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Agilent Technologies Agilent E5250A manual Id-Vds Measurement Example

Models: Agilent E5250A

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! Drain stress voltage

Executing Sample Programs

HCI Measurement Program

!-- Drain stress voltage should be determined by Id-Vd charact eristics

Vdstr=5

After defining the value, re-store the program.

Figure 9-5

Id-Vds Measurement Example

9-28	Agilent E5250A User’s Guide, Edition 9

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Agilent Technologies Agilent E5250A manual Id-Vds Measurement Example

Contents

Agilent E5250A Manual Part Number Declaration of Conformity Herstellerbescheinigung Manufacturer’s DeclarationSafety Summary Ground the InstrumentUse extreme caution when handling, testing, and adjusting Do not Substitute Parts or Modify InstrumentSafety Symbols CATThis Manual VXIplug&play DriverText Conventions Page Contents Setting up Measurement Environment Executing Self-Test and Leak TestControlling the E5250A Programming the E5250ACommand Reference Executing Sample Programs Specifications Error MessagesVXIplug&play Driver Scpi Command Summary Introduction Introduction Agilent E5250A Product Description Available Plug-in Cards for E5250AFront Panel Tour Rear Panel TourAUX Input E5250A Rear PanelE5252A Block Diagram Agilent E5252A Product DescriptionMay be present at the output connectors E5252A Output PortsConnectors Agilent E5255A Product DescriptionBias Input IV InputResistors By resistors must be less than 16WE5255A Block Diagram E5255A Input/Output Connectors ⋅8 multiplexer Bias Input OutputOptions and Accessories Options Model Option Item Description NumberFurnished Accessories Model Part Number Description Qty Capacitance Compensation Virtual FrontVFP Data Upload Available Accessories Model Option Description Number Agilent E5250A User’s Guide, Edition Installation Installation To Inspect the E5250A and Accessories When shipping the E5250ARequirements Power RequirementsPower Cable Installation Defeated Operating EnvironmentStorage and Shipping Environment Installing the E5250A To Install Plug-in Card To Install Blank Panel Module Extractor and Location of the Screw HoleTo Configure E5255A Block Holder Cable ConnectorTo Modify IV Input Multiplexer Blocks and ComponentsAgilent E5255A Component Locations To Modify Bias InputTo Use Multiplexer Blocks on another E5255A To Mount Protective Resistors To Select Protective ResistorsOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module E5255A Configuration ExamplesOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 moduleInterconnection of Bias Input Connectors To connect Bias inputs externallyOutput multiplexer 1-BIAS input, 1-IV input, 4 modules Output multiplexer 1-BIAS input, 1-IV input, 4 modulesTo Set Gpib Address To Connect Gpib CablePerformance Verification MaintenanceCleaning Executing Self-Test and Leak Test Executing Self-Test and Leak Test Performance VerificationExecuting Self-Test E5250A Self-Test Items Description Executed by Refer toExecuting the Relay Test To Execute Self-Test StandaloneExecuting the Controller Test Relay Test Adapter Connection Settings after Relay TestIf Fail LED is on after Relay Test To Execute Self-Test using External Controller Scpi Commands for Self-TestRequirements Before executing Relay Test, be careful about followingScpi Commands for Self-Test Test Item Description Front Panel Interface TestSelf-Test Programming Example AssignLine Number Description Using the Self-Test Utility RequirementsTo Start the Self-Test Utility Softkey DescriptionTo Execute Self-Test Example of Self Test MenuExecuting the Front Panel Interface Test Fail Condition for Front Panel Interface TestContinue To Execute Leak Test Start Test YES Message for non-Kelvin connection Report CRT Agilent E5250A User’s Guide, Edition Setting up Measurement Environment Setting up Measurement Environment Connector Plates for E5255A Connector PlatesConnector Plates for the E5252A Blank Plate 16495E Half size blank plateConnecting 8-Channel Shielded Coaxial Cable Example of DUT ConnectionMounting Connectors Directly Dimensions of Connector Holes Recommended Parts Usage Agilent Part DescriptionTo Make Interlock Circuit To Install Interlock CircuitInterlock Connector Pin Assignments Dimensions of Interlock Switch Agilent part number To Install LED Circuit Dimensions of LED Agilent part numberRequired Parts Agilent Quantity Description Model No ProcedureTo Connect Interlock Circuit to Instrument To Check Interlock Circuit To Connect Connectors to DUT Connector Guard Sense Wire Insulator PlateLow-Noise Coaxial Cable Connecting the E5250A Input To Connect Instruments to Input ConnectorsMpsmu Shows an example of connecting the E5250A to Connection Example with AgilentRequired Parts Agilent Quantity Description Model/Part No To Connect Bias Source to the E5255A Bias InputTo Connect Gndu to the E5250A Input SMU Input Port Number Input Signal Connection of Triax-Dual Triax AdapterConnecting the E5250A Output E5252A Output Connector and Output SignalTo Connect the E5252A Output E5252A Output Cable Agilent Model No DescriptionKelvin Output Port Output Port Number 16494B Kelvin Triaxial Cable for E5252AE5255A Output Connector and Output Signal To Connect the E5255A OutputMeasurement Cable Length Guard Capacitances of E5250A Measurement Environment Typical Controlling the E5250A Controlling the E5250A Methods for Controlling the E5250A Creating Your Own ProgramCapacitance Compensation Routine Windows WorkstationVFP Data Upload Library Using the Virtual Front Panel VFP UtilityModifying a Sample Program Switch Control Basics Channel List and Channel Configuration Syntax of channellist ParameterAgilent E5250A User’s Guide, Edition Auto Channel ConfigurationNormal Connection Rule FreeConnection Sequence Connection Sequence Relay OperationBias Mode Example of Bias Mode Couple Input Ports Available Output Port No Couple PortCouple Port Number and Output Port Number Couple Port Relay Connections Normal Configuration Mode E5252A Channel ListSwitch Control Basics E5252A Channel Number in Normal Config. ModeAuto Configuration Mode Controlling the E5250A E5255A Channel List E5255A Channel Number in Normal Config. Mode Auto Configuration Mode Example Setup of E5255A SMU1 Example for E5255A Channel Number in Auto Config. Mode Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility Starting the Virtual Front Panel Utility Model/Part No Description QtyConfirming the E5250A Card Configurations ModeChanging the VFP Setup Mode Channel Configuration modeBias Mode state of each card Model Number of each cardTo change the channel configuration mode To change the Bias Mode stateTo enter/cancel the changes and return to the VFP main menu Example of Setup Mode MenuDefining Labels for the E5250A Input Ports To define labels for the E5250A input portsTo define labels for the E5255A bias input ports Example of Define Label MenuMaking Connections and Changing the Setup Data Next SetupExample of Setup Memory Menu To change the E5250A setup to specified setup memoryTo copy a setup memory To clear setup memory To delete a setup memoryTo insert a setup memory To modify the settings in Current Setup Memory Memory Setup Panel for the E5252A in Auto ConfigUsing Virtual Front Panel Utility Chan Invalid Input Port To enter a comment for the setup memoryTo change the settings in a setup memory Softkey Menu Moving the CursorALL To load setup data from diskette Saving/Loading the Setup DataTo save setup data to diskette Programming the E5250A Programming the E5250A Scpi Programming Basics Scpi Command Hierarchy Using a Semicolon to Reduce TypingControlling E5250A by Using HP Basic ExampleCreating a Control Program Description Command Default Setting Programming SummaryDefining Connection Rule Defining Channel Configuration ModeCommand Description Defining Connection Sequence Using Bias Mode Command DescriptionUsing Couple Port for E5252A only Routcoupport cardno ,`inputportnoControlling Relay Switching Routopen channellistProgramming Examples E5250A Installed Cards Channel Creation ExampleMosfet Connection Example E5250A Input PortsProgram List Line Description NumberE5255A Output Ports Bias Mode ExampleE5255A Connection Example Using Bias Mode Agilent E5250A User’s Guide, Edition Couple Port Example Example of Couple PortExample Using Couple Port Agilent E5250A User’s Guide, Edition Using the VFP Data Upload Library Initvfpsetup subprogram VFP Data Upload LibraryLoadvfpdata subprogram Data string for internal use in the library. Must declareConnectvfp subprogram FNGetvfpcomment$ subprogramProgramming Example Before Executing Your Program Error Messages Using the Capacitance Compensation Routine Capacitance Compensation Routine FreqUsing Other than Recommended Cable Required ConditionsMeasurement Parameter Frequency Function Terminals a Program Line No Defines R, L, C valueGET Ccompen Command Reference ROUTe SYSTemTextual Notation for Subsystem Commands Capital LettersMnemonic Name Common CommandsCommon Commands for E5250A CLS Command Reference *ESE Bit Binary Description WeightESR? IDN? Response Type ExplanationOPC Bias Mode Bias Enabled ChannelsCouple Port Mode Connection RuleSRE Following four lines enable the same bits bit 4 STB? TST? DIAGnostic Subsystem DIAGnostic Command TreeCommand Parameter Parameter valuesParameter Explanation DIAGnosticTESTCARDCLEarDIAGnosticTESTCARDEXECute? DIAGnosticTESTCARDSTATe? DIAGnosticTESTFRAMeCLEarDIAGnosticTESTFRAMeEXECute? DIAGnosticTESTFRAMeSTATe? ROUTe Command Tree ROUTe SubsystemParameter values Cardnumber ROUTeBIASCHANnelDISableCARD ROUTeBIASCHANnelDISableLISTROUTeBIASCHANnelDISableLIST? ROUTeBIASCHANnelENABleCARD ROUTeBIASCHANnelENABleLIST ROUTeBIASCHANnelENABleLIST? ROUTeBIASPORT ROUTeBIASPORT? ROUTeBIASSTATe ROUTeBIASSTATe? ROUTeCLOSeCARD?ROUTeCLOSeLIST ROUTeCLOSeLIST?ROUTeCONNectionRULE ROUTeCONNectionRULE?ROUTeCONNectionSEQuence ROUTeCONNectionSEQuence? ROUTeCOUPlePORT CoupleportROUTeCOUPlePORT? ROUTeCOUPleSTATe ROUTeCOUPleSTATe? ROUTeFUNCtion ROUTeFUNCtion?ROUTeOPENCARD ROUTeOPENLISTROUTeOPENLIST? SYSTem Command Tree SYSTem SubsystemSYSTemCCONfig? Cardconfiguration newlineENDSYSTemCDEScription? FollowingSYSTemCPON SYSTemCTYPe? SYSTemERRor? SYSTemVERSion?Status Reporting Structure Status Reporting StructureStatus Reporting Structure of E5250A Status Byte Register Status Byte Register of E5250AStatus Byte Register of E5250A Bit Definition Explanation Service Request Enable Register Service Request Enable Register of E5250AStandard Event Status Register Standard Event Status Register of E5250AStandard Event Status Enable Register Bit Definition ExplanationOutput Queue Output Queue of E5250AAgilent E5250A User’s Guide, Edition VXIplug&play Driver VXIplug&play Driver System Requirements Installing VXIplug&play Driver Category Function Description Driver FunctionsE5250A Driver Function Lists Agilent E5250A User’s Guide, Edition Hpe5250abiasChanCard Hpe5250abiasChanListBiasstatus Hpe5250abiasChanListQBiasdisen Hpe5250abiasPort Hpe5250abiasStateClosecard Hpe5250acloseHpe5250acloseCardQ Hpe5250acloseList Hpe5250acloseListQ Hpe5250acmdClosestatus CmdstrHpe5250acmdDataQ Hpe5250acmdIntSize ResultCount Hpe5250acmdInt16ArrQHpe5250acmdInt16Q Hpe5250acmdInt32ArrQ Hpe5250acmdInt32QHpe5250acmdReal Hpe5250acmdReal64ArrQHpe5250acmdReal64Q Hpe5250acmdStringQHpe5250acompenC Hpe5250aconnRuleSeq CardnoruleseqRule SequenceHpe5250acouplePort Hpe5250acoupleState Hpe5250adclCouplestatecardn CouplestateHpe5250aerrormessage Hpe5250aerrorqueryErrornumber MessagePErrDetect Hpe5250aerrorQueryDetectHpe5250aerrorQueryDetectQ Channelconfig Hpe5250aesrQHpe5250afunc ErrstrDoreset Hpe5250ainitHpe5250aopcQ InstrDescOpencardno Hpe5250aopenCardHpe5250aopenList Hpe5250aopenListQ Hpe5250areadStatusByteQOpenstatus StatusByteHpe5250areset Hpe5250arevisionqueryDriverrev InstrrevHpe5250aselectCompenFile FilenameHpe5250aselftest Hpe5250atestClearTestresult TestmessageHpe5250atestExecQ Hpe5250atimeOutHpe5250atimeOutQ Agilent E5250A User’s Guide, Edition Executing Sample Programs Executing Sample Programs To Keep Original Program DiskVth and Capacitance Measurement Program IntroductionVth and Capacitance Measurement Flow Step DescriptionVth Measurement Setup Channel/Source SetupSource Setup User Function SetupAuto Analysis Setup Capacitance Measurement SetupDisplay Setup Xaxis Y1axis Y2axis Setting up the Measurement Environment Required Equipments Agilent Model/Part No Description QtyVth and C Measurement Setup and DUT Connection Vth and Capacitance Measurement ProgramExecuting the Program Example of Vth and C Measurement Results Parameter Description Default Modifying the ProgramTo change the Gpib Address To change the header of the measurement result reportTo save the 4155/4156 measurement data To output the measurement report to printerTo execute the 4155/4156 calibration To change the Vth measurement setup To change the capacitance measurement setup To use the VFP data upload library Subprogram Program LineConstant Definition HCI Measurement Program To Add the Bias Source Control RoutineDetermines Stress Condition Test Device for Defining Stress ConditionsDevice Device2 Terminal Selects devices valid for the HCI testCharacterizes the initial parameters Auto Analysis Function Applies stress and characterizes the parameters Stress Stress time Cumulative CycleRequired Equipments Required Equipment Agilent Model/Part No Description QtyAdding the Bias Source Control Routine SubendSetting up the Measurement Environment Internal Connections and DIP SW Settings for E5255As E5250A Input/Output ConnectionE5250A Input Measurement E5255A Output Port PortDC HCI Degradation Test Equipment Connections Device used to Determine Stress ConditionsLoad Spmux Edit Id-Vds Measurement Example To Execute HCI Test Program Example of Ib-Vgs Measurement Results Initial/Interim Characterization Example HCI Degradation Test Result ExampleTo Execute Analysis Program HCI Degradation Test Data Analysis Example Number of devices Vdstr, Vgstr, Gate length, Gate width Modifying the Program To change the 4155/4156 setup file used To change Vtci extraction conditionTo change the stress times To change Idlin and Gmmax extraction conditionTo change the number of devices To change the timing for saving the test data To change the test limitsTo specify the data displayed on the 4155/4156 screen Specifications 10-2 Agilent E5250A User’s Guide, Edition General Specifications DimensionsAgilent E5252A 10x12 Matrix Switch Switch SpecificationsTypical Data Supplemental DataAgilent E5255A 24 8x3 Channel Multiplexer 10-6 Agilent E5250A User’s Guide, EditionLow Leakage I-V Port Operating AccessoriesOperating To 40 C Storage −40 C to 70 C Range Setting Measurement Supplemental Data when used with Agilent 4155/4156Supplemental Data when used with Agilent 10-10 Agilent E5250A User’s Guide, Edition Error Messages Error Range Error Category Error Category Standard EventStandard Scpi Error Messages Command ErrorData type error Command header errorHeader separator error Invalid separatorNumeric data error Character data errorInvalid character in number Exponent too largeString data error Block data errorExpression error Character data not allowedExecution Error Device-Dependent Errors Device-specific errorMemory error Queue overflowQuery Errors E5250A Specific Error Messages E5250A Channel Related Errors E5250A Card/Mode/Port Related Errors Cannot connect multiple channels in SROUTe mode Config error. Re-install E5255ACant change to ACONfig mode. Check card config Cannot directly specify Bias Port channel11-14 Agilent E5250A User’s Guide, Edition Scpi Command Summary 12-2 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-3 12-4 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-5 12-6 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-7 12-8 Agilent E5250A User’s Guide, Edition