Capacitance Measurement Setup | Agilent Technologies Agilent E5250A

Executing Sample Programs

Vth and Capacitance Measurement Program

Display Setup:

		Xaxis	Y1axis		Y2axis

NAME		Vg	SQRTId		GRAD

SCALE		LINEAR	LINEAR		LINEAR

MIN		0 V	0		0

MAX		5 V	200 m		80 m

Also the DATA VARIAVLES fields set VTH and BETA.
Auto Analysis Setup:
*LINE1: [ TANGENT ] line on [ Y1 ]				at a point where
[ GRAD	] = [ MAX(GRAD)			]

-----------------------------------------------------------

*LINE2: []

-----------------------------------------------------------

*MARKER:		At a point where	]
[	GRAD	] = [ MAX(GRAD)	]
[		]

---------------------

*Interpolate: [OFF]

Capacitance Measurement Setup

Measurement setup of the E5250A and 4284A for this program is as follows:

•E5250A/E5252A Setup:

Slot No

Channels

110905 and 11006

2not used.

3not used.

4not used.

• 4284A Setup:

Measurement Frequency	100 kHz

Signal Level	0.03 V

Measurement Function	Cp-G

9-6	Agilent E5250A User’s Guide, Edition 9

Image 262

Agilent Technologies Agilent E5250A Capacitance Measurement Setup, Display Setup Xaxis Y1axis Y2axis, Auto Analysis Setup

Contents

Agilent E5250A Manual Part Number Declaration of Conformity Herstellerbescheinigung Manufacturer’s Declaration Safety Summary Ground the Instrument Use extreme caution when handling, testing, and adjusting Do not Substitute Parts or Modify Instrument Safety Symbols CAT This Manual VXIplug&play Driver Text Conventions Page Contents Setting up Measurement Environment Executing Self-Test and Leak Test Controlling the E5250A Programming the E5250A Command Reference VXIplug&play Driver Specifications Error MessagesExecuting Sample Programs Scpi Command Summary Introduction Introduction Agilent E5250A Product Description Available Plug-in Cards for E5250A Front Panel Tour Rear Panel Tour AUX Input E5250A Rear Panel E5252A Block Diagram Agilent E5252A Product Description May be present at the output connectors E5252A Output Ports Bias Input ConnectorsAgilent E5255A Product Description IV Input Resistors By resistors must be less than 16W E5255A Block Diagram E5255A Input/Output Connectors ⋅8 multiplexer Bias Input Output Options and Accessories Options Model Option Item Description Number Furnished Accessories Model Part Number Description Qty VFP Data Upload Virtual FrontCapacitance Compensation Available Accessories Model Option Description Number Agilent E5250A User’s Guide, Edition Installation Installation To Inspect the E5250A and Accessories When shipping the E5250A Power Cable Power RequirementsRequirements Installation Storage and Shipping Environment Operating EnvironmentDefeated Installing the E5250A To Install Plug-in Card To Install Blank Panel Module Extractor and Location of the Screw Hole To Modify IV Input To Configure E5255ABlock Holder Cable Connector Multiplexer Blocks and Components To Use Multiplexer Blocks on another E5255A To Modify Bias InputAgilent E5255A Component Locations To Mount Protective Resistors To Select Protective Resistors Output multiplexer 3-BIAS inputs, 1-IV input, 1 module E5255A Configuration ExamplesOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Interconnection of Bias Input Connectors To connect Bias inputs externally Output multiplexer 1-BIAS input, 1-IV input, 4 modules Output multiplexer 1-BIAS input, 1-IV input, 4 modules To Set Gpib Address To Connect Gpib Cable Cleaning MaintenancePerformance Verification Executing Self-Test and Leak Test Executing Self-Test and Leak Test Performance Verification Executing Self-Test E5250A Self-Test Items Description Executed by Refer to Executing the Controller Test To Execute Self-Test StandaloneExecuting the Relay Test If Fail LED is on after Relay Test Settings after Relay TestRelay Test Adapter Connection Requirements To Execute Self-Test using External ControllerScpi Commands for Self-Test Before executing Relay Test, be careful about following Scpi Commands for Self-Test Test Item Description Front Panel Interface Test Self-Test Programming Example Assign Line Number Description Using the Self-Test Utility Requirements To Start the Self-Test Utility Softkey Description To Execute Self-Test Example of Self Test Menu Executing the Front Panel Interface Test Fail Condition for Front Panel Interface Test Continue To Execute Leak Test Start Test YES Message for non-Kelvin connection Report CRT Agilent E5250A User’s Guide, Edition Setting up Measurement Environment Setting up Measurement Environment Connector Plates for the E5252A Connector PlatesConnector Plates for E5255A Blank Plate 16495E Half size blank plate Connecting 8-Channel Shielded Coaxial Cable Example of DUT Connection Mounting Connectors Directly Dimensions of Connector Holes Recommended Parts Usage Agilent Part Description Interlock Connector Pin Assignments To Install Interlock CircuitTo Make Interlock Circuit Dimensions of Interlock Switch Agilent part number To Install LED Circuit Dimensions of LED Agilent part number To Connect Interlock Circuit to Instrument ProcedureRequired Parts Agilent Quantity Description Model No To Check Interlock Circuit To Connect Connectors to DUT Connector Guard Sense Wire Insulator Plate Low-Noise Coaxial Cable Connecting the E5250A Input To Connect Instruments to Input Connectors Mpsmu Shows an example of connecting the E5250A to Connection Example with Agilent To Connect Gndu to the E5250A Input To Connect Bias Source to the E5255A Bias InputRequired Parts Agilent Quantity Description Model/Part No SMU Input Port Number Input Signal Connection of Triax-Dual Triax Adapter To Connect the E5252A Output Connecting the E5250A OutputE5252A Output Connector and Output Signal E5252A Output Cable Agilent Model No Description Kelvin Output Port Output Port Number 16494B Kelvin Triaxial Cable for E5252A E5255A Output Connector and Output Signal To Connect the E5255A Output Measurement Cable Length Guard Capacitances of E5250A Measurement Environment Typical Controlling the E5250A Controlling the E5250A Capacitance Compensation Routine Methods for Controlling the E5250ACreating Your Own Program Windows Workstation Modifying a Sample Program Using the Virtual Front Panel VFP UtilityVFP Data Upload Library Switch Control Basics Channel List and Channel Configuration Syntax of channellist Parameter Agilent E5250A User’s Guide, Edition Normal Channel ConfigurationAuto Connection Rule Free Connection Sequence Connection Sequence Relay Operation Bias Mode Example of Bias Mode Couple Port Number and Output Port Number Couple PortCouple Input Ports Available Output Port No Couple Port Relay Connections Normal Configuration Mode E5252A Channel List Switch Control Basics E5252A Channel Number in Normal Config. Mode Auto Configuration Mode Controlling the E5250A E5255A Channel List E5255A Channel Number in Normal Config. Mode Auto Configuration Mode Example Setup of E5255A SMU1 Example for E5255A Channel Number in Auto Config. Mode Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility Starting the Virtual Front Panel Utility Model/Part No Description Qty Confirming the E5250A Card Configurations Mode Bias Mode state of each card Changing the VFP Setup ModeChannel Configuration mode Model Number of each card To enter/cancel the changes and return to the VFP main menu To change the channel configuration modeTo change the Bias Mode state Example of Setup Mode Menu Defining Labels for the E5250A Input Ports To define labels for the E5250A input ports To define labels for the E5255A bias input ports Example of Define Label Menu Making Connections and Changing the Setup Data Next Setup To copy a setup memory To change the E5250A setup to specified setup memoryExample of Setup Memory Menu To insert a setup memory To delete a setup memoryTo clear setup memory To modify the settings in Current Setup Memory Memory Setup Panel for the E5252A in Auto Config Using Virtual Front Panel Utility Chan To change the settings in a setup memory To enter a comment for the setup memoryInvalid Input Port Softkey Menu Moving the Cursor ALL To save setup data to diskette Saving/Loading the Setup DataTo load setup data from diskette Programming the E5250A Programming the E5250A Scpi Programming Basics Scpi Command Hierarchy Using a Semicolon to Reduce Typing Controlling E5250A by Using HP Basic Example Creating a Control Program Description Command Default Setting Programming Summary Command Description Defining Channel Configuration ModeDefining Connection Rule Defining Connection Sequence Using Bias Mode Command Description Using Couple Port for E5252A only Routcoupport cardno ,`inputportno Controlling Relay Switching Routopen channellist Programming Examples Mosfet Connection Example E5250A Installed CardsChannel Creation Example E5250A Input Ports Program List Line Description Number E5255A Connection Bias Mode ExampleE5255A Output Ports Example Using Bias Mode Agilent E5250A User’s Guide, Edition Couple Port Example Example of Couple Port Example Using Couple Port Agilent E5250A User’s Guide, Edition Using the VFP Data Upload Library Loadvfpdata subprogram Initvfpsetup subprogramVFP Data Upload Library Data string for internal use in the library. Must declare Connectvfp subprogram FNGetvfpcomment$ subprogram Programming Example Before Executing Your Program Error Messages Using the Capacitance Compensation Routine Capacitance Compensation Routine Freq Using Other than Recommended Cable Required Conditions Measurement Parameter Frequency Function Terminals a Program Line No Defines R, L, C value GET Ccompen Command Reference ROUTe SYSTem Textual Notation for Subsystem Commands Capital Letters Common Commands for E5250A Common CommandsMnemonic Name CLS Command Reference *ESE Bit Binary Description Weight ESR? IDN? Response Type Explanation OPC Couple Port Mode Bias ModeBias Enabled Channels Connection Rule SRE Following four lines enable the same bits bit 4 STB? TST? Command Parameter DIAGnostic SubsystemDIAGnostic Command Tree Parameter values DIAGnosticTESTCARDEXECute? DIAGnosticTESTCARDCLEarParameter Explanation DIAGnosticTESTCARDSTATe? DIAGnosticTESTFRAMeCLEar DIAGnosticTESTFRAMeEXECute? DIAGnosticTESTFRAMeSTATe? ROUTe Command Tree ROUTe Subsystem Parameter values Cardnumber ROUTeBIASCHANnelDISableCARD ROUTeBIASCHANnelDISableLIST ROUTeBIASCHANnelDISableLIST? ROUTeBIASCHANnelENABleCARD ROUTeBIASCHANnelENABleLIST ROUTeBIASCHANnelENABleLIST? ROUTeBIASPORT ROUTeBIASPORT? ROUTeBIASSTATe ROUTeBIASSTATe? ROUTeCLOSeCARD? ROUTeCLOSeLIST ROUTeCLOSeLIST? ROUTeCONNectionRULE ROUTeCONNectionRULE? ROUTeCONNectionSEQuence ROUTeCONNectionSEQuence? ROUTeCOUPlePORT Coupleport ROUTeCOUPlePORT? ROUTeCOUPleSTATe ROUTeCOUPleSTATe? ROUTeFUNCtion ROUTeFUNCtion? ROUTeOPENCARD ROUTeOPENLIST ROUTeOPENLIST? SYSTem Command Tree SYSTem Subsystem SYSTemCCONfig? Cardconfiguration newlineEND SYSTemCDEScription? Following SYSTemCPON SYSTemCTYPe? SYSTemERRor? SYSTemVERSion? Status Reporting Structure Status Reporting Structure Status Reporting Structure of E5250A Status Byte Register Status Byte Register of E5250A Status Byte Register of E5250A Bit Definition Explanation Service Request Enable Register Service Request Enable Register of E5250A Standard Event Status Register Standard Event Status Register of E5250A Standard Event Status Enable Register Bit Definition Explanation Output Queue Output Queue of E5250A Agilent E5250A User’s Guide, Edition VXIplug&play Driver VXIplug&play Driver System Requirements Installing VXIplug&play Driver E5250A Driver Function Lists Driver FunctionsCategory Function Description Agilent E5250A User’s Guide, Edition Hpe5250abiasChanCard Hpe5250abiasChanList Biasdisen Hpe5250abiasChanListQBiasstatus Hpe5250abiasPort Hpe5250abiasState Hpe5250acloseCardQ Hpe5250acloseClosecard Hpe5250acloseList Closestatus Hpe5250acloseListQHpe5250acmd Cmdstr Size Hpe5250acmdDataQHpe5250acmdInt Result Hpe5250acmdInt16Q Hpe5250acmdInt16ArrQCount Hpe5250acmdInt32ArrQ Hpe5250acmdInt32Q Hpe5250acmdReal Hpe5250acmdReal64ArrQ Hpe5250acmdReal64Q Hpe5250acmdStringQ Hpe5250acompenC Rule Hpe5250aconnRuleSeqCardnoruleseq Sequence Hpe5250acouplePort Couplestatecardn Hpe5250acoupleStateHpe5250adcl Couplestate Errornumber Hpe5250aerrormessageHpe5250aerrorquery Message Hpe5250aerrorQueryDetectQ Hpe5250aerrorQueryDetectPErrDetect Hpe5250afunc ChannelconfigHpe5250aesrQ Errstr Hpe5250aopcQ DoresetHpe5250ainit InstrDesc Hpe5250aopenList Hpe5250aopenCardOpencardno Openstatus Hpe5250aopenListQHpe5250areadStatusByteQ StatusByte Driverrev Hpe5250aresetHpe5250arevisionquery Instrrev Hpe5250aselectCompenFile Filename Testresult Hpe5250aselftestHpe5250atestClear Testmessage Hpe5250atimeOutQ Hpe5250atimeOutHpe5250atestExecQ Agilent E5250A User’s Guide, Edition Executing Sample Programs Executing Sample Programs To Keep Original Program Disk Vth and Capacitance Measurement Program Introduction Vth and Capacitance Measurement Flow Step Description Source Setup Vth Measurement SetupChannel/Source Setup User Function Setup Display Setup Xaxis Y1axis Y2axis Capacitance Measurement SetupAuto Analysis Setup Setting up the Measurement Environment Required Equipments Agilent Model/Part No Description Qty Vth and C Measurement Setup and DUT Connection Vth and Capacitance Measurement Program Executing the Program Example of Vth and C Measurement Results To change the Gpib Address Parameter Description DefaultModifying the Program To change the header of the measurement result report To execute the 4155/4156 calibration To output the measurement report to printerTo save the 4155/4156 measurement data To change the Vth measurement setup To change the capacitance measurement setup To use the VFP data upload library Subprogram Program Line Constant Definition HCI Measurement Program To Add the Bias Source Control Routine Determines Stress Condition Test Device for Defining Stress Conditions Characterizes the initial parameters Selects devices valid for the HCI testDevice Device2 Terminal Auto Analysis Function Applies stress and characterizes the parameters Stress Stress time Cumulative Cycle Required Equipments Required Equipment Agilent Model/Part No Description Qty Adding the Bias Source Control Routine Subend Setting up the Measurement Environment E5250A Input Measurement E5255A Output Port Internal Connections and DIP SW Settings for E5255AsE5250A Input/Output Connection Port DC HCI Degradation Test Equipment Connections Device used to Determine Stress Conditions Load Spmux Edit Id-Vds Measurement Example To Execute HCI Test Program Example of Ib-Vgs Measurement Results Initial/Interim Characterization Example HCI Degradation Test Result Example To Execute Analysis Program HCI Degradation Test Data Analysis Example Number of devices Vdstr, Vgstr, Gate length, Gate width Modifying the Program To change the 4155/4156 setup file used To change Vtci extraction condition To change the number of devices To change Idlin and Gmmax extraction conditionTo change the stress times To specify the data displayed on the 4155/4156 screen To change the test limitsTo change the timing for saving the test data Specifications 10-2 Agilent E5250A User’s Guide, Edition General Specifications Dimensions Agilent E5252A 10x12 Matrix Switch Switch Specifications Typical Data Supplemental Data Agilent E5255A 24 8x3 Channel Multiplexer 10-6 Agilent E5250A User’s Guide, Edition Low Leakage I-V Port Operating To 40 C Storage −40 C to 70 C AccessoriesOperating Supplemental Data when used with Agilent Supplemental Data when used with Agilent 4155/4156Range Setting Measurement 10-10 Agilent E5250A User’s Guide, Edition Error Messages Error Range Error Category Error Category Standard Event Standard Scpi Error Messages Command Error Header separator error Data type errorCommand header error Invalid separator Invalid character in number Numeric data errorCharacter data error Exponent too large Expression error String data errorBlock data error Character data not allowed Execution Error Memory error Device-Dependent ErrorsDevice-specific error Queue overflow Query Errors E5250A Specific Error Messages E5250A Channel Related Errors E5250A Card/Mode/Port Related Errors Cant change to ACONfig mode. Check card config Cannot connect multiple channels in SROUTe modeConfig error. Re-install E5255A Cannot directly specify Bias Port channel 11-14 Agilent E5250A User’s Guide, Edition Scpi Command Summary 12-2 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-3 12-4 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-5 12-6 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-7 12-8 Agilent E5250A User’s Guide, Edition