Agilent Technologies Agilent E5250A guide

Introduction

Agilent E5250A Product Description

Agilent E5250A Product Description

Agilent E5250A Low Leakage Switch Mainframe is a computer-controlled switching matrix mainframe designed for semiconductor dc characteristics measurement applications. The E5250A has four slots for installing the modules (plug-in cards) listed in Table 1-1.

These cards can be used in various switching matrix configurations in the E5250A. For example, using four E5252As, you can configure a maximum 10-input

48-output switching matrix, or using four E5255As, you can configure a maximum 2-input ⋅ 96-output multiplexer.

Table 1-1	Available Plug-in Cards for E5250A

		Model No.	Description

		E5252A	10⋅12 Matrix Switch

		E5255A	24 (8⋅3) Channel Multiplexer

Figure 1-1

E5250A Front Panel

Agilent E5250A User’s Guide, Edition 9

1-3

Image 19

Agilent Technologies manual Agilent E5250A Product Description, Available Plug-in Cards for E5250A

Contents

Agilent E5250A Manual Part Number Declaration of Conformity Manufacturer’s Declaration Herstellerbescheinigung Ground the Instrument Safety Summary Do not Substitute Parts or Modify Instrument Use extreme caution when handling, testing, and adjusting CAT Safety Symbols VXIplug&play Driver This Manual Text Conventions Page Contents Executing Self-Test and Leak Test Setting up Measurement Environment Programming the E5250A Controlling the E5250A Command Reference VXIplug&play Driver Specifications Error MessagesExecuting Sample Programs Scpi Command Summary Introduction Introduction Available Plug-in Cards for E5250A Agilent E5250A Product Description Rear Panel Tour Front Panel Tour E5250A Rear Panel AUX Input Agilent E5252A Product Description E5252A Block Diagram E5252A Output Ports May be present at the output connectors IV Input ConnectorsAgilent E5255A Product Description Bias Input By resistors must be less than 16W Resistors E5255A Block Diagram Bias Input Output E5255A Input/Output Connectors ⋅8 multiplexer Options Model Option Item Description Number Options and Accessories Furnished Accessories Model Part Number Description Qty VFP Data Upload Virtual FrontCapacitance Compensation Available Accessories Model Option Description Number Agilent E5250A User’s Guide, Edition Installation Installation When shipping the E5250A To Inspect the E5250A and Accessories Power Cable Power RequirementsRequirements Installation Storage and Shipping Environment Operating EnvironmentDefeated Installing the E5250A To Install Plug-in Card Module Extractor and Location of the Screw Hole To Install Blank Panel Multiplexer Blocks and Components To Configure E5255ABlock Holder Cable Connector To Modify IV Input To Use Multiplexer Blocks on another E5255A To Modify Bias InputAgilent E5255A Component Locations To Select Protective Resistors To Mount Protective Resistors Output multiplexer 3-BIAS inputs, 1-IV input, 1 module E5255A Configuration ExamplesOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module To connect Bias inputs externally Interconnection of Bias Input Connectors Output multiplexer 1-BIAS input, 1-IV input, 4 modules Output multiplexer 1-BIAS input, 1-IV input, 4 modules To Connect Gpib Cable To Set Gpib Address Cleaning MaintenancePerformance Verification Executing Self-Test and Leak Test Performance Verification Executing Self-Test and Leak Test E5250A Self-Test Items Description Executed by Refer to Executing Self-Test Executing the Controller Test To Execute Self-Test StandaloneExecuting the Relay Test If Fail LED is on after Relay Test Settings after Relay TestRelay Test Adapter Connection Before executing Relay Test, be careful about following To Execute Self-Test using External ControllerScpi Commands for Self-Test Requirements Front Panel Interface Test Scpi Commands for Self-Test Test Item Description Assign Self-Test Programming Example Line Number Description Requirements Using the Self-Test Utility Softkey Description To Start the Self-Test Utility Example of Self Test Menu To Execute Self-Test Fail Condition for Front Panel Interface Test Executing the Front Panel Interface Test Continue To Execute Leak Test Start Test YES Message for non-Kelvin connection Report CRT Agilent E5250A User’s Guide, Edition Setting up Measurement Environment Setting up Measurement Environment Connector Plates for the E5252A Connector PlatesConnector Plates for E5255A 16495E Half size blank plate Blank Plate Example of DUT Connection Connecting 8-Channel Shielded Coaxial Cable Mounting Connectors Directly Recommended Parts Usage Agilent Part Description Dimensions of Connector Holes Interlock Connector Pin Assignments To Install Interlock CircuitTo Make Interlock Circuit Dimensions of Interlock Switch Agilent part number Dimensions of LED Agilent part number To Install LED Circuit To Connect Interlock Circuit to Instrument ProcedureRequired Parts Agilent Quantity Description Model No To Check Interlock Circuit Connector Guard Sense Wire Insulator Plate To Connect Connectors to DUT Low-Noise Coaxial Cable To Connect Instruments to Input Connectors Connecting the E5250A Input Mpsmu Connection Example with Agilent Shows an example of connecting the E5250A to To Connect Gndu to the E5250A Input To Connect Bias Source to the E5255A Bias InputRequired Parts Agilent Quantity Description Model/Part No Connection of Triax-Dual Triax Adapter SMU Input Port Number Input Signal E5252A Output Cable Agilent Model No Description Connecting the E5250A OutputE5252A Output Connector and Output Signal To Connect the E5252A Output 16494B Kelvin Triaxial Cable for E5252A Kelvin Output Port Output Port Number To Connect the E5255A Output E5255A Output Connector and Output Signal Measurement Cable Length Guard Capacitances of E5250A Measurement Environment Typical Controlling the E5250A Controlling the E5250A Windows Workstation Methods for Controlling the E5250ACreating Your Own Program Capacitance Compensation Routine Modifying a Sample Program Using the Virtual Front Panel VFP UtilityVFP Data Upload Library Switch Control Basics Syntax of channellist Parameter Channel List and Channel Configuration Agilent E5250A User’s Guide, Edition Normal Channel ConfigurationAuto Free Connection Rule Connection Sequence Relay Operation Connection Sequence Bias Mode Example of Bias Mode Couple Port Number and Output Port Number Couple PortCouple Input Ports Available Output Port No Couple Port Relay Connections E5252A Channel List Normal Configuration Mode E5252A Channel Number in Normal Config. Mode Switch Control Basics Auto Configuration Mode Controlling the E5250A E5255A Channel List E5255A Channel Number in Normal Config. Mode Auto Configuration Mode Example Setup of E5255A SMU1 Example for E5255A Channel Number in Auto Config. Mode Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility Model/Part No Description Qty Starting the Virtual Front Panel Utility Mode Confirming the E5250A Card Configurations Model Number of each card Changing the VFP Setup ModeChannel Configuration mode Bias Mode state of each card Example of Setup Mode Menu To change the channel configuration modeTo change the Bias Mode state To enter/cancel the changes and return to the VFP main menu To define labels for the E5250A input ports Defining Labels for the E5250A Input Ports Example of Define Label Menu To define labels for the E5255A bias input ports Next Setup Making Connections and Changing the Setup Data To copy a setup memory To change the E5250A setup to specified setup memoryExample of Setup Memory Menu To insert a setup memory To delete a setup memoryTo clear setup memory Memory Setup Panel for the E5252A in Auto Config To modify the settings in Current Setup Memory Using Virtual Front Panel Utility Chan To change the settings in a setup memory To enter a comment for the setup memoryInvalid Input Port Moving the Cursor Softkey Menu ALL To save setup data to diskette Saving/Loading the Setup DataTo load setup data from diskette Programming the E5250A Programming the E5250A Scpi Programming Basics Using a Semicolon to Reduce Typing Scpi Command Hierarchy Example Controlling E5250A by Using HP Basic Creating a Control Program Programming Summary Description Command Default Setting Command Description Defining Channel Configuration ModeDefining Connection Rule Defining Connection Sequence Command Description Using Bias Mode Routcoupport cardno ,`inputportno Using Couple Port for E5252A only Routopen channellist Controlling Relay Switching Programming Examples E5250A Input Ports E5250A Installed CardsChannel Creation Example Mosfet Connection Example Line Description Number Program List E5255A Connection Bias Mode ExampleE5255A Output Ports Example Using Bias Mode Agilent E5250A User’s Guide, Edition Example of Couple Port Couple Port Example Example Using Couple Port Agilent E5250A User’s Guide, Edition Using the VFP Data Upload Library Data string for internal use in the library. Must declare Initvfpsetup subprogramVFP Data Upload Library Loadvfpdata subprogram FNGetvfpcomment$ subprogram Connectvfp subprogram Programming Example Before Executing Your Program Error Messages Using the Capacitance Compensation Routine Freq Capacitance Compensation Routine Required Conditions Using Other than Recommended Cable Program Line No Defines R, L, C value Measurement Parameter Frequency Function Terminals a GET Ccompen Command Reference SYSTem ROUTe Capital Letters Textual Notation for Subsystem Commands Common Commands for E5250A Common CommandsMnemonic Name CLS Bit Binary Description Weight Command Reference *ESE ESR? Response Type Explanation IDN? OPC Connection Rule Bias ModeBias Enabled Channels Couple Port Mode SRE Following four lines enable the same bits bit 4 STB? TST? Parameter values DIAGnostic SubsystemDIAGnostic Command Tree Command Parameter DIAGnosticTESTCARDEXECute? DIAGnosticTESTCARDCLEarParameter Explanation DIAGnosticTESTFRAMeCLEar DIAGnosticTESTCARDSTATe? DIAGnosticTESTFRAMeEXECute? DIAGnosticTESTFRAMeSTATe? ROUTe Subsystem ROUTe Command Tree Parameter values Cardnumber ROUTeBIASCHANnelDISableLIST ROUTeBIASCHANnelDISableCARD ROUTeBIASCHANnelDISableLIST? ROUTeBIASCHANnelENABleCARD ROUTeBIASCHANnelENABleLIST ROUTeBIASCHANnelENABleLIST? ROUTeBIASPORT ROUTeBIASPORT? ROUTeBIASSTATe ROUTeCLOSeCARD? ROUTeBIASSTATe? ROUTeCLOSeLIST? ROUTeCLOSeLIST ROUTeCONNectionRULE? ROUTeCONNectionRULE ROUTeCONNectionSEQuence ROUTeCONNectionSEQuence? Coupleport ROUTeCOUPlePORT ROUTeCOUPlePORT? ROUTeCOUPleSTATe ROUTeCOUPleSTATe? ROUTeFUNCtion? ROUTeFUNCtion ROUTeOPENLIST ROUTeOPENCARD ROUTeOPENLIST? SYSTem Subsystem SYSTem Command Tree Cardconfiguration newlineEND SYSTemCCONfig? Following SYSTemCDEScription? SYSTemCPON SYSTemCTYPe? SYSTemVERSion? SYSTemERRor? Status Reporting Structure Status Reporting Structure Status Reporting Structure of E5250A Status Byte Register of E5250A Status Byte Register Status Byte Register of E5250A Bit Definition Explanation Service Request Enable Register of E5250A Service Request Enable Register Standard Event Status Register of E5250A Standard Event Status Register Bit Definition Explanation Standard Event Status Enable Register Output Queue of E5250A Output Queue Agilent E5250A User’s Guide, Edition VXIplug&play Driver VXIplug&play Driver System Requirements Installing VXIplug&play Driver E5250A Driver Function Lists Driver FunctionsCategory Function Description Agilent E5250A User’s Guide, Edition Hpe5250abiasChanList Hpe5250abiasChanCard Biasdisen Hpe5250abiasChanListQBiasstatus Hpe5250abiasState Hpe5250abiasPort Hpe5250acloseCardQ Hpe5250acloseClosecard Hpe5250acloseList Cmdstr Hpe5250acloseListQHpe5250acmd Closestatus Result Hpe5250acmdDataQHpe5250acmdInt Size Hpe5250acmdInt16Q Hpe5250acmdInt16ArrQCount Hpe5250acmdInt32Q Hpe5250acmdInt32ArrQ Hpe5250acmdReal64ArrQ Hpe5250acmdReal Hpe5250acmdStringQ Hpe5250acmdReal64Q Hpe5250acompenC Sequence Hpe5250aconnRuleSeqCardnoruleseq Rule Hpe5250acouplePort Couplestate Hpe5250acoupleStateHpe5250adcl Couplestatecardn Message Hpe5250aerrormessageHpe5250aerrorquery Errornumber Hpe5250aerrorQueryDetectQ Hpe5250aerrorQueryDetectPErrDetect Errstr ChannelconfigHpe5250aesrQ Hpe5250afunc InstrDesc DoresetHpe5250ainit Hpe5250aopcQ Hpe5250aopenList Hpe5250aopenCardOpencardno StatusByte Hpe5250aopenListQHpe5250areadStatusByteQ Openstatus Instrrev Hpe5250aresetHpe5250arevisionquery Driverrev Filename Hpe5250aselectCompenFile Testmessage Hpe5250aselftestHpe5250atestClear Testresult Hpe5250atimeOutQ Hpe5250atimeOutHpe5250atestExecQ Agilent E5250A User’s Guide, Edition Executing Sample Programs To Keep Original Program Disk Executing Sample Programs Introduction Vth and Capacitance Measurement Program Step Description Vth and Capacitance Measurement Flow User Function Setup Vth Measurement SetupChannel/Source Setup Source Setup Display Setup Xaxis Y1axis Y2axis Capacitance Measurement SetupAuto Analysis Setup Required Equipments Agilent Model/Part No Description Qty Setting up the Measurement Environment Vth and Capacitance Measurement Program Vth and C Measurement Setup and DUT Connection Executing the Program Example of Vth and C Measurement Results To change the header of the measurement result report Parameter Description DefaultModifying the Program To change the Gpib Address To execute the 4155/4156 calibration To output the measurement report to printerTo save the 4155/4156 measurement data To change the Vth measurement setup To change the capacitance measurement setup Subprogram Program Line To use the VFP data upload library Constant Definition To Add the Bias Source Control Routine HCI Measurement Program Test Device for Defining Stress Conditions Determines Stress Condition Characterizes the initial parameters Selects devices valid for the HCI testDevice Device2 Terminal Auto Analysis Function Stress Stress time Cumulative Cycle Applies stress and characterizes the parameters Required Equipment Agilent Model/Part No Description Qty Required Equipments Subend Adding the Bias Source Control Routine Setting up the Measurement Environment Port Internal Connections and DIP SW Settings for E5255AsE5250A Input/Output Connection E5250A Input Measurement E5255A Output Port Device used to Determine Stress Conditions DC HCI Degradation Test Equipment Connections Load Spmux Edit Id-Vds Measurement Example To Execute HCI Test Program Example of Ib-Vgs Measurement Results HCI Degradation Test Result Example Initial/Interim Characterization Example To Execute Analysis Program HCI Degradation Test Data Analysis Example Number of devices Vdstr, Vgstr, Gate length, Gate width Modifying the Program To change Vtci extraction condition To change the 4155/4156 setup file used To change the number of devices To change Idlin and Gmmax extraction conditionTo change the stress times To specify the data displayed on the 4155/4156 screen To change the test limitsTo change the timing for saving the test data Specifications 10-2 Agilent E5250A User’s Guide, Edition Dimensions General Specifications Switch Specifications Agilent E5252A 10x12 Matrix Switch Supplemental Data Typical Data 10-6 Agilent E5250A User’s Guide, Edition Agilent E5255A 24 8x3 Channel Multiplexer Low Leakage I-V Port Operating To 40 C Storage −40 C to 70 C AccessoriesOperating Supplemental Data when used with Agilent Supplemental Data when used with Agilent 4155/4156Range Setting Measurement 10-10 Agilent E5250A User’s Guide, Edition Error Messages Error Category Standard Event Error Range Error Category Command Error Standard Scpi Error Messages Invalid separator Data type errorCommand header error Header separator error Exponent too large Numeric data errorCharacter data error Invalid character in number Character data not allowed String data errorBlock data error Expression error Execution Error Queue overflow Device-Dependent ErrorsDevice-specific error Memory error Query Errors E5250A Specific Error Messages E5250A Channel Related Errors E5250A Card/Mode/Port Related Errors Cannot directly specify Bias Port channel Cannot connect multiple channels in SROUTe modeConfig error. Re-install E5255A Cant change to ACONfig mode. Check card config 11-14 Agilent E5250A User’s Guide, Edition Scpi Command Summary 12-2 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-3 12-4 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-5 12-6 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-7 12-8 Agilent E5250A User’s Guide, Edition