the inlet port to the high vacuum side.

Maximum working pressure (Pressure at the inlet port flange applicable continuously)

￿￿67 Pa [0.5 Torr] (for water cooled)

￿￿5.3 Pa [4×10-2Torr] (for air cooled)

￿￿0.9 Pa [7×10-3Torr] (for natural air cooled)

￿￿13 Pa [0.1 Torr] (when TMS unit is used)

(2)Piping at the Outlet Port Flange

Attach the outlet port to the inlet port flange of the auxiliary pump (primary side pump).

Allowable backing pressure (Pressure at the outlet port flange applicable continuously)

￿￿400 Pa [3 Torr] (for water cooled, when TMS unit is used)

￿￿267 Pa [2 Torr](for air cooled, natural air cooled)

◇To attain the ultimate pressure shown in Table 16.1, "Specifications for STP Pump", set the pressure at the outlet port flange to 1.3 Pa (10-2Torr) or less.

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