3.3.4Vacuum Piping | Seiko Instruments MT-17E-003-D guide

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Seiko Instruments MT-17E-003-D instruction manual 3.3.4Vacuum Piping

Contents

Third Edition-d STP-H600/H1000SeriesMT-17E-003-D Symbols SAFETY PRECAUTIONSDeath or Serious Personal Injury Operators can burn hands Connect or disconnect cables DO NOT put foreign objects into the STP pump. Doing so may result in product damage Applied Directives EC Machinery Directive INTRODUCTIONAPPLIED STANDARDS EC Electromagnetic Compatibility Directive Seiko Instruments Inc PRECAUTIONSREQUEST Sales Office Japan LIMITED WARRANTY indication “WARNING” message on the LCD display 16Overhaul and replacement of maintenance partsTouch down bearing Heater TABLE OF CONTENTS 7 Gas Suction, Cooling and Baking the STP Pump 12 Maintenance and Inspection TABLES FIGURES 1 Precautions for Safe Operation of the STP Pump 1.3Inspection Precautions 1.4Labels 3Heavy Product Caution Label 6Connector Caution Label 200～240V 浮上調整を行う場合は弊社のトレーニングまたは許可を受けてください。 Tuning must be performed 2 Unpacking 2.2Unpacking the STP Control Unit 3.1Name and Function of Each Part 3 Installation of the STP pumpNEVER remove it 4 Motor Connector 8 Ground Terminal 9 Temperature Sensor Connector Optional Accessory6 Cooling Water Port 3 STP Connector Figure 3.1 Configuration of the STP Pump 3.2Precautions Before Installation 3.2.2Installation Area 3.3How to Install the STP Pump 3.3.1Cleaning the Seal Figure 3.3 STP Pump Installation Positions 3.3.2STP Pump Installation PositionsUpside-down Horizontal STP Pump Slanted Vertical 12.0 Size of boltTightening torque of bolt Nm 24.1 Recommended fitting bolt for flange a When the base is not securedWhen securing the inlet port with bolts Secure the base ISO 160 or less Size of FlangeNumber of Claw Clamps 4 or more Vacuum Equipment 3.3.4Vacuum Piping 1Piping at the Inlet Port Flange 3.3.5Connecting the Emergency Vent. Valve 3.3.7Connecting the Ground Cable 4.1Name and Function of Each Part 4 Installation of the STP Control Unit4.1.1Front Panel 8OVER TEMPERATURE Lamp red LED Figure 4.1 STP Control Unit Front Panel 4.1.2Rear Panel Figure 4.2 STP Control Unit Rear Panel 4.1.3Inside of the STP Control Unit 2530 Figure 4.3 Inside of the STP Control Unit 4.2Precautions Before Installation 4.2.1Operating Environment 4.2.2Installation Area part Secure with screw Support Angle 4-10 4.4Cable Connection 4.4.1Name and Dimensions of Each CableFigure 4.6 External Dimensions of Each Cable STP Control Unit Side Figure 4.7 External Dimensions of he Power Cable 4.4.2How to Connect the Cables STP-H600/H1000 Series Table 4.1 Connecting Primary Power Cable Magnified TB1 TB1 Cover Ground Cable for Cover Figure 4.8 How to Secure Primary Power CableCable Fitting Tool 5 How to Start/Stop the STP Pump 5.3Start Procedures 5.5.1Powering ON REMOTESelect one which fits your vacuum equipment 5.5Manual Operation 5.5.5Powering OFF 5.6.2Starting/Stopping the STP Pump 5.6.1Powering ON5.6Remote Operation 5.6.3Starting the STP Pump After Stopping 5.6.4Powering OFF 6.1Safety Functions 6.1.1Power Failure Operation after a Power Recovery 6.1.4Inverter Overload 6.1.2Abnormal State of Magnetic Bearing6.1.3Excessive Vibration 6.1.5Overheating Inside the STP pump 6.1.8Abnormal Battery Voltage 6.2Restarting after Any Safety Function Operates 3Other Cases 6.3Operation of the Emergency Vent. Valve Abnormality Abnormality 7 Gas Suction, Cooling and Baking the STP Pump 7.2Cooling the STP Pump 7.2.2Air Cooling Method 7.3Baking the STP Pump This label is attached to the baking heater Failure to do so may result in electric shock 8 Remote Input/Output Signal Terminal Blocks N.O OUT I/O TB2 Remote Output Signal Terminal Block Table 8.3 Rated Contacts for Relays CR5 and Page L.VALVE DC I/O TB3 STOP IN START INThe screw for the terminal is M4*1 The screw for the terminal is M4*1 START/STOP IN8.4START/STOP TB6 Terminal Block DO NOT apply excessive force to the remote cable 9 Internal Battery Battery Figure 9.1 Life of the Internal Battery9.3How to Charge the Internal Battery Figure 9.2 Allowable Shelf Life of the Internal 9.4BATTERY NG Lamp 9.5How to Replace the Internal Battery 2Disconnect battery internal connector 5 Figure 9.1 How to Replace the Internal Battery Affix this label to the front panel2 8 1 4 10 3 5 11 9.6How to Dispose of the Internal Battery 10 External Battery 10.2Installation of the External Battery 10.3How to Charge the External Battery 11 Operation Principle of the STP Pump 4 Radial electromagnet 3 Radial sensor 7 Touch down bearing 8 Touch down bearing1 Rotor blade 2 Stator blade 3 Radial sensor 4 Radial electromagnet 12 Maintenance and Inspection 12.3Replacing the Fuses 12.4Inspecting for Deposit 12.5Overhaul 12.6Transporting for Repair or Overhaul 13 Storage 13.1The STP Pump 13.3Restarting Precautions 13.2The STP Control Unit 14 Disposal 14.3The Battery 15 Troubleshooting 3Other Cases 15.4Abnormalities While the STP Pump is Rotating Symptom The lamp is being lit Probable Causes PROCEDULamp Being Lit Countermeasures No.4 No.6 16.1Specifications for the STP Pump 16 Specifications and Accessories16-1 16.216.2 Specifications for the STP Control Unit Page 16.4Recommended Spare Parts 16.3AccessoriesTable 16.3 Accessories 16-4 STP-H600/H1000 Unit Install pump securely InstructionManual SEIKO SEIKI SEIKO SEIKI performed be should TuningSAFETY INSTRUCTIONS caution with Handle ださい。やけどします。触らないでく Hot surface Date STP PUMP PROBLEM CHECK SHEETSeiko Seiki Comment Name Mass LengthPressure Sales Office Japan