Procedure | Agilent Technologies Agilent E5250A instruction

Setting up Measurement Environment

Mounting Connectors Directly

To Connect Interlock Circuit to Instrument

Before beginning the measurement, connect the interlock circuit to the interlock connector of the instrument as follows.

•For Agilent 4155/4156 semiconductor parameter analyzer:

Connect Intlk connector of the 4155/4156 to the interlock connector by using Agilent 16493J Interlock cable that is furnished with the 4155/4156. You can connect it directly without using any adapter.

•For the instruments which has a BNC-Type interlock connector:

If you use an instrument that has a BNC-type interlock connector (such as Agilent 4142B), connect interlock connectors of instrument and the interlock circuit as follows:

Required Parts:

	Agilent	Quantity	Description
	Model No.	Quantity	Description
	Model No.

	16435A	1	Interlock Cable Adapter

	16493J	1	Interlock Cable

Procedure:

1.Connect interlock connector of instrument to the BNC connector of the 16435A (interlock cable adapter) by using the BNC cable that is furnished with the adapter.

2.Connect the 16435A adapter to the interlock connector by using the 16493J Interlock cable.

Agilent E5250A User’s Guide, Edition 9

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Agilent Technologies Agilent E5250A manual To Connect Interlock Circuit to Instrument, Procedure

Contents

Agilent E5250A Manual Part Number Declaration of Conformity Manufacturer’s Declaration Herstellerbescheinigung Ground the Instrument Safety Summary Do not Substitute Parts or Modify Instrument Use extreme caution when handling, testing, and adjusting CAT Safety Symbols VXIplug&play Driver This Manual Text Conventions Page Contents Executing Self-Test and Leak Test Setting up Measurement Environment Programming the E5250A Controlling the E5250A Command Reference Specifications Error Messages VXIplug&play DriverExecuting Sample Programs Scpi Command Summary Introduction Introduction Available Plug-in Cards for E5250A Agilent E5250A Product Description Rear Panel Tour Front Panel Tour E5250A Rear Panel AUX Input Agilent E5252A Product Description E5252A Block Diagram E5252A Output Ports May be present at the output connectors Agilent E5255A Product Description ConnectorsBias Input IV Input By resistors must be less than 16W Resistors E5255A Block Diagram Bias Input Output E5255A Input/Output Connectors ⋅8 multiplexer Options Model Option Item Description Number Options and Accessories Furnished Accessories Model Part Number Description Qty Virtual Front VFP Data UploadCapacitance Compensation Available Accessories Model Option Description Number Agilent E5250A User’s Guide, Edition Installation Installation When shipping the E5250A To Inspect the E5250A and Accessories Power Requirements Power CableRequirements Installation Operating Environment Storage and Shipping EnvironmentDefeated Installing the E5250A To Install Plug-in Card Module Extractor and Location of the Screw Hole To Install Blank Panel Block Holder Cable Connector To Configure E5255ATo Modify IV Input Multiplexer Blocks and Components To Modify Bias Input To Use Multiplexer Blocks on another E5255AAgilent E5255A Component Locations To Select Protective Resistors To Mount Protective Resistors E5255A Configuration Examples Output multiplexer 3-BIAS inputs, 1-IV input, 1 moduleOutput multiplexer 3-BIAS inputs, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module Output multiplexer 1-BIAS input, 1-IV input, 1 module To connect Bias inputs externally Interconnection of Bias Input Connectors Output multiplexer 1-BIAS input, 1-IV input, 4 modules Output multiplexer 1-BIAS input, 1-IV input, 4 modules To Connect Gpib Cable To Set Gpib Address Maintenance CleaningPerformance Verification Executing Self-Test and Leak Test Performance Verification Executing Self-Test and Leak Test E5250A Self-Test Items Description Executed by Refer to Executing Self-Test To Execute Self-Test Standalone Executing the Controller TestExecuting the Relay Test Settings after Relay Test If Fail LED is on after Relay TestRelay Test Adapter Connection Scpi Commands for Self-Test To Execute Self-Test using External ControllerRequirements Before executing Relay Test, be careful about following Front Panel Interface Test Scpi Commands for Self-Test Test Item Description Assign Self-Test Programming Example Line Number Description Requirements Using the Self-Test Utility Softkey Description To Start the Self-Test Utility Example of Self Test Menu To Execute Self-Test Fail Condition for Front Panel Interface Test Executing the Front Panel Interface Test Continue To Execute Leak Test Start Test YES Message for non-Kelvin connection Report CRT Agilent E5250A User’s Guide, Edition Setting up Measurement Environment Setting up Measurement Environment Connector Plates Connector Plates for the E5252AConnector Plates for E5255A 16495E Half size blank plate Blank Plate Example of DUT Connection Connecting 8-Channel Shielded Coaxial Cable Mounting Connectors Directly Recommended Parts Usage Agilent Part Description Dimensions of Connector Holes To Install Interlock Circuit Interlock Connector Pin AssignmentsTo Make Interlock Circuit Dimensions of Interlock Switch Agilent part number Dimensions of LED Agilent part number To Install LED Circuit Procedure To Connect Interlock Circuit to InstrumentRequired Parts Agilent Quantity Description Model No To Check Interlock Circuit Connector Guard Sense Wire Insulator Plate To Connect Connectors to DUT Low-Noise Coaxial Cable To Connect Instruments to Input Connectors Connecting the E5250A Input Mpsmu Connection Example with Agilent Shows an example of connecting the E5250A to To Connect Bias Source to the E5255A Bias Input To Connect Gndu to the E5250A InputRequired Parts Agilent Quantity Description Model/Part No Connection of Triax-Dual Triax Adapter SMU Input Port Number Input Signal E5252A Output Connector and Output Signal Connecting the E5250A OutputTo Connect the E5252A Output E5252A Output Cable Agilent Model No Description 16494B Kelvin Triaxial Cable for E5252A Kelvin Output Port Output Port Number To Connect the E5255A Output E5255A Output Connector and Output Signal Measurement Cable Length Guard Capacitances of E5250A Measurement Environment Typical Controlling the E5250A Controlling the E5250A Creating Your Own Program Methods for Controlling the E5250ACapacitance Compensation Routine Windows Workstation Using the Virtual Front Panel VFP Utility Modifying a Sample ProgramVFP Data Upload Library Switch Control Basics Syntax of channellist Parameter Channel List and Channel Configuration Agilent E5250A User’s Guide, Edition Channel Configuration NormalAuto Free Connection Rule Connection Sequence Relay Operation Connection Sequence Bias Mode Example of Bias Mode Couple Port Couple Port Number and Output Port NumberCouple Input Ports Available Output Port No Couple Port Relay Connections E5252A Channel List Normal Configuration Mode E5252A Channel Number in Normal Config. Mode Switch Control Basics Auto Configuration Mode Controlling the E5250A E5255A Channel List E5255A Channel Number in Normal Config. Mode Auto Configuration Mode Example Setup of E5255A SMU1 Example for E5255A Channel Number in Auto Config. Mode Using Virtual Front Panel Utility Functions of Virtual Front Panel Utility Model/Part No Description Qty Starting the Virtual Front Panel Utility Mode Confirming the E5250A Card Configurations Channel Configuration mode Changing the VFP Setup ModeBias Mode state of each card Model Number of each card To change the Bias Mode state To change the channel configuration modeTo enter/cancel the changes and return to the VFP main menu Example of Setup Mode Menu To define labels for the E5250A input ports Defining Labels for the E5250A Input Ports Example of Define Label Menu To define labels for the E5255A bias input ports Next Setup Making Connections and Changing the Setup Data To change the E5250A setup to specified setup memory To copy a setup memoryExample of Setup Memory Menu To delete a setup memory To insert a setup memoryTo clear setup memory Memory Setup Panel for the E5252A in Auto Config To modify the settings in Current Setup Memory Using Virtual Front Panel Utility Chan To enter a comment for the setup memory To change the settings in a setup memoryInvalid Input Port Moving the Cursor Softkey Menu ALL Saving/Loading the Setup Data To save setup data to disketteTo load setup data from diskette Programming the E5250A Programming the E5250A Scpi Programming Basics Using a Semicolon to Reduce Typing Scpi Command Hierarchy Example Controlling E5250A by Using HP Basic Creating a Control Program Programming Summary Description Command Default Setting Defining Channel Configuration Mode Command DescriptionDefining Connection Rule Defining Connection Sequence Command Description Using Bias Mode Routcoupport cardno ,`inputportno Using Couple Port for E5252A only Routopen channellist Controlling Relay Switching Programming Examples Channel Creation Example E5250A Installed CardsMosfet Connection Example E5250A Input Ports Line Description Number Program List Bias Mode Example E5255A ConnectionE5255A Output Ports Example Using Bias Mode Agilent E5250A User’s Guide, Edition Example of Couple Port Couple Port Example Example Using Couple Port Agilent E5250A User’s Guide, Edition Using the VFP Data Upload Library VFP Data Upload Library Initvfpsetup subprogramLoadvfpdata subprogram Data string for internal use in the library. Must declare FNGetvfpcomment$ subprogram Connectvfp subprogram Programming Example Before Executing Your Program Error Messages Using the Capacitance Compensation Routine Freq Capacitance Compensation Routine Required Conditions Using Other than Recommended Cable Program Line No Defines R, L, C value Measurement Parameter Frequency Function Terminals a GET Ccompen Command Reference SYSTem ROUTe Capital Letters Textual Notation for Subsystem Commands Common Commands Common Commands for E5250AMnemonic Name CLS Bit Binary Description Weight Command Reference *ESE ESR? Response Type Explanation IDN? OPC Bias Enabled Channels Bias ModeCouple Port Mode Connection Rule SRE Following four lines enable the same bits bit 4 STB? TST? DIAGnostic Command Tree DIAGnostic SubsystemCommand Parameter Parameter values DIAGnosticTESTCARDCLEar DIAGnosticTESTCARDEXECute?Parameter Explanation DIAGnosticTESTFRAMeCLEar DIAGnosticTESTCARDSTATe? DIAGnosticTESTFRAMeEXECute? DIAGnosticTESTFRAMeSTATe? ROUTe Subsystem ROUTe Command Tree Parameter values Cardnumber ROUTeBIASCHANnelDISableLIST ROUTeBIASCHANnelDISableCARD ROUTeBIASCHANnelDISableLIST? ROUTeBIASCHANnelENABleCARD ROUTeBIASCHANnelENABleLIST ROUTeBIASCHANnelENABleLIST? ROUTeBIASPORT ROUTeBIASPORT? ROUTeBIASSTATe ROUTeCLOSeCARD? ROUTeBIASSTATe? ROUTeCLOSeLIST? ROUTeCLOSeLIST ROUTeCONNectionRULE? ROUTeCONNectionRULE ROUTeCONNectionSEQuence ROUTeCONNectionSEQuence? Coupleport ROUTeCOUPlePORT ROUTeCOUPlePORT? ROUTeCOUPleSTATe ROUTeCOUPleSTATe? ROUTeFUNCtion? ROUTeFUNCtion ROUTeOPENLIST ROUTeOPENCARD ROUTeOPENLIST? SYSTem Subsystem SYSTem Command Tree Cardconfiguration newlineEND SYSTemCCONfig? Following SYSTemCDEScription? SYSTemCPON SYSTemCTYPe? SYSTemVERSion? SYSTemERRor? Status Reporting Structure Status Reporting Structure Status Reporting Structure of E5250A Status Byte Register of E5250A Status Byte Register Status Byte Register of E5250A Bit Definition Explanation Service Request Enable Register of E5250A Service Request Enable Register Standard Event Status Register of E5250A Standard Event Status Register Bit Definition Explanation Standard Event Status Enable Register Output Queue of E5250A Output Queue Agilent E5250A User’s Guide, Edition VXIplug&play Driver VXIplug&play Driver System Requirements Installing VXIplug&play Driver Driver Functions E5250A Driver Function ListsCategory Function Description Agilent E5250A User’s Guide, Edition Hpe5250abiasChanList Hpe5250abiasChanCard Hpe5250abiasChanListQ BiasdisenBiasstatus Hpe5250abiasState Hpe5250abiasPort Hpe5250aclose Hpe5250acloseCardQClosecard Hpe5250acloseList Hpe5250acmd Hpe5250acloseListQClosestatus Cmdstr Hpe5250acmdInt Hpe5250acmdDataQSize Result Hpe5250acmdInt16ArrQ Hpe5250acmdInt16QCount Hpe5250acmdInt32Q Hpe5250acmdInt32ArrQ Hpe5250acmdReal64ArrQ Hpe5250acmdReal Hpe5250acmdStringQ Hpe5250acmdReal64Q Hpe5250acompenC Cardnoruleseq Hpe5250aconnRuleSeqRule Sequence Hpe5250acouplePort Hpe5250adcl Hpe5250acoupleStateCouplestatecardn Couplestate Hpe5250aerrorquery Hpe5250aerrormessageErrornumber Message Hpe5250aerrorQueryDetect Hpe5250aerrorQueryDetectQPErrDetect Hpe5250aesrQ ChannelconfigHpe5250afunc Errstr Hpe5250ainit DoresetHpe5250aopcQ InstrDesc Hpe5250aopenCard Hpe5250aopenListOpencardno Hpe5250areadStatusByteQ Hpe5250aopenListQOpenstatus StatusByte Hpe5250arevisionquery Hpe5250aresetDriverrev Instrrev Filename Hpe5250aselectCompenFile Hpe5250atestClear Hpe5250aselftestTestresult Testmessage Hpe5250atimeOut Hpe5250atimeOutQHpe5250atestExecQ Agilent E5250A User’s Guide, Edition Executing Sample Programs To Keep Original Program Disk Executing Sample Programs Introduction Vth and Capacitance Measurement Program Step Description Vth and Capacitance Measurement Flow Channel/Source Setup Vth Measurement SetupSource Setup User Function Setup Capacitance Measurement Setup Display Setup Xaxis Y1axis Y2axisAuto Analysis Setup Required Equipments Agilent Model/Part No Description Qty Setting up the Measurement Environment Vth and Capacitance Measurement Program Vth and C Measurement Setup and DUT Connection Executing the Program Example of Vth and C Measurement Results Modifying the Program Parameter Description DefaultTo change the Gpib Address To change the header of the measurement result report To output the measurement report to printer To execute the 4155/4156 calibrationTo save the 4155/4156 measurement data To change the Vth measurement setup To change the capacitance measurement setup Subprogram Program Line To use the VFP data upload library Constant Definition To Add the Bias Source Control Routine HCI Measurement Program Test Device for Defining Stress Conditions Determines Stress Condition Selects devices valid for the HCI test Characterizes the initial parametersDevice Device2 Terminal Auto Analysis Function Stress Stress time Cumulative Cycle Applies stress and characterizes the parameters Required Equipment Agilent Model/Part No Description Qty Required Equipments Subend Adding the Bias Source Control Routine Setting up the Measurement Environment E5250A Input/Output Connection Internal Connections and DIP SW Settings for E5255AsE5250A Input Measurement E5255A Output Port Port Device used to Determine Stress Conditions DC HCI Degradation Test Equipment Connections Load Spmux Edit Id-Vds Measurement Example To Execute HCI Test Program Example of Ib-Vgs Measurement Results HCI Degradation Test Result Example Initial/Interim Characterization Example To Execute Analysis Program HCI Degradation Test Data Analysis Example Number of devices Vdstr, Vgstr, Gate length, Gate width Modifying the Program To change Vtci extraction condition To change the 4155/4156 setup file used To change Idlin and Gmmax extraction condition To change the number of devicesTo change the stress times To change the test limits To specify the data displayed on the 4155/4156 screenTo change the timing for saving the test data Specifications 10-2 Agilent E5250A User’s Guide, Edition Dimensions General Specifications Switch Specifications Agilent E5252A 10x12 Matrix Switch Supplemental Data Typical Data 10-6 Agilent E5250A User’s Guide, Edition Agilent E5255A 24 8x3 Channel Multiplexer Low Leakage I-V Port Accessories Operating To 40 C Storage −40 C to 70 COperating Supplemental Data when used with Agilent 4155/4156 Supplemental Data when used with AgilentRange Setting Measurement 10-10 Agilent E5250A User’s Guide, Edition Error Messages Error Category Standard Event Error Range Error Category Command Error Standard Scpi Error Messages Command header error Data type errorHeader separator error Invalid separator Character data error Numeric data errorInvalid character in number Exponent too large Block data error String data errorExpression error Character data not allowed Execution Error Device-specific error Device-Dependent ErrorsMemory error Queue overflow Query Errors E5250A Specific Error Messages E5250A Channel Related Errors E5250A Card/Mode/Port Related Errors Config error. Re-install E5255A Cannot connect multiple channels in SROUTe modeCant change to ACONfig mode. Check card config Cannot directly specify Bias Port channel 11-14 Agilent E5250A User’s Guide, Edition Scpi Command Summary 12-2 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-3 12-4 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-5 12-6 Agilent E5250A User’s Guide, Edition Agilent E5250A User’s Guide, Edition 12-7 12-8 Agilent E5250A User’s Guide, Edition