
STP PUMP PROBLEM CHECK SHEET
Contact your nearest Seiko Seiki’s office shown in the rear cover.
To : Company Name | : |
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Contact Name | : |
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TEL. Number | : |
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FAX. Number | : |
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Address | : |
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From: Customer Name | : |
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Person in charge | : |
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TEL. Number | : |
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FAX. Number | : |
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Address | : |
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Model Name : | Inlet Flange Type : | Length of Connection Cable: | Input Voltage: | |||||||
STP- |
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M/C No. : | Manufacturing Date : | Other: |
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Check Items |
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| State/Result | ||
Abnormality Warning |
| □ OVER TEMPERATURE | |||
(Check lamps being lit) |
| □ BATTERY OPERATION | |||
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| □ FAILURE | ||
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| □ EMERGENCY | ||
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| OPERATION |
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| □ BATTERY NG (inside | ||
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Pump | Noise |
| □ Yes / □ No | ||
| Vibration |
| □ Yes / □ No | ||
| Heat |
| □ Yes / □ No | ||
| Choke Water |
| □ Yes / □ No | ||
| Deposition |
| □ Yes / □ No | ||
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Control Unit | Next Battery |
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| YY | / MM |
| Replacement Date |
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| Power Failure |
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| Min. |
| Time |
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| Blown Fuses |
| □ Yes / □ No | ||
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| (Fuse No. F | ) | |
| Heat |
| □ Yes | / | □ No |
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Other | Used Gas |
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| Pump Installation |
| □ Vertically / □ Horizontal | ||
| Position |
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| ( | □ Other |
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| Leakage |
| □ Yes | / | □ No |
| TMS Unit |
| □ Yes | / | □ No |
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◇STATE OF PROBLEM
(while the vacuum chamber is in operation, etc.)
◇OTHER INFORMATION
Seiko Seiki Comment | : |
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Date | . | . | Name | Job No. |