Agilent Technologies Agilent E5250A specification

Setting up Measurement Environment

This chapter explains how to connect your instruments to Agilent E5250A input, and how to connect the E5250A output to your wafer prober or test fixture.

You can connect the E5250A output (E5252A or E5255A) to your prober or fixture in the following three ways:

•Via the available connector plates.

•(For E5255A only) Directly using Agilent 16494E coaxial cable.

•Via connectors that you mount directly on your own connector plate or test fixture.

This chapter explains how to do this in the following sections:

•“Connector Plates” introduces connector plates available for the plug-in card. For installing the connector plates on your shielding box for prober or fixture, refer to Agilent 16495 Installation Guide.

•“Connecting 8-Channel Shielded Coaxial Cable” explains how to use the 16494E coaxial cable, which is used to directly connect the E5255A output to the DUT, DUT socket, or any fixture you want without using a connector plate.

•“Mounting Connectors Directly” describes connector hole dimensions for mounting connectors directly on your own connector plate or test fixture, and describes the information to connecting the connectors to prober, socket or DUT.

•“Connecting the E5250A Input” explains how to connect instruments to the E5250A input.

•“Connecting the E5250A Output” describes the information to connect the plug-in card output to a connector plate, connectors on your own shielding box and so on.

•“Measurement Cable Length” is a reference for deciding total cable length at your site by calculating the total guard capacitance according to the cable length from instrument to Device Under Test (DUT).

4-2	Agilent E5250A User’s Guide, Edition 9

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Agilent Technologies Agilent E5250A manual Setting up Measurement Environment

Contents

Agilent E5250A Manual Part Number Declaration of Conformity Herstellerbescheinigung Manufacturer’s Declaration Safety Summary Ground the Instrument Use extreme caution when handling, testing, and adjusting Do not Substitute Parts or Modify Instrument Safety Symbols CAT This Manual VXIplug&play Driver Text Conventions Page Contents Setting up Measurement Environment Executing Self-Test and Leak Test Controlling the E5250A Programming the E5250A Command Reference Specifications Error Messages VXIplug&play DriverExecuting Sample Programs Scpi Command Summary Introduction Introduction Agilent E5250A Product Description Available Plug-in Cards for E5250A Front Panel Tour Rear Panel Tour AUX Input E5250A Rear Panel E5252A Block Diagram Agilent E5252A Product Description May be present at the output connectors E5252A Output Ports Connectors Agilent E5255A Product DescriptionBias Input IV Input Resistors By resistors must be less than 16W E5255A Block Diagram E5255A Input/Output Connectors ⋅8 multiplexer Bias Input Output Options and Accessories Options Model Option Item Description Number Furnished Accessories Model Part Number Description Qty Virtual Front VFP Data UploadCapacitance Compensation Available Accessories Model Option Description Number Agilent E5250A User’s Guide, Edition Installation Installation To Inspect the E5250A and Accessories When shipping the E5250A Power Requirements Power CableRequirements Installation Operating Environment Storage and Shipping EnvironmentDefeated Installing the E5250A To Install Plug-in Card To Install Blank Panel Module Extractor and Location of the Screw Hole To Configure E5255A Block Holder Cable ConnectorTo Modify IV Input Multiplexer Blocks and Components To Modify Bias Input To Use Multiplexer Blocks on another E5255AAgilent E5255A Component Locations To Mount Protective Resistors To Select Protective Resistors E5255A Configuration Examples Output multiplexer 3-BIAS inputs, 1-IV input, 1 moduleOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Interconnection of Bias Input Connectors To connect Bias inputs externally Output multiplexer 1-BIAS input, 1-IV input, 4 modules Output multiplexer 1-BIAS input, 1-IV input, 4 modules To Set Gpib Address To Connect Gpib Cable Maintenance CleaningPerformance Verification Executing Self-Test and Leak Test Executing Self-Test and Leak Test Performance Verification Executing Self-Test E5250A Self-Test Items Description Executed by Refer to To Execute Self-Test Standalone Executing the Controller TestExecuting the Relay Test Settings after Relay Test If Fail LED is on after Relay TestRelay Test Adapter Connection To Execute Self-Test using External Controller Scpi Commands for Self-TestRequirements Before executing Relay Test, be careful about following Scpi Commands for Self-Test Test Item Description Front Panel Interface Test Self-Test Programming Example Assign Line Number Description Using the Self-Test Utility Requirements To Start the Self-Test Utility Softkey Description To Execute Self-Test Example of Self Test Menu Executing the Front Panel Interface Test Fail Condition for Front Panel Interface Test Continue To Execute Leak Test Start Test YES Message for non-Kelvin connection Report CRT Agilent E5250A User’s Guide, Edition Setting up Measurement Environment Setting up Measurement Environment Connector Plates Connector Plates for the E5252AConnector Plates for E5255A Blank Plate 16495E Half size blank plate Connecting 8-Channel Shielded Coaxial Cable Example of DUT Connection Mounting Connectors Directly Dimensions of Connector Holes Recommended Parts Usage Agilent Part Description To Install Interlock Circuit Interlock Connector Pin AssignmentsTo Make Interlock Circuit Dimensions of Interlock Switch Agilent part number To Install LED Circuit Dimensions of LED Agilent part number Procedure To Connect Interlock Circuit to InstrumentRequired Parts Agilent Quantity Description Model No To Check Interlock Circuit To Connect Connectors to DUT Connector Guard Sense Wire Insulator Plate Low-Noise Coaxial Cable Connecting the E5250A Input To Connect Instruments to Input Connectors Mpsmu Shows an example of connecting the E5250A to Connection Example with Agilent To Connect Bias Source to the E5255A Bias Input To Connect Gndu to the E5250A InputRequired Parts Agilent Quantity Description Model/Part No SMU Input Port Number Input Signal Connection of Triax-Dual Triax Adapter Connecting the E5250A Output E5252A Output Connector and Output SignalTo Connect the E5252A Output E5252A Output Cable Agilent Model No Description Kelvin Output Port Output Port Number 16494B Kelvin Triaxial Cable for E5252A E5255A Output Connector and Output Signal To Connect the E5255A Output Measurement Cable Length Guard Capacitances of E5250A Measurement Environment Typical Controlling the E5250A Controlling the E5250A Methods for Controlling the E5250A Creating Your Own ProgramCapacitance Compensation Routine Windows Workstation Using the Virtual Front Panel VFP Utility Modifying a Sample ProgramVFP Data Upload Library Switch Control Basics Channel List and Channel Configuration Syntax of channellist Parameter Agilent E5250A User’s Guide, Edition Channel Configuration NormalAuto Connection Rule Free Connection Sequence Connection Sequence Relay Operation Bias Mode Example of Bias Mode Couple Port Couple Port Number and Output Port NumberCouple Input Ports Available Output Port No Couple Port Relay Connections Normal Configuration Mode E5252A Channel List Switch Control Basics E5252A Channel Number in Normal Config. Mode Auto Configuration Mode Controlling the E5250A E5255A Channel List E5255A Channel Number in Normal Config. Mode Auto Configuration Mode Example Setup of E5255A SMU1 Example for E5255A Channel Number in Auto Config. Mode Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility Starting the Virtual Front Panel Utility Model/Part No Description Qty Confirming the E5250A Card Configurations Mode Changing the VFP Setup Mode Channel Configuration modeBias Mode state of each card Model Number of each card To change the channel configuration mode To change the Bias Mode stateTo enter/cancel the changes and return to the VFP main menu Example of Setup Mode Menu Defining Labels for the E5250A Input Ports To define labels for the E5250A input ports To define labels for the E5255A bias input ports Example of Define Label Menu Making Connections and Changing the Setup Data Next Setup To change the E5250A setup to specified setup memory To copy a setup memoryExample of Setup Memory Menu To delete a setup memory To insert a setup memoryTo clear setup memory To modify the settings in Current Setup Memory Memory Setup Panel for the E5252A in Auto Config Using Virtual Front Panel Utility Chan To enter a comment for the setup memory To change the settings in a setup memoryInvalid Input Port Softkey Menu Moving the Cursor ALL Saving/Loading the Setup Data To save setup data to disketteTo load setup data from diskette Programming the E5250A Programming the E5250A Scpi Programming Basics Scpi Command Hierarchy Using a Semicolon to Reduce Typing Controlling E5250A by Using HP Basic Example Creating a Control Program Description Command Default Setting Programming Summary Defining Channel Configuration Mode Command DescriptionDefining Connection Rule Defining Connection Sequence Using Bias Mode Command Description Using Couple Port for E5252A only Routcoupport cardno ,`inputportno Controlling Relay Switching Routopen channellist Programming Examples E5250A Installed Cards Channel Creation ExampleMosfet Connection Example E5250A Input Ports Program List Line Description Number Bias Mode Example E5255A ConnectionE5255A Output Ports Example Using Bias Mode Agilent E5250A User’s Guide, Edition Couple Port Example Example of Couple Port Example Using Couple Port Agilent E5250A User’s Guide, Edition Using the VFP Data Upload Library Initvfpsetup subprogram VFP Data Upload LibraryLoadvfpdata subprogram Data string for internal use in the library. Must declare Connectvfp subprogram FNGetvfpcomment$ subprogram Programming Example Before Executing Your Program Error Messages Using the Capacitance Compensation Routine Capacitance Compensation Routine Freq Using Other than Recommended Cable Required Conditions Measurement Parameter Frequency Function Terminals a Program Line No Defines R, L, C value GET Ccompen Command Reference ROUTe SYSTem Textual Notation for Subsystem Commands Capital Letters Common Commands Common Commands for E5250AMnemonic Name CLS Command Reference *ESE Bit Binary Description Weight ESR? IDN? Response Type Explanation OPC Bias Mode Bias Enabled ChannelsCouple Port Mode Connection Rule SRE Following four lines enable the same bits bit 4 STB? TST? DIAGnostic Subsystem DIAGnostic Command TreeCommand Parameter Parameter values DIAGnosticTESTCARDCLEar DIAGnosticTESTCARDEXECute?Parameter Explanation DIAGnosticTESTCARDSTATe? DIAGnosticTESTFRAMeCLEar DIAGnosticTESTFRAMeEXECute? DIAGnosticTESTFRAMeSTATe? ROUTe Command Tree ROUTe Subsystem Parameter values Cardnumber ROUTeBIASCHANnelDISableCARD ROUTeBIASCHANnelDISableLIST ROUTeBIASCHANnelDISableLIST? ROUTeBIASCHANnelENABleCARD ROUTeBIASCHANnelENABleLIST ROUTeBIASCHANnelENABleLIST? ROUTeBIASPORT ROUTeBIASPORT? ROUTeBIASSTATe ROUTeBIASSTATe? ROUTeCLOSeCARD? ROUTeCLOSeLIST ROUTeCLOSeLIST? ROUTeCONNectionRULE ROUTeCONNectionRULE? ROUTeCONNectionSEQuence ROUTeCONNectionSEQuence? ROUTeCOUPlePORT Coupleport ROUTeCOUPlePORT? ROUTeCOUPleSTATe ROUTeCOUPleSTATe? ROUTeFUNCtion ROUTeFUNCtion? ROUTeOPENCARD ROUTeOPENLIST ROUTeOPENLIST? SYSTem Command Tree SYSTem Subsystem SYSTemCCONfig? Cardconfiguration newlineEND SYSTemCDEScription? Following SYSTemCPON SYSTemCTYPe? SYSTemERRor? SYSTemVERSion? Status Reporting Structure Status Reporting Structure Status Reporting Structure of E5250A Status Byte Register Status Byte Register of E5250A Status Byte Register of E5250A Bit Definition Explanation Service Request Enable Register Service Request Enable Register of E5250A Standard Event Status Register Standard Event Status Register of E5250A Standard Event Status Enable Register Bit Definition Explanation Output Queue Output Queue of E5250A Agilent E5250A User’s Guide, Edition VXIplug&play Driver VXIplug&play Driver System Requirements Installing VXIplug&play Driver Driver Functions E5250A Driver Function ListsCategory Function Description Agilent E5250A User’s Guide, Edition Hpe5250abiasChanCard Hpe5250abiasChanList Hpe5250abiasChanListQ BiasdisenBiasstatus Hpe5250abiasPort Hpe5250abiasState Hpe5250aclose Hpe5250acloseCardQClosecard Hpe5250acloseList Hpe5250acloseListQ Hpe5250acmdClosestatus Cmdstr Hpe5250acmdDataQ Hpe5250acmdIntSize Result Hpe5250acmdInt16ArrQ Hpe5250acmdInt16QCount Hpe5250acmdInt32ArrQ Hpe5250acmdInt32Q Hpe5250acmdReal Hpe5250acmdReal64ArrQ Hpe5250acmdReal64Q Hpe5250acmdStringQ Hpe5250acompenC Hpe5250aconnRuleSeq CardnoruleseqRule Sequence Hpe5250acouplePort Hpe5250acoupleState Hpe5250adclCouplestatecardn Couplestate Hpe5250aerrormessage Hpe5250aerrorqueryErrornumber Message Hpe5250aerrorQueryDetect Hpe5250aerrorQueryDetectQPErrDetect Channelconfig Hpe5250aesrQHpe5250afunc Errstr Doreset Hpe5250ainitHpe5250aopcQ InstrDesc Hpe5250aopenCard Hpe5250aopenListOpencardno Hpe5250aopenListQ Hpe5250areadStatusByteQOpenstatus StatusByte Hpe5250areset Hpe5250arevisionqueryDriverrev Instrrev Hpe5250aselectCompenFile Filename Hpe5250aselftest Hpe5250atestClearTestresult Testmessage Hpe5250atimeOut Hpe5250atimeOutQHpe5250atestExecQ Agilent E5250A User’s Guide, Edition Executing Sample Programs Executing Sample Programs To Keep Original Program Disk Vth and Capacitance Measurement Program Introduction Vth and Capacitance Measurement Flow Step Description Vth Measurement Setup Channel/Source SetupSource Setup User Function Setup Capacitance Measurement Setup Display Setup Xaxis Y1axis Y2axisAuto Analysis Setup Setting up the Measurement Environment Required Equipments Agilent Model/Part No Description Qty Vth and C Measurement Setup and DUT Connection Vth and Capacitance Measurement Program Executing the Program Example of Vth and C Measurement Results Parameter Description Default Modifying the ProgramTo change the Gpib Address To change the header of the measurement result report To output the measurement report to printer To execute the 4155/4156 calibrationTo save the 4155/4156 measurement data To change the Vth measurement setup To change the capacitance measurement setup To use the VFP data upload library Subprogram Program Line Constant Definition HCI Measurement Program To Add the Bias Source Control Routine Determines Stress Condition Test Device for Defining Stress Conditions Selects devices valid for the HCI test Characterizes the initial parametersDevice Device2 Terminal Auto Analysis Function Applies stress and characterizes the parameters Stress Stress time Cumulative Cycle Required Equipments Required Equipment Agilent Model/Part No Description Qty Adding the Bias Source Control Routine Subend Setting up the Measurement Environment Internal Connections and DIP SW Settings for E5255As E5250A Input/Output ConnectionE5250A Input Measurement E5255A Output Port Port DC HCI Degradation Test Equipment Connections Device used to Determine Stress Conditions Load Spmux Edit Id-Vds Measurement Example To Execute HCI Test Program Example of Ib-Vgs Measurement Results Initial/Interim Characterization Example HCI Degradation Test Result Example To Execute Analysis Program HCI Degradation Test Data Analysis Example Number of devices Vdstr, Vgstr, Gate length, Gate width Modifying the Program To change the 4155/4156 setup file used To change Vtci extraction condition To change Idlin and Gmmax extraction condition To change the number of devicesTo change the stress times To change the test limits To specify the data displayed on the 4155/4156 screenTo change the timing for saving the test data Specifications 10-2 Agilent E5250A User’s Guide, Edition General Specifications Dimensions Agilent E5252A 10x12 Matrix Switch Switch Specifications Typical Data Supplemental Data Agilent E5255A 24 8x3 Channel Multiplexer 10-6 Agilent E5250A User’s Guide, Edition Low Leakage I-V Port Accessories Operating To 40 C Storage −40 C to 70 COperating Supplemental Data when used with Agilent 4155/4156 Supplemental Data when used with AgilentRange Setting Measurement 10-10 Agilent E5250A User’s Guide, Edition Error Messages Error Range Error Category Error Category Standard Event Standard Scpi Error Messages Command Error Data type error Command header errorHeader separator error Invalid separator Numeric data error Character data errorInvalid character in number Exponent too large String data error Block data errorExpression error Character data not allowed Execution Error Device-Dependent Errors Device-specific errorMemory error Queue overflow Query Errors E5250A Specific Error Messages E5250A Channel Related Errors E5250A Card/Mode/Port Related Errors Cannot connect multiple channels in SROUTe mode Config error. Re-install E5255ACant change to ACONfig mode. Check card config Cannot directly specify Bias Port channel 11-14 Agilent E5250A User’s Guide, Edition Scpi Command Summary 12-2 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-3 12-4 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-5 12-6 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-7 12-8 Agilent E5250A User’s Guide, Edition