STP PUMP PROBLEM CHECK SHEET

STP PUMP PROBLEM CHECK SHEET

Contact your nearest Seiko Seiki’s office shown in the rear cover.

To : Company Name

:

 

 

Date :

 

 

 

Contact Name

:

 

 

 

 

 

 

 

 

TEL. Number

:

 

 

 

 

 

 

 

 

FAX. Number

:

 

 

 

 

 

 

 

 

Address

:

 

 

 

 

 

 

 

 

From: Customer Name

:

 

 

 

Date :

 

 

 

Person in charge

:

 

 

 

 

 

 

 

 

 

TEL. Number

:

 

 

 

 

 

 

 

 

FAX. Number

:

 

 

 

 

 

 

 

 

Address

:

 

 

 

 

 

 

 

 

 

 

 

 

Model Name :

Inlet Flange Type :

Length of Connection Cable:

Input Voltage:

STP-

 

 

 

 

 

 

m

V

M/C No. :

Manufacturing Date :

Other:

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Check Items

 

 

State/Result

Abnormality Warning

 

OVER TEMPERATURE

(Check lamps being lit)

 

BATTERY OPERATION

 

 

 

FAILURE

 

 

 

EMERGENCY

 

 

OPERATION

 

 

 

 

BATTERY NG (inside

 

 

panel)

 

 

Pump

Noise

 

Yes / No

 

Vibration

 

Yes / No

 

Heat

 

Yes / No

 

Choke Water

 

Yes / No

 

Deposition

 

Yes / No

 

 

 

 

 

 

Control Unit

Next Battery

 

 

YY

/ MM

 

Replacement Date

 

 

 

 

 

Power Failure

 

 

 

Min.

 

Time

 

 

 

 

 

Blown Fuses

 

Yes / No

 

 

 

(Fuse No. F

)

 

Heat

 

Yes

/

No

 

 

 

 

 

 

Other

Used Gas

 

 

 

 

 

Pump Installation

 

Vertically / Horizontal

 

Position

 

Upside-down

 

 

(

Other

 

)

 

 

 

 

 

Leakage

 

Yes

/

No

 

TMS Unit

 

Yes

/

No

 

 

 

 

 

 

STATE OF PROBLEM

(while the vacuum chamber is in operation, etc.)

OTHER INFORMATION

Seiko Seiki Comment

:

 

 

 

Date

.

.

Name

Job No.

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Image 122
Seiko Instruments MT-17E-003-D instruction manual Stp Pump Problem Check Sheet, Seiko Seiki Comment, Date, Name, Job No