This Manual | Agilent Technologies Agilent E5250A specs

In This Manual

This manual is a user’s guide for Agilent E5250A, and consists of the following chapters:

•Introduction

Provides an overview of the E5250A Low Leakage Switch Mainframe, E5252A 10⋅12 Matrix Switch, and E5255A 24 (8⋅3) Channel Multiplexer.

•Installation

Describes requirements to install the E5250A and tasks for installation.

•Executing Self-Test and Leak Test

Describes how to execute the three Self-Test items (Controller Test, Front Panel Interface Test, and Relay Test) and the Leak Test.

•Setting up Measurement Environment

Explains how to connect your instruments to the E5250A input, and how to connect the E5250A output to your wafer prober or test fixture.

•Controlling the E5250A

Introduces several methods for controlling the E5250A, gives basic information for controlling the relay switches on the plug-in cards, and describes how to use Virtual Front Panel (VFP) utility furnished with the E5250A.

•Programming the E5250A

Describes how to create programs that contain SCPI commands to control the E5250A.

•Command Reference

Describes the SCPI commands available to operate the E5250A via GPIB interface and the status reporting structure.

•VXIplug&play Driver

Introduces the VXIplug&play driver available for the E5250A.

•Executing Sample Programs

Explains how to execute and modify the sample programs stored in the program disk that is furnished with the E5250A.

Image 8

Agilent Technologies Agilent E5250A manual This Manual, VXIplug&play Driver

Contents

Agilent E5250A Manual Part Number Declaration of Conformity Herstellerbescheinigung Manufacturer’s Declaration Safety Summary Ground the Instrument Use extreme caution when handling, testing, and adjusting Do not Substitute Parts or Modify Instrument Safety Symbols CAT This Manual VXIplug&play Driver Text Conventions Page Contents Setting up Measurement Environment Executing Self-Test and Leak Test Controlling the E5250A Programming the E5250A Command Reference Executing Sample Programs Specifications Error MessagesVXIplug&play Driver Scpi Command Summary Introduction Introduction Agilent E5250A Product Description Available Plug-in Cards for E5250A Front Panel Tour Rear Panel Tour AUX Input E5250A Rear Panel E5252A Block Diagram Agilent E5252A Product Description May be present at the output connectors E5252A Output Ports Connectors Agilent E5255A Product DescriptionBias Input IV Input Resistors By resistors must be less than 16W E5255A Block Diagram E5255A Input/Output Connectors ⋅8 multiplexer Bias Input Output Options and Accessories Options Model Option Item Description Number Furnished Accessories Model Part Number Description Qty Capacitance Compensation Virtual FrontVFP Data Upload Available Accessories Model Option Description Number Agilent E5250A User’s Guide, Edition Installation Installation To Inspect the E5250A and Accessories When shipping the E5250A Requirements Power RequirementsPower Cable Installation Defeated Operating EnvironmentStorage and Shipping Environment Installing the E5250A To Install Plug-in Card To Install Blank Panel Module Extractor and Location of the Screw Hole To Configure E5255A Block Holder Cable ConnectorTo Modify IV Input Multiplexer Blocks and Components Agilent E5255A Component Locations To Modify Bias InputTo Use Multiplexer Blocks on another E5255A To Mount Protective Resistors To Select Protective Resistors Output multiplexer 3-BIAS inputs, 1-IV input, 1 module E5255A Configuration ExamplesOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Interconnection of Bias Input Connectors To connect Bias inputs externally Output multiplexer 1-BIAS input, 1-IV input, 4 modules Output multiplexer 1-BIAS input, 1-IV input, 4 modules To Set Gpib Address To Connect Gpib Cable Performance Verification MaintenanceCleaning Executing Self-Test and Leak Test Executing Self-Test and Leak Test Performance Verification Executing Self-Test E5250A Self-Test Items Description Executed by Refer to Executing the Relay Test To Execute Self-Test StandaloneExecuting the Controller Test Relay Test Adapter Connection Settings after Relay TestIf Fail LED is on after Relay Test To Execute Self-Test using External Controller Scpi Commands for Self-TestRequirements Before executing Relay Test, be careful about following Scpi Commands for Self-Test Test Item Description Front Panel Interface Test Self-Test Programming Example Assign Line Number Description Using the Self-Test Utility Requirements To Start the Self-Test Utility Softkey Description To Execute Self-Test Example of Self Test Menu Executing the Front Panel Interface Test Fail Condition for Front Panel Interface Test Continue To Execute Leak Test Start Test YES Message for non-Kelvin connection Report CRT Agilent E5250A User’s Guide, Edition Setting up Measurement Environment Setting up Measurement Environment Connector Plates for E5255A Connector PlatesConnector Plates for the E5252A Blank Plate 16495E Half size blank plate Connecting 8-Channel Shielded Coaxial Cable Example of DUT Connection Mounting Connectors Directly Dimensions of Connector Holes Recommended Parts Usage Agilent Part Description To Make Interlock Circuit To Install Interlock CircuitInterlock Connector Pin Assignments Dimensions of Interlock Switch Agilent part number To Install LED Circuit Dimensions of LED Agilent part number Required Parts Agilent Quantity Description Model No ProcedureTo Connect Interlock Circuit to Instrument To Check Interlock Circuit To Connect Connectors to DUT Connector Guard Sense Wire Insulator Plate Low-Noise Coaxial Cable Connecting the E5250A Input To Connect Instruments to Input Connectors Mpsmu Shows an example of connecting the E5250A to Connection Example with Agilent Required Parts Agilent Quantity Description Model/Part No To Connect Bias Source to the E5255A Bias InputTo Connect Gndu to the E5250A Input SMU Input Port Number Input Signal Connection of Triax-Dual Triax Adapter Connecting the E5250A Output E5252A Output Connector and Output SignalTo Connect the E5252A Output E5252A Output Cable Agilent Model No Description Kelvin Output Port Output Port Number 16494B Kelvin Triaxial Cable for E5252A E5255A Output Connector and Output Signal To Connect the E5255A Output Measurement Cable Length Guard Capacitances of E5250A Measurement Environment Typical Controlling the E5250A Controlling the E5250A Methods for Controlling the E5250A Creating Your Own ProgramCapacitance Compensation Routine Windows Workstation VFP Data Upload Library Using the Virtual Front Panel VFP UtilityModifying a Sample Program Switch Control Basics Channel List and Channel Configuration Syntax of channellist Parameter Agilent E5250A User’s Guide, Edition Auto Channel ConfigurationNormal Connection Rule Free Connection Sequence Connection Sequence Relay Operation Bias Mode Example of Bias Mode Couple Input Ports Available Output Port No Couple PortCouple Port Number and Output Port Number Couple Port Relay Connections Normal Configuration Mode E5252A Channel List Switch Control Basics E5252A Channel Number in Normal Config. Mode Auto Configuration Mode Controlling the E5250A E5255A Channel List E5255A Channel Number in Normal Config. Mode Auto Configuration Mode Example Setup of E5255A SMU1 Example for E5255A Channel Number in Auto Config. Mode Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility Starting the Virtual Front Panel Utility Model/Part No Description Qty Confirming the E5250A Card Configurations Mode Changing the VFP Setup Mode Channel Configuration modeBias Mode state of each card Model Number of each card To change the channel configuration mode To change the Bias Mode stateTo enter/cancel the changes and return to the VFP main menu Example of Setup Mode Menu Defining Labels for the E5250A Input Ports To define labels for the E5250A input ports To define labels for the E5255A bias input ports Example of Define Label Menu Making Connections and Changing the Setup Data Next Setup Example of Setup Memory Menu To change the E5250A setup to specified setup memoryTo copy a setup memory To clear setup memory To delete a setup memoryTo insert a setup memory To modify the settings in Current Setup Memory Memory Setup Panel for the E5252A in Auto Config Using Virtual Front Panel Utility Chan Invalid Input Port To enter a comment for the setup memoryTo change the settings in a setup memory Softkey Menu Moving the Cursor ALL To load setup data from diskette Saving/Loading the Setup DataTo save setup data to diskette Programming the E5250A Programming the E5250A Scpi Programming Basics Scpi Command Hierarchy Using a Semicolon to Reduce Typing Controlling E5250A by Using HP Basic Example Creating a Control Program Description Command Default Setting Programming Summary Defining Connection Rule Defining Channel Configuration ModeCommand Description Defining Connection Sequence Using Bias Mode Command Description Using Couple Port for E5252A only Routcoupport cardno ,`inputportno Controlling Relay Switching Routopen channellist Programming Examples E5250A Installed Cards Channel Creation ExampleMosfet Connection Example E5250A Input Ports Program List Line Description Number E5255A Output Ports Bias Mode ExampleE5255A Connection Example Using Bias Mode Agilent E5250A User’s Guide, Edition Couple Port Example Example of Couple Port Example Using Couple Port Agilent E5250A User’s Guide, Edition Using the VFP Data Upload Library Initvfpsetup subprogram VFP Data Upload LibraryLoadvfpdata subprogram Data string for internal use in the library. Must declare Connectvfp subprogram FNGetvfpcomment$ subprogram Programming Example Before Executing Your Program Error Messages Using the Capacitance Compensation Routine Capacitance Compensation Routine Freq Using Other than Recommended Cable Required Conditions Measurement Parameter Frequency Function Terminals a Program Line No Defines R, L, C value GET Ccompen Command Reference ROUTe SYSTem Textual Notation for Subsystem Commands Capital Letters Mnemonic Name Common CommandsCommon Commands for E5250A CLS Command Reference *ESE Bit Binary Description Weight ESR? IDN? Response Type Explanation OPC Bias Mode Bias Enabled ChannelsCouple Port Mode Connection Rule SRE Following four lines enable the same bits bit 4 STB? TST? DIAGnostic Subsystem DIAGnostic Command TreeCommand Parameter Parameter values Parameter Explanation DIAGnosticTESTCARDCLEarDIAGnosticTESTCARDEXECute? DIAGnosticTESTCARDSTATe? DIAGnosticTESTFRAMeCLEar DIAGnosticTESTFRAMeEXECute? DIAGnosticTESTFRAMeSTATe? ROUTe Command Tree ROUTe Subsystem Parameter values Cardnumber ROUTeBIASCHANnelDISableCARD ROUTeBIASCHANnelDISableLIST ROUTeBIASCHANnelDISableLIST? ROUTeBIASCHANnelENABleCARD ROUTeBIASCHANnelENABleLIST ROUTeBIASCHANnelENABleLIST? ROUTeBIASPORT ROUTeBIASPORT? ROUTeBIASSTATe ROUTeBIASSTATe? ROUTeCLOSeCARD? ROUTeCLOSeLIST ROUTeCLOSeLIST? ROUTeCONNectionRULE ROUTeCONNectionRULE? ROUTeCONNectionSEQuence ROUTeCONNectionSEQuence? ROUTeCOUPlePORT Coupleport ROUTeCOUPlePORT? ROUTeCOUPleSTATe ROUTeCOUPleSTATe? ROUTeFUNCtion ROUTeFUNCtion? ROUTeOPENCARD ROUTeOPENLIST ROUTeOPENLIST? SYSTem Command Tree SYSTem Subsystem SYSTemCCONfig? Cardconfiguration newlineEND SYSTemCDEScription? Following SYSTemCPON SYSTemCTYPe? SYSTemERRor? SYSTemVERSion? Status Reporting Structure Status Reporting Structure Status Reporting Structure of E5250A Status Byte Register Status Byte Register of E5250A Status Byte Register of E5250A Bit Definition Explanation Service Request Enable Register Service Request Enable Register of E5250A Standard Event Status Register Standard Event Status Register of E5250A Standard Event Status Enable Register Bit Definition Explanation Output Queue Output Queue of E5250A Agilent E5250A User’s Guide, Edition VXIplug&play Driver VXIplug&play Driver System Requirements Installing VXIplug&play Driver Category Function Description Driver FunctionsE5250A Driver Function Lists Agilent E5250A User’s Guide, Edition Hpe5250abiasChanCard Hpe5250abiasChanList Biasstatus Hpe5250abiasChanListQBiasdisen Hpe5250abiasPort Hpe5250abiasState Closecard Hpe5250acloseHpe5250acloseCardQ Hpe5250acloseList Hpe5250acloseListQ Hpe5250acmdClosestatus Cmdstr Hpe5250acmdDataQ Hpe5250acmdIntSize Result Count Hpe5250acmdInt16ArrQHpe5250acmdInt16Q Hpe5250acmdInt32ArrQ Hpe5250acmdInt32Q Hpe5250acmdReal Hpe5250acmdReal64ArrQ Hpe5250acmdReal64Q Hpe5250acmdStringQ Hpe5250acompenC Hpe5250aconnRuleSeq CardnoruleseqRule Sequence Hpe5250acouplePort Hpe5250acoupleState Hpe5250adclCouplestatecardn Couplestate Hpe5250aerrormessage Hpe5250aerrorqueryErrornumber Message PErrDetect Hpe5250aerrorQueryDetectHpe5250aerrorQueryDetectQ Channelconfig Hpe5250aesrQHpe5250afunc Errstr Doreset Hpe5250ainitHpe5250aopcQ InstrDesc Opencardno Hpe5250aopenCardHpe5250aopenList Hpe5250aopenListQ Hpe5250areadStatusByteQOpenstatus StatusByte Hpe5250areset Hpe5250arevisionqueryDriverrev Instrrev Hpe5250aselectCompenFile Filename Hpe5250aselftest Hpe5250atestClearTestresult Testmessage Hpe5250atestExecQ Hpe5250atimeOutHpe5250atimeOutQ Agilent E5250A User’s Guide, Edition Executing Sample Programs Executing Sample Programs To Keep Original Program Disk Vth and Capacitance Measurement Program Introduction Vth and Capacitance Measurement Flow Step Description Vth Measurement Setup Channel/Source SetupSource Setup User Function Setup Auto Analysis Setup Capacitance Measurement SetupDisplay Setup Xaxis Y1axis Y2axis Setting up the Measurement Environment Required Equipments Agilent Model/Part No Description Qty Vth and C Measurement Setup and DUT Connection Vth and Capacitance Measurement Program Executing the Program Example of Vth and C Measurement Results Parameter Description Default Modifying the ProgramTo change the Gpib Address To change the header of the measurement result report To save the 4155/4156 measurement data To output the measurement report to printerTo execute the 4155/4156 calibration To change the Vth measurement setup To change the capacitance measurement setup To use the VFP data upload library Subprogram Program Line Constant Definition HCI Measurement Program To Add the Bias Source Control Routine Determines Stress Condition Test Device for Defining Stress Conditions Device Device2 Terminal Selects devices valid for the HCI testCharacterizes the initial parameters Auto Analysis Function Applies stress and characterizes the parameters Stress Stress time Cumulative Cycle Required Equipments Required Equipment Agilent Model/Part No Description Qty Adding the Bias Source Control Routine Subend Setting up the Measurement Environment Internal Connections and DIP SW Settings for E5255As E5250A Input/Output ConnectionE5250A Input Measurement E5255A Output Port Port DC HCI Degradation Test Equipment Connections Device used to Determine Stress Conditions Load Spmux Edit Id-Vds Measurement Example To Execute HCI Test Program Example of Ib-Vgs Measurement Results Initial/Interim Characterization Example HCI Degradation Test Result Example To Execute Analysis Program HCI Degradation Test Data Analysis Example Number of devices Vdstr, Vgstr, Gate length, Gate width Modifying the Program To change the 4155/4156 setup file used To change Vtci extraction condition To change the stress times To change Idlin and Gmmax extraction conditionTo change the number of devices To change the timing for saving the test data To change the test limitsTo specify the data displayed on the 4155/4156 screen Specifications 10-2 Agilent E5250A User’s Guide, Edition General Specifications Dimensions Agilent E5252A 10x12 Matrix Switch Switch Specifications Typical Data Supplemental Data Agilent E5255A 24 8x3 Channel Multiplexer 10-6 Agilent E5250A User’s Guide, Edition Low Leakage I-V Port Operating AccessoriesOperating To 40 C Storage −40 C to 70 C Range Setting Measurement Supplemental Data when used with Agilent 4155/4156Supplemental Data when used with Agilent 10-10 Agilent E5250A User’s Guide, Edition Error Messages Error Range Error Category Error Category Standard Event Standard Scpi Error Messages Command Error Data type error Command header errorHeader separator error Invalid separator Numeric data error Character data errorInvalid character in number Exponent too large String data error Block data errorExpression error Character data not allowed Execution Error Device-Dependent Errors Device-specific errorMemory error Queue overflow Query Errors E5250A Specific Error Messages E5250A Channel Related Errors E5250A Card/Mode/Port Related Errors Cannot connect multiple channels in SROUTe mode Config error. Re-install E5255ACant change to ACONfig mode. Check card config Cannot directly specify Bias Port channel 11-14 Agilent E5250A User’s Guide, Edition Scpi Command Summary 12-2 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-3 12-4 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-5 12-6 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-7 12-8 Agilent E5250A User’s Guide, Edition