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Agilent Technologies Agilent E5250A manual Recommended Parts Usage Agilent Part Description

Models: Agilent E5250A

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				Setting up Measurement Environment
				Mounting Connectors Directly
Table 4-1		Recommended Parts

	Usage		Agilent Part	Description
	Usage		No.	Description
			No.

	Making interlock		1252-1419C	Interlock Connector (6 pin, female)
	circuit
	circuit		3101-0302 or	Switch
			3101-0302 or	Switch
			3101-3241

			1450-0641	LED (VF ≅ 2.1 V @ IF = 10 mA)
			8150-5680	Wire

	Connecting		1250-2457	Triaxial Connector (female)
	E5252A output
	E5252A output		8121-1191	Low Noise Coaxial Cable
			8121-1191	Low Noise Coaxial Cable

	Connecting		1251-2367	Connector Frame (female)
	E5255A output
	E5255A output		1251-0179	Coaxial Connector (female) (8ea. required for one frame.)
			1251-0179	Coaxial Connector (female) (8ea. required for one frame.)

			0380-3070	Screw (2ea. required for one frame.)

			2260-0002	Nut (2ea. required for one frame.)

			2190-0913	Washer (2ea. required for one frame.)

			8121-1191	Low Noise Coaxial Cable

Table 4-2	Dimensions of Connector Holes
Kelvin Triaxial Connector (in mm)
	14	11	11	14
				2.8
10.3
2 − ∅11.3	∅3.2 2 − M3 x 0.5

8 Channel Shielded Coaxial Connector (in mm)

63.5
59
	6	12
		12
2 − ∅3	10 o
4 − R1.5	10 o

Triaxial Connector (in mm)

∅11.3

10.3

Interlock Connector (in mm)

1.8

8.2

5.1

Agilent E5250A User’s Guide, Edition 9

4-7

Image 77

Agilent Technologies Agilent E5250A manual Recommended Parts Usage Agilent Part Description, Dimensions of Connector Holes

Contents

Agilent E5250A Manual Part Number Declaration of Conformity Manufacturer’s Declaration HerstellerbescheinigungGround the Instrument Safety SummaryDo not Substitute Parts or Modify Instrument Use extreme caution when handling, testing, and adjustingCAT Safety SymbolsVXIplug&play Driver This ManualText Conventions Page Contents Executing Self-Test and Leak Test Setting up Measurement EnvironmentProgramming the E5250A Controlling the E5250ACommand Reference Executing Sample Programs Specifications Error MessagesVXIplug&play Driver Scpi Command Summary Introduction Introduction Available Plug-in Cards for E5250A Agilent E5250A Product DescriptionRear Panel Tour Front Panel TourE5250A Rear Panel AUX InputAgilent E5252A Product Description E5252A Block DiagramE5252A Output Ports May be present at the output connectorsAgilent E5255A Product Description ConnectorsBias Input IV InputBy resistors must be less than 16W ResistorsE5255A Block Diagram Bias Input Output E5255A Input/Output Connectors ⋅8 multiplexerOptions Model Option Item Description Number Options and AccessoriesFurnished Accessories Model Part Number Description Qty Capacitance Compensation Virtual FrontVFP Data Upload Available Accessories Model Option Description Number Agilent E5250A User’s Guide, Edition Installation Installation When shipping the E5250A To Inspect the E5250A and AccessoriesRequirements Power RequirementsPower Cable Installation Defeated Operating EnvironmentStorage and Shipping Environment Installing the E5250A To Install Plug-in Card Module Extractor and Location of the Screw Hole To Install Blank PanelBlock Holder Cable Connector To Configure E5255ATo Modify IV Input Multiplexer Blocks and ComponentsAgilent E5255A Component Locations To Modify Bias InputTo Use Multiplexer Blocks on another E5255A To Select Protective Resistors To Mount Protective ResistorsOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module E5255A Configuration ExamplesOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 moduleTo connect Bias inputs externally Interconnection of Bias Input ConnectorsOutput multiplexer 1-BIAS input, 1-IV input, 4 modules Output multiplexer 1-BIAS input, 1-IV input, 4 modulesTo Connect Gpib Cable To Set Gpib AddressPerformance Verification MaintenanceCleaning Executing Self-Test and Leak Test Performance Verification Executing Self-Test and Leak TestE5250A Self-Test Items Description Executed by Refer to Executing Self-TestExecuting the Relay Test To Execute Self-Test StandaloneExecuting the Controller Test Relay Test Adapter Connection Settings after Relay TestIf Fail LED is on after Relay Test Scpi Commands for Self-Test To Execute Self-Test using External ControllerRequirements Before executing Relay Test, be careful about followingFront Panel Interface Test Scpi Commands for Self-Test Test Item DescriptionAssign Self-Test Programming ExampleLine Number Description Requirements Using the Self-Test UtilitySoftkey Description To Start the Self-Test UtilityExample of Self Test Menu To Execute Self-TestFail Condition for Front Panel Interface Test Executing the Front Panel Interface TestContinue To Execute Leak Test Start Test YES Message for non-Kelvin connection Report CRT Agilent E5250A User’s Guide, Edition Setting up Measurement Environment Setting up Measurement Environment Connector Plates for E5255A Connector PlatesConnector Plates for the E5252A 16495E Half size blank plate Blank PlateExample of DUT Connection Connecting 8-Channel Shielded Coaxial CableMounting Connectors Directly Recommended Parts Usage Agilent Part Description Dimensions of Connector HolesTo Make Interlock Circuit To Install Interlock CircuitInterlock Connector Pin Assignments Dimensions of Interlock Switch Agilent part number Dimensions of LED Agilent part number To Install LED CircuitRequired Parts Agilent Quantity Description Model No ProcedureTo Connect Interlock Circuit to Instrument To Check Interlock Circuit Connector Guard Sense Wire Insulator Plate To Connect Connectors to DUTLow-Noise Coaxial Cable To Connect Instruments to Input Connectors Connecting the E5250A InputMpsmu Connection Example with Agilent Shows an example of connecting the E5250A toRequired Parts Agilent Quantity Description Model/Part No To Connect Bias Source to the E5255A Bias InputTo Connect Gndu to the E5250A Input Connection of Triax-Dual Triax Adapter SMU Input Port Number Input SignalE5252A Output Connector and Output Signal Connecting the E5250A OutputTo Connect the E5252A Output E5252A Output Cable Agilent Model No Description16494B Kelvin Triaxial Cable for E5252A Kelvin Output Port Output Port NumberTo Connect the E5255A Output E5255A Output Connector and Output SignalMeasurement Cable Length Guard Capacitances of E5250A Measurement Environment Typical Controlling the E5250A Controlling the E5250A Creating Your Own Program Methods for Controlling the E5250ACapacitance Compensation Routine Windows WorkstationVFP Data Upload Library Using the Virtual Front Panel VFP UtilityModifying a Sample Program Switch Control Basics Syntax of channellist Parameter Channel List and Channel ConfigurationAgilent E5250A User’s Guide, Edition Auto Channel ConfigurationNormal Free Connection RuleConnection Sequence Relay Operation Connection SequenceBias Mode Example of Bias Mode Couple Input Ports Available Output Port No Couple PortCouple Port Number and Output Port Number Couple Port Relay Connections E5252A Channel List Normal Configuration ModeE5252A Channel Number in Normal Config. Mode Switch Control BasicsAuto Configuration Mode Controlling the E5250A E5255A Channel List E5255A Channel Number in Normal Config. Mode Auto Configuration Mode Example Setup of E5255A SMU1 Example for E5255A Channel Number in Auto Config. Mode Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility Model/Part No Description Qty Starting the Virtual Front Panel UtilityMode Confirming the E5250A Card ConfigurationsChannel Configuration mode Changing the VFP Setup ModeBias Mode state of each card Model Number of each cardTo change the Bias Mode state To change the channel configuration modeTo enter/cancel the changes and return to the VFP main menu Example of Setup Mode MenuTo define labels for the E5250A input ports Defining Labels for the E5250A Input PortsExample of Define Label Menu To define labels for the E5255A bias input portsNext Setup Making Connections and Changing the Setup DataExample of Setup Memory Menu To change the E5250A setup to specified setup memoryTo copy a setup memory To clear setup memory To delete a setup memoryTo insert a setup memory Memory Setup Panel for the E5252A in Auto Config To modify the settings in Current Setup MemoryUsing Virtual Front Panel Utility Chan Invalid Input Port To enter a comment for the setup memoryTo change the settings in a setup memory Moving the Cursor Softkey MenuALL To load setup data from diskette Saving/Loading the Setup DataTo save setup data to diskette Programming the E5250A Programming the E5250A Scpi Programming Basics Using a Semicolon to Reduce Typing Scpi Command HierarchyExample Controlling E5250A by Using HP BasicCreating a Control Program Programming Summary Description Command Default SettingDefining Connection Rule Defining Channel Configuration ModeCommand Description Defining Connection Sequence Command Description Using Bias ModeRoutcoupport cardno ,`inputportno Using Couple Port for E5252A onlyRoutopen channellist Controlling Relay SwitchingProgramming Examples Channel Creation Example E5250A Installed CardsMosfet Connection Example E5250A Input PortsLine Description Number Program ListE5255A Output Ports Bias Mode ExampleE5255A Connection Example Using Bias Mode Agilent E5250A User’s Guide, Edition Example of Couple Port Couple Port ExampleExample Using Couple Port Agilent E5250A User’s Guide, Edition Using the VFP Data Upload Library VFP Data Upload Library Initvfpsetup subprogramLoadvfpdata subprogram Data string for internal use in the library. Must declareFNGetvfpcomment$ subprogram Connectvfp subprogramProgramming Example Before Executing Your Program Error Messages Using the Capacitance Compensation Routine Freq Capacitance Compensation RoutineRequired Conditions Using Other than Recommended CableProgram Line No Defines R, L, C value Measurement Parameter Frequency Function Terminals aGET Ccompen Command Reference SYSTem ROUTeCapital Letters Textual Notation for Subsystem CommandsMnemonic Name Common CommandsCommon Commands for E5250A CLS Bit Binary Description Weight Command Reference *ESEESR? Response Type Explanation IDN?OPC Bias Enabled Channels Bias ModeCouple Port Mode Connection RuleSRE Following four lines enable the same bits bit 4 STB? TST? DIAGnostic Command Tree DIAGnostic SubsystemCommand Parameter Parameter valuesParameter Explanation DIAGnosticTESTCARDCLEarDIAGnosticTESTCARDEXECute? DIAGnosticTESTFRAMeCLEar DIAGnosticTESTCARDSTATe?DIAGnosticTESTFRAMeEXECute? DIAGnosticTESTFRAMeSTATe? ROUTe Subsystem ROUTe Command TreeParameter values Cardnumber ROUTeBIASCHANnelDISableLIST ROUTeBIASCHANnelDISableCARDROUTeBIASCHANnelDISableLIST? ROUTeBIASCHANnelENABleCARD ROUTeBIASCHANnelENABleLIST ROUTeBIASCHANnelENABleLIST? ROUTeBIASPORT ROUTeBIASPORT? ROUTeBIASSTATe ROUTeCLOSeCARD? ROUTeBIASSTATe?ROUTeCLOSeLIST? ROUTeCLOSeLISTROUTeCONNectionRULE? ROUTeCONNectionRULEROUTeCONNectionSEQuence ROUTeCONNectionSEQuence? Coupleport ROUTeCOUPlePORTROUTeCOUPlePORT? ROUTeCOUPleSTATe ROUTeCOUPleSTATe? ROUTeFUNCtion? ROUTeFUNCtionROUTeOPENLIST ROUTeOPENCARDROUTeOPENLIST? SYSTem Subsystem SYSTem Command TreeCardconfiguration newlineEND SYSTemCCONfig?Following SYSTemCDEScription?SYSTemCPON SYSTemCTYPe? SYSTemVERSion? SYSTemERRor?Status Reporting Structure Status Reporting StructureStatus Reporting Structure of E5250A Status Byte Register of E5250A Status Byte RegisterStatus Byte Register of E5250A Bit Definition Explanation Service Request Enable Register of E5250A Service Request Enable RegisterStandard Event Status Register of E5250A Standard Event Status RegisterBit Definition Explanation Standard Event Status Enable RegisterOutput Queue of E5250A Output QueueAgilent E5250A User’s Guide, Edition VXIplug&play Driver VXIplug&play Driver System Requirements Installing VXIplug&play Driver Category Function Description Driver FunctionsE5250A Driver Function Lists Agilent E5250A User’s Guide, Edition Hpe5250abiasChanList Hpe5250abiasChanCardBiasstatus Hpe5250abiasChanListQBiasdisen Hpe5250abiasState Hpe5250abiasPortClosecard Hpe5250acloseHpe5250acloseCardQ Hpe5250acloseList Hpe5250acmd Hpe5250acloseListQClosestatus CmdstrHpe5250acmdInt Hpe5250acmdDataQSize ResultCount Hpe5250acmdInt16ArrQHpe5250acmdInt16Q Hpe5250acmdInt32Q Hpe5250acmdInt32ArrQHpe5250acmdReal64ArrQ Hpe5250acmdRealHpe5250acmdStringQ Hpe5250acmdReal64QHpe5250acompenC Cardnoruleseq Hpe5250aconnRuleSeqRule SequenceHpe5250acouplePort Hpe5250adcl Hpe5250acoupleStateCouplestatecardn CouplestateHpe5250aerrorquery Hpe5250aerrormessageErrornumber MessagePErrDetect Hpe5250aerrorQueryDetectHpe5250aerrorQueryDetectQ Hpe5250aesrQ ChannelconfigHpe5250afunc ErrstrHpe5250ainit DoresetHpe5250aopcQ InstrDescOpencardno Hpe5250aopenCardHpe5250aopenList Hpe5250areadStatusByteQ Hpe5250aopenListQOpenstatus StatusByteHpe5250arevisionquery Hpe5250aresetDriverrev InstrrevFilename Hpe5250aselectCompenFileHpe5250atestClear Hpe5250aselftestTestresult TestmessageHpe5250atestExecQ Hpe5250atimeOutHpe5250atimeOutQ Agilent E5250A User’s Guide, Edition Executing Sample Programs To Keep Original Program Disk Executing Sample ProgramsIntroduction Vth and Capacitance Measurement ProgramStep Description Vth and Capacitance Measurement FlowChannel/Source Setup Vth Measurement SetupSource Setup User Function SetupAuto Analysis Setup Capacitance Measurement SetupDisplay Setup Xaxis Y1axis Y2axis Required Equipments Agilent Model/Part No Description Qty Setting up the Measurement EnvironmentVth and Capacitance Measurement Program Vth and C Measurement Setup and DUT ConnectionExecuting the Program Example of Vth and C Measurement Results Modifying the Program Parameter Description DefaultTo change the Gpib Address To change the header of the measurement result reportTo save the 4155/4156 measurement data To output the measurement report to printerTo execute the 4155/4156 calibration To change the Vth measurement setup To change the capacitance measurement setup Subprogram Program Line To use the VFP data upload libraryConstant Definition To Add the Bias Source Control Routine HCI Measurement ProgramTest Device for Defining Stress Conditions Determines Stress ConditionDevice Device2 Terminal Selects devices valid for the HCI testCharacterizes the initial parameters Auto Analysis Function Stress Stress time Cumulative Cycle Applies stress and characterizes the parametersRequired Equipment Agilent Model/Part No Description Qty Required EquipmentsSubend Adding the Bias Source Control RoutineSetting up the Measurement Environment E5250A Input/Output Connection Internal Connections and DIP SW Settings for E5255AsE5250A Input Measurement E5255A Output Port PortDevice used to Determine Stress Conditions DC HCI Degradation Test Equipment ConnectionsLoad Spmux Edit Id-Vds Measurement Example To Execute HCI Test Program Example of Ib-Vgs Measurement Results HCI Degradation Test Result Example Initial/Interim Characterization ExampleTo Execute Analysis Program HCI Degradation Test Data Analysis Example Number of devices Vdstr, Vgstr, Gate length, Gate width Modifying the Program To change Vtci extraction condition To change the 4155/4156 setup file usedTo change the stress times To change Idlin and Gmmax extraction conditionTo change the number of devices To change the timing for saving the test data To change the test limitsTo specify the data displayed on the 4155/4156 screen Specifications 10-2 Agilent E5250A User’s Guide, Edition Dimensions General SpecificationsSwitch Specifications Agilent E5252A 10x12 Matrix SwitchSupplemental Data Typical Data10-6 Agilent E5250A User’s Guide, Edition Agilent E5255A 24 8x3 Channel MultiplexerLow Leakage I-V Port Operating AccessoriesOperating To 40 C Storage −40 C to 70 C Range Setting Measurement Supplemental Data when used with Agilent 4155/4156Supplemental Data when used with Agilent 10-10 Agilent E5250A User’s Guide, Edition Error Messages Error Category Standard Event Error Range Error CategoryCommand Error Standard Scpi Error MessagesCommand header error Data type errorHeader separator error Invalid separatorCharacter data error Numeric data errorInvalid character in number Exponent too largeBlock data error String data errorExpression error Character data not allowedExecution Error Device-specific error Device-Dependent ErrorsMemory error Queue overflowQuery Errors E5250A Specific Error Messages E5250A Channel Related Errors E5250A Card/Mode/Port Related Errors Config error. Re-install E5255A Cannot connect multiple channels in SROUTe modeCant change to ACONfig mode. Check card config Cannot directly specify Bias Port channel11-14 Agilent E5250A User’s Guide, Edition Scpi Command Summary 12-2 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-3 12-4 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-5 12-6 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-7 12-8 Agilent E5250A User’s Guide, Edition