Agilent E5250A
 Manual Part Number
 Declaration of Conformity
 Herstellerbescheinigung
Manufacturer’s Declaration
 Safety Summary
Ground the Instrument
 Use extreme caution when handling, testing, and adjusting
Do not Substitute Parts or Modify Instrument
 Safety Symbols
CAT
 This Manual
VXIplug&play Driver
 Text Conventions
Page
 Contents
 Setting up Measurement Environment
Executing Self-Test and Leak Test
 Controlling the E5250A
Programming the E5250A
 Command Reference
 VXIplug&play Driver
Specifications Error Messages
Executing Sample Programs
 Scpi Command Summary
 Introduction
 Introduction
 Agilent E5250A Product Description
Available Plug-in Cards for E5250A
 Front Panel Tour
Rear Panel Tour
 AUX Input
E5250A Rear Panel
 E5252A Block Diagram
Agilent E5252A Product Description
 May be present at the output connectors
E5252A Output Ports
 Connectors
Agilent E5255A Product Description
Bias Input
IV Input
 Resistors
By resistors must be less than 16W
 E5255A Block Diagram
 E5255A Input/Output Connectors ⋅8 multiplexer
Bias Input Output
 Options and Accessories
Options Model Option Item Description Number
 Furnished Accessories Model Part Number Description Qty
 VFP Data Upload
Virtual Front
Capacitance Compensation
 Available Accessories Model Option Description Number
 Agilent E5250A User’s Guide, Edition
 Installation
 Installation
 To Inspect the E5250A and Accessories
When shipping the E5250A
 Power Cable
Power Requirements
Requirements
 Installation
 Storage and Shipping Environment
Operating Environment
Defeated
 Installing the E5250A
 To Install Plug-in Card
 To Install Blank Panel
Module Extractor and Location of the Screw Hole
 To Configure E5255A
Block Holder Cable Connector
To Modify IV Input
Multiplexer Blocks and Components
 To Use Multiplexer Blocks on another E5255A
To Modify Bias Input
Agilent E5255A Component Locations
 To Mount Protective Resistors
To Select Protective Resistors
 Output multiplexer 3-BIAS inputs, 1-IV input, 1 module
E5255A Configuration Examples
Output multiplexer 3-BIAS inputs, 1-IV input, 1 module
 Output multiplexer 1-BIAS input, 1-IV input, 1 module
Output multiplexer 1-BIAS input, 1-IV input, 1 module
 Interconnection of Bias Input Connectors
To connect Bias inputs externally
 Output multiplexer 1-BIAS input, 1-IV input, 4 modules
Output multiplexer 1-BIAS input, 1-IV input, 4 modules
 To Set Gpib Address
To Connect Gpib Cable
 Cleaning
Maintenance
Performance Verification
 Executing Self-Test and Leak Test
 Executing Self-Test and Leak Test
Performance Verification
 Executing Self-Test
E5250A Self-Test Items Description Executed by Refer to
 Executing the Controller Test
To Execute Self-Test Standalone
Executing the Relay Test
 If Fail LED is on after Relay Test
Settings after Relay Test
Relay Test Adapter Connection
 To Execute Self-Test using External Controller
Scpi Commands for Self-Test
Requirements
Before executing Relay Test, be careful about following
 Scpi Commands for Self-Test Test Item Description
Front Panel Interface Test
 Self-Test Programming Example
Assign
 Line Number Description
 Using the Self-Test Utility
Requirements
 To Start the Self-Test Utility
Softkey Description
 To Execute Self-Test
Example of Self Test Menu
 Executing the Front Panel Interface Test
Fail Condition for Front Panel Interface Test
 Continue
 To Execute Leak Test
 Start Test
 YES
 Message for non-Kelvin connection
 Report CRT
 Agilent E5250A User’s Guide, Edition
 Setting up Measurement Environment
 Setting up Measurement Environment
 Connector Plates for the E5252A
Connector Plates
Connector Plates for E5255A
 Blank Plate
16495E Half size blank plate
 Connecting 8-Channel Shielded Coaxial Cable
Example of DUT Connection
 Mounting Connectors Directly
 Dimensions of Connector Holes
Recommended Parts Usage Agilent Part Description
 Interlock Connector Pin Assignments
To Install Interlock Circuit
To Make Interlock Circuit
 Dimensions of Interlock Switch Agilent part number
 To Install LED Circuit
Dimensions of LED Agilent part number
 To Connect Interlock Circuit to Instrument
Procedure
Required Parts Agilent Quantity Description Model No
 To Check Interlock Circuit
 To Connect Connectors to DUT
Connector Guard Sense Wire Insulator Plate
 Low-Noise Coaxial Cable
 Connecting the E5250A Input
To Connect Instruments to Input Connectors
 Mpsmu
 Shows an example of connecting the E5250A to
Connection Example with Agilent
 To Connect Gndu to the E5250A Input
To Connect Bias Source to the E5255A Bias Input
Required Parts Agilent Quantity Description Model/Part No
 SMU Input Port Number Input Signal
Connection of Triax-Dual Triax Adapter
 Connecting the E5250A Output
E5252A Output Connector and Output Signal
To Connect the E5252A Output
E5252A Output Cable Agilent Model No Description
 Kelvin Output Port Output Port Number
16494B Kelvin Triaxial Cable for E5252A
 E5255A Output Connector and Output Signal
To Connect the E5255A Output
 Measurement Cable Length
 Guard Capacitances of E5250A Measurement Environment Typical
 Controlling the E5250A
 Controlling the E5250A
 Methods for Controlling the E5250A
Creating Your Own Program
Capacitance Compensation Routine
Windows Workstation
 Modifying a Sample Program
Using the Virtual Front Panel VFP Utility
VFP Data Upload Library
 Switch Control Basics
 Channel List and Channel Configuration
Syntax of channellist Parameter
 Agilent E5250A User’s Guide, Edition
 Normal
Channel Configuration
Auto
 Connection Rule
Free
 Connection Sequence
Connection Sequence Relay Operation
 Bias Mode
 Example of Bias Mode
 Couple Port Number and Output Port Number
Couple Port
Couple Input Ports Available Output Port No
 Couple Port Relay Connections
 Normal Configuration Mode
E5252A Channel List
 Switch Control Basics
E5252A Channel Number in Normal Config. Mode
 Auto Configuration Mode
 Controlling the E5250A
 E5255A Channel List
 E5255A Channel Number in Normal Config. Mode
 Auto Configuration Mode
 Example Setup of E5255A
 SMU1
 Example for E5255A Channel Number in Auto Config. Mode
 Using Virtual Front Panel Utility
 Functions of Virtual Front Panel Utility
 Starting the Virtual Front Panel Utility
Model/Part No Description Qty
 Confirming the E5250A Card Configurations
Mode
 Changing the VFP Setup Mode
Channel Configuration mode
Bias Mode state of each card
Model Number of each card
 To change the channel configuration mode
To change the Bias Mode state
To enter/cancel the changes and return to the VFP main menu
Example of Setup Mode Menu
 Defining Labels for the E5250A Input Ports
To define labels for the E5250A input ports
 To define labels for the E5255A bias input ports
Example of Define Label Menu
 Making Connections and Changing the Setup Data
Next Setup
 To copy a setup memory
To change the E5250A setup to specified setup memory
Example of Setup Memory Menu
 To insert a setup memory
To delete a setup memory
To clear setup memory
 To modify the settings in Current Setup Memory
Memory Setup Panel for the E5252A in Auto Config
 Using Virtual Front Panel Utility
 Chan
 To change the settings in a setup memory
To enter a comment for the setup memory
Invalid Input Port
 Softkey Menu
Moving the Cursor
 ALL
 To save setup data to diskette
Saving/Loading the Setup Data
To load setup data from diskette
 Programming the E5250A
 Programming the E5250A
 Scpi Programming Basics
 Scpi Command Hierarchy
Using a Semicolon to Reduce Typing
 Controlling E5250A by Using HP Basic
Example
 Creating a Control Program
 Description Command Default Setting
Programming Summary
 Command Description
Defining Channel Configuration Mode
Defining Connection Rule
 Defining Connection Sequence
 Using Bias Mode
Command Description
 Using Couple Port for E5252A only
Routcoupport cardno ,`inputportno
 Controlling Relay Switching
Routopen channellist
 Programming Examples
 E5250A Installed Cards
Channel Creation Example
Mosfet Connection Example
E5250A Input Ports
 Program List
Line Description Number
 E5255A Connection
Bias Mode Example
E5255A Output Ports
 Example Using Bias Mode
 Agilent E5250A User’s Guide, Edition
 Couple Port Example
Example of Couple Port
 Example Using Couple Port
 Agilent E5250A User’s Guide, Edition
 Using the VFP Data Upload Library
 Initvfpsetup subprogram
VFP Data Upload Library
Loadvfpdata subprogram
Data string for internal use in the library. Must declare
 Connectvfp subprogram
FNGetvfpcomment$ subprogram
 Programming Example
 Before Executing Your Program
 Error Messages
 Using the Capacitance Compensation Routine
 Capacitance Compensation Routine
Freq
 Using Other than Recommended Cable
Required Conditions
 Measurement Parameter Frequency Function Terminals a
Program Line No Defines R, L, C value
 GET Ccompen
 Command Reference
 ROUTe
SYSTem
 Textual Notation for Subsystem Commands
Capital Letters
 Common Commands for E5250A
Common Commands
Mnemonic Name
 CLS
 Command Reference *ESE
Bit Binary Description Weight
 ESR?
 IDN?
Response Type Explanation
 OPC
 Bias Mode
Bias Enabled Channels
Couple Port Mode
Connection Rule
 SRE
 Following four lines enable the same bits bit 4
 STB?
 TST?
 DIAGnostic Subsystem
DIAGnostic Command Tree
Command Parameter
Parameter values
 DIAGnosticTESTCARDEXECute?
DIAGnosticTESTCARDCLEar
Parameter Explanation
 DIAGnosticTESTCARDSTATe?
DIAGnosticTESTFRAMeCLEar
 DIAGnosticTESTFRAMeEXECute?
 DIAGnosticTESTFRAMeSTATe?
 ROUTe Command Tree
ROUTe Subsystem
 Parameter values Cardnumber
 ROUTeBIASCHANnelDISableCARD
ROUTeBIASCHANnelDISableLIST
 ROUTeBIASCHANnelDISableLIST?
 ROUTeBIASCHANnelENABleCARD
 ROUTeBIASCHANnelENABleLIST
 ROUTeBIASCHANnelENABleLIST?
 ROUTeBIASPORT
 ROUTeBIASPORT?
 ROUTeBIASSTATe
 ROUTeBIASSTATe?
ROUTeCLOSeCARD?
 ROUTeCLOSeLIST
ROUTeCLOSeLIST?
 ROUTeCONNectionRULE
ROUTeCONNectionRULE?
 ROUTeCONNectionSEQuence
 ROUTeCONNectionSEQuence?
 ROUTeCOUPlePORT
Coupleport
 ROUTeCOUPlePORT?
 ROUTeCOUPleSTATe
 ROUTeCOUPleSTATe?
 ROUTeFUNCtion
ROUTeFUNCtion?
 ROUTeOPENCARD
ROUTeOPENLIST
 ROUTeOPENLIST?
 SYSTem Command Tree
SYSTem Subsystem
 SYSTemCCONfig?
Cardconfiguration newlineEND
 SYSTemCDEScription?
Following
 SYSTemCPON
 SYSTemCTYPe?
 SYSTemERRor?
SYSTemVERSion?
 Status Reporting Structure
Status Reporting Structure
 Status Reporting Structure of E5250A
 Status Byte Register
Status Byte Register of E5250A
 Status Byte Register of E5250A Bit Definition Explanation
 Service Request Enable Register
Service Request Enable Register of E5250A
 Standard Event Status Register
Standard Event Status Register of E5250A
 Standard Event Status Enable Register
Bit Definition Explanation
 Output Queue
Output Queue of E5250A
 Agilent E5250A User’s Guide, Edition
 VXIplug&play Driver
 VXIplug&play Driver
 System Requirements
 Installing VXIplug&play Driver
 E5250A Driver Function Lists
Driver Functions
Category Function Description
 Agilent E5250A User’s Guide, Edition
 Hpe5250abiasChanCard
Hpe5250abiasChanList
 Biasdisen
Hpe5250abiasChanListQ
Biasstatus
 Hpe5250abiasPort
Hpe5250abiasState
 Hpe5250acloseCardQ
Hpe5250aclose
Closecard
 Hpe5250acloseList
 Hpe5250acloseListQ
Hpe5250acmd
Closestatus
Cmdstr
 Hpe5250acmdDataQ
Hpe5250acmdInt
Size
Result
 Hpe5250acmdInt16Q
Hpe5250acmdInt16ArrQ
Count
 Hpe5250acmdInt32ArrQ
Hpe5250acmdInt32Q
 Hpe5250acmdReal
Hpe5250acmdReal64ArrQ
 Hpe5250acmdReal64Q
Hpe5250acmdStringQ
 Hpe5250acompenC
 Hpe5250aconnRuleSeq
Cardnoruleseq
Rule
Sequence
 Hpe5250acouplePort
 Hpe5250acoupleState
Hpe5250adcl
Couplestatecardn
Couplestate
 Hpe5250aerrormessage
Hpe5250aerrorquery
Errornumber
Message
 Hpe5250aerrorQueryDetectQ
Hpe5250aerrorQueryDetect
PErrDetect
 Channelconfig
Hpe5250aesrQ
Hpe5250afunc
Errstr
 Doreset
Hpe5250ainit
Hpe5250aopcQ
InstrDesc
 Hpe5250aopenList
Hpe5250aopenCard
Opencardno
 Hpe5250aopenListQ
Hpe5250areadStatusByteQ
Openstatus
StatusByte
 Hpe5250areset
Hpe5250arevisionquery
Driverrev
Instrrev
 Hpe5250aselectCompenFile
Filename
 Hpe5250aselftest
Hpe5250atestClear
Testresult
Testmessage
 Hpe5250atimeOutQ
Hpe5250atimeOut
Hpe5250atestExecQ
 Agilent E5250A User’s Guide, Edition
 Executing Sample Programs
 Executing Sample Programs
To Keep Original Program Disk
 Vth and Capacitance Measurement Program
Introduction
 Vth and Capacitance Measurement Flow
Step Description
 Vth Measurement Setup
Channel/Source Setup
Source Setup
User Function Setup
 Display Setup Xaxis Y1axis Y2axis
Capacitance Measurement Setup
Auto Analysis Setup
 Setting up the Measurement Environment
Required Equipments Agilent Model/Part No Description Qty
 Vth and C Measurement Setup and DUT Connection
Vth and Capacitance Measurement Program
 Executing the Program
 Example of Vth and C Measurement Results
 Parameter Description Default
Modifying the Program
To change the Gpib Address
To change the header of the measurement result report
 To execute the 4155/4156 calibration
To output the measurement report to printer
To save the 4155/4156 measurement data
 To change the Vth measurement setup
 To change the capacitance measurement setup
 To use the VFP data upload library
Subprogram Program Line
 Constant Definition
 HCI Measurement Program
To Add the Bias Source Control Routine
 Determines Stress Condition
Test Device for Defining Stress Conditions
 Characterizes the initial parameters
Selects devices valid for the HCI test
Device Device2 Terminal
 Auto Analysis Function
 Applies stress and characterizes the parameters
Stress Stress time Cumulative Cycle
 Required Equipments
Required Equipment Agilent Model/Part No Description Qty
 Adding the Bias Source Control Routine
Subend
 Setting up the Measurement Environment
 Internal Connections and DIP SW Settings for E5255As
E5250A Input/Output Connection
E5250A Input Measurement E5255A Output Port
Port
 DC HCI Degradation Test Equipment Connections
Device used to Determine Stress Conditions
 Load Spmux Edit
 Id-Vds Measurement Example
 To Execute HCI Test Program
 Example of Ib-Vgs Measurement Results
 Initial/Interim Characterization Example
HCI Degradation Test Result Example
 To Execute Analysis Program
 HCI Degradation Test Data Analysis Example
 Number of devices Vdstr, Vgstr, Gate length, Gate width
 Modifying the Program
 To change the 4155/4156 setup file used
To change Vtci extraction condition
 To change the number of devices
To change Idlin and Gmmax extraction condition
To change the stress times
 To specify the data displayed on the 4155/4156 screen
To change the test limits
To change the timing for saving the test data
 Specifications
 10-2 Agilent E5250A User’s Guide, Edition
 General Specifications
Dimensions
 Agilent E5252A 10x12 Matrix Switch
Switch Specifications
 Typical Data
Supplemental Data
 Agilent E5255A 24 8x3 Channel Multiplexer
10-6 Agilent E5250A User’s Guide, Edition
 Low Leakage I-V Port
 Operating To 40 C Storage −40 C to 70 C
Accessories
Operating
 Supplemental Data when used with Agilent
Supplemental Data when used with Agilent 4155/4156
Range Setting Measurement
 10-10 Agilent E5250A User’s Guide, Edition
 Error Messages
 Error Range Error Category
Error Category Standard Event
 Standard Scpi Error Messages
Command Error
 Data type error
Command header error
Header separator error
Invalid separator
 Numeric data error
Character data error
Invalid character in number
Exponent too large
 String data error
Block data error
Expression error
Character data not allowed
 Execution Error
 Device-Dependent Errors
Device-specific error
Memory error
Queue overflow
 Query Errors
 E5250A Specific Error Messages
 E5250A Channel Related Errors
 E5250A Card/Mode/Port Related Errors
 Cannot connect multiple channels in SROUTe mode
Config error. Re-install E5255A
Cant change to ACONfig mode. Check card config
Cannot directly specify Bias Port channel
 11-14 Agilent E5250A User’s Guide, Edition
 Scpi Command Summary
 12-2 Agilent E5250A User’s Guide, Edition
 Agilent E5250A User’s Guide, Edition 12-3
 12-4 Agilent E5250A User’s Guide, Edition
 Agilent E5250A User’s Guide, Edition 12-5
 12-6 Agilent E5250A User’s Guide, Edition
 Agilent E5250A User’s Guide, Edition 12-7
 12-8 Agilent E5250A User’s Guide, Edition