Hitachi S-4800 manuals
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294 pages 6.95 Mb
1 Please read through this manual carefully before using the instrument2 NOTICE:3 APPLICATIONCAUTION 5 Period of GuaranteeDetails of Guarantee Exclusions from Guarantee 6 Limitations on Guarantee7 InstallationAfter-salesService 8 Available Training ProgramsHandling of Chemicals Instruction Manual 9 General Safety GuidelinesDANGER WARNING NOTICE 10 Maintenance of Warning LabelsWarning Labels 11 Electrical Hazard12 High Temperature HazardMagnetic Field Hazard 13 Laser light Hazard15 Pinch16 Fig S-3Warning labels on the Main unit (ANSI style labels)17 Fig S-3Warning labels on the Display unit (ANSI style labels)18 Beware ofelectric shock Electron Gun / Ion pump Baking Beware of high Rotary Pump Beware of low Magnetic Fields 19 Laser Light20 •Water Leakage Detection•Third Party’s Industrial or Proprietary Rights •Cooling Water •Backup of Important Data 21 •Third Party’s Application Programs•Protection against Computer Viruses •Do Not Change Computer Settings 22 •OS operation during S-4800SEM operation•Power Failure •Personal Computer (PC) Alt, Ctrl Delete Exit •Other Precautions for operation “Precautions When Using the S-4800 SEM 23 Emergency Off ButtonFig S- 5 Location of Emergency Off button NOTE 24 Main Power DisconnectPower Supply and Grounding Connection 25 INTERLOCKElectron Gun Ion Pump Other High Voltages Baking power supply Unit power supply Protection for Earthquakes Gravity location of units Water-leakagedetection 31 Fig S- 11 Gravity location of Display unit33 1.PRECAUTIONS FOR TRANSPORT2.PRECAUTIONS FOR POWER CONNECTION 35 EVAC POWERDISPLAY POWER EMERGENCY 3.GENERAL PRECAUTIONS 4.MEASURES FOR EMERGENCY 36 5.CAUTIONS ON OPERATIONHV OFF 6.OTHERS 37 7.FLASHINGFig. 1 Principle of Field Emission Gun Fig. 2 Change of Emission Current with Time 38 Fig. 3 Status Transition of Adsorbed Gas Molecules on Cathode Tip39 Execute‘2’ HV ON ‘3’ 40 1. Resolution:2. Magnification: 3.Electron Optics: 41 4.Specimen Stage5.Display Unit 42 6.Evacuation System7.Protection Devices 43 1.Power Requirements2.Physical Dimensions 3.Installation Environment 44 OscillationAllowable Amplitude (X, Y) Allowable Amplitude (Z) Frequency : f (Hz) Allowable Noise Level（Type I） Allowable Noise Level (Type II） 45 4.Water Supply and Drain46 Table of Contents47 Table of Contents (Cont’d)PRECAUTIONS ON HANDLING PRECAUTION-1 Precautions for Transport Precautions for Power Connection General Precautions PRECAUTION-3 Cautions on Operation PRECAUTION-4 PRECAUTION-5 SPECIFICATION PRECAUTION-8 PRECAUTION-11 52 1.1Installation Requirements1.1.1General 1.1.2Room Temperature and Humidity 53 1.1.3Line Power Requirement1.1.4Grounding 1.1.5Water Supply and Drain 54 1.1.6Stray Magnetic Field55 1.1.7Floor VibrationTable 1-2Allowable Vibration Vibration 56 Fig. 1-1Vibration Transmittance - Frequency Characteristics57 1.1.8Power Line Noise and Electric Field NoiseTable 1-3External Noise Sources 58 1.1.9Disturbance by Sound Waves1.1.10 Site Requirements 1.1.10Site requirements Floor loading capability (kg / m2 ) Total mass of equipment (kg) Floor area of the room (m2 ) 59 Fig. 1-2Installation Layout example60 1.2Materials or Instruments to be prepared by UserSee Table Table 1-4Materials or Instruments to be Prepared by User Name Quantity Remarks 1.3Wiring Only cautions with respect to wiring are described here 61 1.3.1Power and Ground WiringsFig 1-3Connection of the step down transformer Fig 1-4Connection of the step down transformer 62 Fig 1-5Connection of the step down transformer63 Fig. 2-1aModel S-4800System (type 1)Fig. 2-1bModel S-4800System (type 2) 64 2.1Control Knobs and Switches on Main Unit2.1.1Main unit (Column) Fig. 2-2shows the appearance of the S-4800main unit (type I) Fig. 2-2 S-4800Main Unit (type 1) 65 Fig. 2-3sketches the sectional view of the S-4800columnFig. 2-3Sectional View of S-4800Column 66 Fig. 2-4Specimen Stage (type I)67 Fig. 2-5Large Specimen Stage (type II)68 Fig. 2-6specimen exchange device69 Fig. 2-7Evacuating System70 Fig. 2-8aEvacuation Control Panel71 Fig. 2-8aDisplay / Operation area75 2.2Control Knobs and Switches on Display Unit2.2.1Display Fig. 2-9Display Unit 76 Fig. 2-10PC PanelFig. 2-11Manual operation Panel 77 Fig. 2-12MouseFig. 2-13Manual operation Panel 78 2.3Graphical User Interface (GUI)2.3.1Starting the PC and logging in the S-4800program Administrator : Power User Fig. 2-14example of Windows desktop 79 Fig. 2-15 S-4800Loin dialog window80 2.3.2S-4800SEM Main WindowFig. 2-16 S-4700Operation Window Fig 2-16 S-4800Main window 81 Fig 2-17 S-4800Main window (Small and Dual screen mode)2.3.3Control arrangement on the window 83 2.3.4MenuFile •Open SEM Data Manager Opens the SEM Data Manager window • Direct Save Save Captured Image • Direct Photo • Memory Photo • Layout Print the SEM Data Manager • PCI Transfer • Exit Edit • Copy Image • Copy Attribute Setup HV Control 84 • ColumnColumn • Condition Load Op. Cond • Condition Save • Image Display Image • Photo Condition • Data Display Operate • Alignment Alignment • Sample Map Stage History • ABCC • Auto Focus • Auto Stigma • Focus Monitor • BC Monitor • Mag Mode 85 Scan• Run (Freeze) • Capture • Capture Reso • Split DM Mode • Scan Speed Arrange Speed buttons • Scan Size Opt. Signal Processing Opt Signal Processing Analysis • Normal • Line Analysis • Spot Analysis • Area Analysis • Oblique • Measure 86 Option•Optional Setup Op. Panel Setting Toolbar Setting - Stage Mouse Operation - General • Login Setting • Password Setting • Stage Calibration Window • Captured Image • Close All • Opening window list 87 Help• Maintenance ECO mode setting • Index Show the index of S-4800Help • Search Show the key-wordsearch of S-4800Help • About FE-PCSEM Undo 88 2.3.5Control Panel2.3.5.1Functional blocks on the Control Panel Fig 2-18Control panel 2.3.5.2HV control block • Vacc select 89 (3) Flashing controller90 2.3.5.3Scan control block2.3.5.4Auto control 91 2.3.5.5Monitoring function(1) Align 2.3.5.6Magnification control 92 2.3.5.7Image recording(1) Capture button (2) 93 Layout PrintReport Generation SEM Data Manager Direct Photo Memory Photo: PCI Transfer : 94 2.3.5.9Extension for Dual screen modeFig 2-19Control Panel (Dual screen mode) (1) Run / Freeze buttons 95 2.3.6Operation PanelFig 2-20Operation panel 96 2.3.6.1SIGNAL SELECT block97 2.3.6.2OPE CONDITION block98 2.3.6.3R.ROTATION block2.3.6.4SCAN MODE block 99 2.3.6.5SCAN SIZE block2.3.6.6DATA ENTRY block 100 2.3.6.7SIGNAL PROCESSING block• Smooth : • Sharpen : • Edge Enhance : • Invert : • Gammma : 101 2.3.6.8TILT COMPENSATION block2.3.6.9COLOR MIXING block 102 2.3.6.10Scroll bar and area marker block2.3.6.11Scroll bar and area marker block 2.3.6.12Other optional function block 103 2.3.6.13Arrangement of control blocks104 2.3.7Mouse operation on the scanning image2.3.7.1.Exchanging mouse control functions S button Fig 20-21Mouse 2.3.7.2Focus/stigma/contrast/brightness adjustment Fig 2-22Mouse control (Focus/stigma/contrast/brightness) 106 2.3.7.3Stage and image shift toolsFig 2-23Mouse control (stage) 2.3.8Setup dialog window 107 2.3.8.1 Column tab109 2.3.8.2 Image tab110 2.3.8.3 Record tab(1-1) Auto Data Display Data Number (1-5) Embed into Image checkbox For Photograph is checked (2-1) Memory Photo Normal Enhance 111 (4-1) Film Speed112 2.3.8.4OP. Cond tabFig 2-24Condition Load/Save 113 2.3.9Captured Image WindowCaptured images are displayed as thumbnails on this window Fig 2-25Captured Image window Delete button : Deletes the selected image View button : Open the selected image on the viewer window Layout Cond Photo button : Start memory photographing of the selected image Sta PCI Refer to < 3.6.4 Image Capturing > and < 2.3.34 Save Image Dialog Window 114 2.3.10SEM Data Manager Window2.3.11Alignment Dialog Window Fig 2-26Alignment window Off Aperture Align button Aperture Align Reset button Reset All button Close button 115 2.3.12CD Measurement dialog window (option)2.3.13Comm Port Setting Dialog Window Comm Port Setting Comm Port Speed Character Length Parity Stop Bit Hand Shaking Retry 2.3.14Login Setting Dialog Window Login Setting 116 2.3.15Oblique Dialog WindowOblique 2.3.16Password Setting Dialog Window Password Setting 117 2.3.17Save Image Dialog Window2.3.18Opt Signal Processing Dialog Window 2.3.19Split/Dual Mag Controller Split DM 118 2.3.20Using Short-CutKeysAlt Direct Save arrow Enter Beam Align Low Mag Position 119 3.1Preliminary Operation3.2Specimen Setting 3.3Application of High Voltage 3.4Optimizing the Electron Beam 3.5Operation for Image Observation 3.6Saving and Recording Images 3.7SEM Data Manager (3.1.1) (3.1.2) •Use of Anti-ContaminationTrap and Cold Trap .(3.1.3) Cautions on Specimen Preparation (3.2.1) Specimen Preparation for Materials (3.2.2) (3.2.3) (3.2.4) (3.2.5) (3.3.2) •Setting of Accelerating Voltage and (3.3.3) (3.3.4) Selecting Electron Optical Column Condition (3.4.1) (3.4.2) (3.5.1) (3.5.2) Image Brightness and Contrast Adjustment (3.5.3) (3.5.4) Operation of the Specimen Stage Type 1 (3.5.5) Operation of the Specimen Stage Type 2 (3.5.6) (3.6.1) Setting Conditions for Image Capturing (3.6.2) (3.6.3) •Saving an Image Displayed in the Scanning Image Screen (Direct Save) (3.6.4) (3.6.5) (3.6.6) Precaution about SEM Data Manager (3.7.1) Registering Images (3.7.2) (3.7.3) 121 3.1Preliminary Operation3.1.1Check of Column Vacuum IP1 IP2 IP3 TMP POW ON NORMAL SC EVAC APT HEAT AUTO 122 3.1.2Flow the cooling water123 3.1.3Starting the DisplayDISPLAY 124 3.1.4Use of Anti-ContaminationTrap125 3.2Specimen Setting and Specimen Exchange3.2.1Cautions on Specimen Preparation 3.2.2Specimen Preparation for Materials 126 stage lock127 EXCStop 3.2.5How to Set Specimen 3.2.5.1 Extracting specimen from stage 129 3.2.5.2Opening the specimen exchange chamber door3.2.5.3 Setting a specimen Turn the knob clockwise so as the Unlock mark comes upwards 130 3.3Application of High Voltage3.3.1Condition where the gun high voltage is applicable 3.3.2Flashing 3.3.2.1 About flashing 3.3.2.2Flashing Procedure 131 3.3.3Setting of Accelerating Voltage and Emission CurrentVacc Set Ie to Accelerating VoltageEmission Current 132 3.3.4Application of High VoltageSET 133 3.4Optimizing the Electron Beam3.4.1Selecting a Magnification Mode 3.4.2Selecting Electron Optical Column Condition 3.4.2.1 High Mag mode 136 NOTESABCC Link Column Tab 137 manner138 3.4.3Column Alignment OperationSTIGMA/ALIGNMENT 139 Aperture Align140 DeGaussNOTE: Stigma Align Stigma Align Y Area Marker Operation panel H/L 142 3.5Operation for Image Observation3.5.1SE detector 143 U/D Variable3.5.1.1Secondary and backscattered signals and their Characteristics 144 General Characteristic of signals utilized in S-48003.5.1.2Signal Control 145 H.A146 3.5.2Selecting MagnificationPreset Preset Magnification 147 3.5.3Selecting Scanning SpeedRun/Freeze Scanning Image 149 3.5.4Image Brightness and Contrast Adjustmentcontrol panel ABCC Adjust Beam Monitor Signal 150 Scroll BarBC Monitor Cancel BC Monitor mode Scanning Speed Adjust 152 3.5.5Focus and Astigmatism CorrectionAuto Focus 153 Auto Stigma155 3.5.6Operation of the Specimen Stage (Type I - Manual Stage)3.5.6.1 Movable range and specimen exchange position 3.5.6.2 Movable range limitation of X, Y and R axes 156 3.5.6.3 Tilt and Z axes limitation157 Important3.5.6.43 axes motorized stage (Type1 stage option) 158 Movable range of X and Y directions (3 axes motorized stage)3.5.6.5Stage Locking 159 3.5.7Operation of the Specimen Stage (Type 2 - 5-AxisMotorized Stage)3.5.7.1 Coordinate notation 160 3.5.7.2 Movable range and specimen exchange position161 3.5.7.3 Setting specimen size and detectors in useSet Sample Size/Detector Set HOME 162 3.5.7.4Valious operation for specimen stage163 3.5.7.5Stage tabBasically use the Stage tab of the operation panel for stage operation 164 3.5.7.6X, Y, R axes operationXY Display / Input Abs / Rel select R Display / Input Rotation eucentric Rotation 165 3.5.7.7Z and Tilt axes operationPriority Tilt Continuous 167 3.5.7.8 Stage mouse operation on the scanning image173 3.5.7.9 Position memory functionGet Position Comment Rel Get Relative Next 174 3.5.7.10 Stage History function175 3.5.7.11Image Navigation177 3.5.7.12 Rotation Assist function179 3.5.7.13 Rotation / tilt eucentric function and calibration181 Stage tilt calibration184 3.5.7.14 Stage lockLock Release 185 3.5.7.15Stopping stage and Returning to previous stage position186 3.5.7.16Moveable range and limitation by optional detectors187 Fig 3-1XY movable range for various specimen size189 3.6Saving and Recording Images3.6.1Saving and Recording Images 190 3.6.2Preparing Images for RecordingEmbed Into Image Data Display Record For Photograph 191 3.6.3Setting Conditions for Image Capturing192 3.6.4Image Capturing193 3.6.5Saving a Scanning Image (Direct Save)Image Type Save Option Quick Save All Save SEM Data Manager 194 3.6.6Saving Captured ImagesSave Image 3.6.7Taking Photographs (Option) 195 sensitivespecimens, or to shorten recording 196 Memory Photo(c)Photographing saved images SEM Data Manager 197 3.7Using SEM Data Manager198 3.8At the End of Daily Use3.8.1Turning High Voltage Off 3.8.2Setting the Stage at the Specimen Exchange Position 3.8.3.Taking Out a Specimen 199 Important:200 3.8.4Closing Windows and Shutting the Display PowerCAUTION: 201 3.9Using Other Functions3.9.1Screen Mode 202 Signal Select203 3.9.2Split Screen and Dual Mag ModeSplit DM Mode 204 Split/Dual Mag3.9.3 Signal Selection and Color Mixing 205 Record A/B206 3.9.4 X-rayAnalysis ModeBack Ground 208 3.9.5Signal Processing210 3.9.6Operating Condition Memory212 3.9.7Pseudo Color Display3.9.8Data Entry Function 213 Shadow215 3.9.9Raster Rotation, Dynamic Focus and Tilt CompensationR. Rotation WD-Rotation Link Dynamic Focus 216 Tilt Compensation217 3.9.11Printing images using Report generation function219 3.9.12Copy Image3.9.13Copy Image information text Copy Attribute 220 3.9.14Oblique Image221 3.9.15Optional settingU/L SED Ratio Variable 222 StageSlow Fast 223 3.9.16Password SettingOld Password New Password Confirm Password New Confirm Password 3.9.17Setting Login Name 224 Login Name225 3.10Image Quality3.10.1Accelerating Voltage and Image Quality 226 3.10.2Condenser Lens Setting and Image Quality3.10.3Objective Lens Aperture Size and Image Quality 227 3.11Mechanical Column Alignment3.11.1Preparative Operation for Alignment 228 3.11.2Mechanical Alignment of the Electron Gun3.11.3Alignment of the Beam Monitor Aperture 229 3.11.4Alignment of the Objective Lens Aperture3.11.5Mechanical Alignment of the First Condenser Lens Cond Lens 3.11.6Mechanical Alignment of the Second Condenser Lens 230 3.11.7Stigma Alignment (electro-magneticalignment)3.11.8Aperture Alignment (electro-magneticalignment) 231 Beam Monit232 3.12Using SEM Data Manager3.12.1Precaution About SEM Data Manager Batch Process Remove List Add From File 233 3.12.2Functions 3.12.2.1 Image Database234 3.12.2.2Menu and tool buttons237 3.12.3 Operation3.12.3.1 Registering Images on SEM Data Manager Database 238 3.12.3.2 Selecting User name and opening data tree239 3.12.3.3Image display240 3.12.3.4Image information3.12.3.5Viewer display 3.12.3.6Data Entry 243 3.12.3.7Contrast Conversion246 3.12.3.8Image Processing247 3.12.3.9Color Mixing249 3.12.3.10Printing images3.12.3.11Image file operation Image Save 252 3.12.3.13Slide showSlide Show 3.12.3.14Optimizing and repairing database file 253 4.1Maintenance of Electron optical Column4.1.1Maintaining Vacuum of Electron Gun and Intermediate Chamber 4.1.2Replacement and Cleaning of Objective Lens Aperture 254 Fig. 4-1Objective Lens Aperture unit255 4.1.3Cleaning of Aperture Plates256 Fig. 4-2Baking of Aperture Plate257 4.2Maintenance of Rotary Pump （Only for P/N 539-9010and 539-9060）4.2.1Oil Change 258 NEOVACMR-100 4.2.2Replacement of Oil Mist Trap 259 4.2.3 TroubleshootingSymptom Cause Countermeasure 260 4.3Maintenance of Air Compressor（Only for P/N 539-9010and 539-9060）4.3.1Checkup and Maintenance Check the following items regularly Before checkup/maintenance, be sure turn the main switch off Service Cycle Check Item Procedure Every Every 250 h Every 3,000 h Every 6,000 h day (1 month) (1 year) (2 years) 262 4.3.2Troubleshooting of Air CompressorProbable Cause Remedy •When asking the service agent for repair, please notify them of the following 1. Model code 2. Symptom of trouble 3. Location of installation site 263 4.3.3Location and Functions of Major Components264 4.4Troubleshooting4.4.1When Column Evacuation does not Work 4.4.2When Specimen Exchange Chamber Vacuum is not Good 265 4.4.3When Specimen Chamber Vacuum is not Good4.4.4When Ion Pump Vacuum Degraded 266 4.4.5When Emission Current is not Set at Normal Value4.4.6When Image is not Shown on Screen 267 4.4.7When Image is Very Noisy268 4.4.8When You cannot Correct Astigmatism4.4.9When Auto Focus or Auto Stigma does not Work Satisfactorily 269 4.4.10When S-4800control program does not start up4.4.11When PC has Hanged up 270 4.4.12When Error Messages are shown4.5Operation for shutting down all power supply of S-4800 POFF OFF 4.6Operation when power was shut down by power line failure 271 4.7Operation for Starting S-4800272 4.8Operation when power line failure recovered4.9Operation when Water supply stopped by failure 273 4.10Gun Baking operation277 4.11Caution on Maintenance278 5.1Consumables and Spare Parts5.1.1Consumables The items shown in Table 5-1should always be on hand for normal operation Table Part No Part Name Use 279 5.1.2Replacement PartsThe items below should be prepared in the necessary quantities Table 5-2Replacement Parts Expiration 280 5.1.3Spare Parts281 6.1Model S-5080 Auto-Camera(option)6.1.1Configuration Fig. 6-1Model S-5080 Auto-Camera (Configuration for image ratios of 1:1 is shown.) 282 Fig. 6-2Configurations of Various Film Holder Units (Option)283 6.1.2SpecificationsREMARKS: 285 6.1.3Assembling the CameraFig. 6-34″ ⋅ 5″ Film (Magnification of 1.0) Fig. 6-4Polaroid 107 Film (Magnification of 0.8) Fig. 6-5Roll Film 120 (Magnification of 0.6) 286 6.1.4OperationTable 6-2Aperture for Each Kind of Film 288 INDEX2-22, 2-25, 2-27, 2-28, 2-32, 2-46, 2-47 3-18, 3-19, 3-23, 3-25, 3-31, 3-32 1-3, 3-13, 3-107, PRECAUTION-11 2-10~2-12 2-22, 2-29, 2-52, 2-56, 3-20~3-23, 3-35, 3-44 3-58, 3-59, 3-93, 3-109~3-112, 4-14~4-16 Analysis menu 2-23 2-54 Analysis 2-23, 2-36, 2-54, 3-31, 3-86, 3-88~3-90 2-10, 2-18, 2-23, 2-35, 2-36, 2-45, 2-48, 3-15 3-66, 3-77, 3-88, 3-109, 4-12, 4-14 PRECAUTION-9 2-23, 2-36 2-11, 2-29, 2-52, 3-20~3-23, 3-108, 3-110~3-112 4-1, 4-3, 4-16, 6-3, 6-6, SAFETY-5 2-22, 2-29, 2-46, 3-18, 3-34 3-35, 4-16, PRECAUTION-8 2-22, 2-25, 2-28, 3-34 2-10, 2-12, 4-2, 4-23, 4-24, SAFETY-4 SAFETY-10, SAFETY-17 3-114, 3-117, 3-131 2-22, 3-31 3-21, 3-23, 3-111, 4-14 2-27, 3-31~3-33, 3-110 2-14, 2-15, 2-32, 2-40, 2-43, 3-31 3-77, 3-85, 3-87, 3-102 INDEX 289 2-24, 3-62~3-662-23, 2-30, 2-32, 3-57, 3-58 3-72~3-75, 3-85 Color 2-38, 2-39, 3-74, 3-86, 3-87, 3-94, 3-114, 3-118 3-127, 3-129, 3-130, PRECAUTION-9 2-39, 3-86, 3-87, 3-118, 3-129 2-22, 2-29, 2-52, 3-20, 3-36, 3-109 Condition 2-22, 2-35, 2-44, 2-46, 2-50, 3-12 3-15, 3-77, 3-92, 3-93 Contrast 2-14, 2-15, 2-22, 2-29, 2-40, 2-43, 3-31, 3-77, 3-85 3-87, 3-93, 3-100, 3-107, 3-118, 3-125, 3-126 Copy 2-21, 2-48, 2-56, 3-71, 3-72, 3-101 3-117, 3-118, 3-132 2-21, 2-56, 3-71 2-22, 2-44, 2-48 2-37, 2-51, 3-73, 3-75, 3-78, 3-94 3-103, 3-114, 3-119, 3-122 3-114, 3-115, 3-117, 3-119~3-121, 3-132 3-19, 3-43, 3-68 2-21, 2-31, 2-38, 2-48, 3-71, 3-76~3-78, 3-89 2-21, 2-31, 2-56, 3-71 2-1, 2-9, 2-10, 2-13, 2-22, 2-44, 3-4, 3-5, 3-13, 3-14 3-46, 3-56, 3-72, 3-82, 3-94, 3-117, 4-17, 4-20, 4-23 PRECAUTION-7, PRECAUTION-9, PRECAUTION-11 SAFETY-7, SAFETY-9, SAFETY-13, SAFETY-17 SAFETY-19, SAFETY-23 2-39, 3-97 290 Copy Attribute command3-110, 4-1, PRECAUTION-5, SAFETY-3 3-13, 4-14, PRECAUTION-5 2-21, 2-56, 3-75, 3-78, 3-82 3-99, 3-116, 3-125 2-27, 3-12, PRECAUTION-6, PRECAUTION-7 2-14, 2-15, 2-22, 2-28, 2-29, 2-35, 2-39 2-42, 2-45,3-15, 3-17, 3-21, 3-22 3-34~3-36, 3-66, 3-97, 3-109 Gun Baking 4-1 2-21, 3-12, 3-14, SAFETY-17 2-21, 2-26 291 2-22, 2-29Image menu 3-44, 3-57~3-59 3-114, 3-118 3-107 2-15 4-13, SAFETY-3, SAFETY-17 2-24, 2-53, 3-105 2-52, 2-56, 3-22 3-24 2-22, 3-15, 3-19, 3-85, 3-103 Magnification 1-3, 2-14, 2-15, 2-22, 2-26, 2-29, 2-30, 2-48 3-15, 3-19, 3-28, 3-58, 3-83, 3-115, 6-3, 6-5 PRECAUTION-8, PRECAUTION-11 Memory 2-21, 2-31, 2-40, 2-48, 3-55, 3-71 3-76~3-78, 3-89~3-92 Memory Photo 2-21, 2-31, 2-48, 3-71, 3-76~3-78, 3-89 2-13, 2-22, 2-27, 3-31, 3-32, 3-34~3-36 2-24, 3-32 292 2-23, 2-54Operate menu ABCC command 2-22, 2-52, 3-31, 3-32, 3-34, 3-35, 3-92 2-35, 2-50, 3-92 Option menu 2-24, 2-41, 2-53, 2-54, 3-64~3-66 3-103, 3-105 2-53, 3-105 2-54, 3-105 2-17, 2-24 PCI 2-21, 2-31, 2-48, 2-51, 3-71, 3-72, 3-85 2-22, 2-44 2-21, 2-31, 2-48, 2-56, 3-72, 3-99 3-101, 3-117 3-74, 3-94 Raster Rotation 3-97 2-21, 2-31, 2-55, 3-71 3-72 3-50 293 2-21, 2-31, 2-51, 2-55, 3-75, 3-76Scan menu 2-23, 2-55 2-21, 2-31, 2-38, 2-52, 2-56, 3-74~3-76, 3-78 3-79, 3-94, 3-114, 3-115, 3-117~3-120, 3-122 3-131 Setup menu 2-19, 2-21, 2-44, 3-17, 3-41 2-51 Different Signal Image 2-23, 2-32, 2-34, 2-38, 2-48, 2-55, 3-24~3-27 3-31, 3-84~3-87, 3-90, 3-91, 3-108 PRECAUTION-10 2-23, 2-38, 2-55, 3-90 3-118 Image Observation 2-4~2-6, 2-10~2-12, 2-39, 2-45, 3-7~ 3-9, 3-16 3-18, 3-19, 3-37, 3-41, 3-42, 3-80, 4-12, 4-13 5-3, PRECAUTION-9, PRECAUTION-10 2-4, 2-5, PRECAUTION-9 2-45 2-55, 3-85 Stage Axis Operation 2-4, 2-5, 2-8, 2-18, 2-20, 2-22, 2-24~2-26, 2-31 2-44, 2-51, 3-8, 3-37, 3-40, 3-41, 3-43~3-47 3-49, 3-51~3-57, 3-63~3-68,3-80, 3-93 3-104, 4-17, PRECAUTION-9 3-37 Stigma 2-14, 2-22, 2-25, 2-40, 2-43, 3-20 3-22, 3-35, 3-93, 3-112 3-20, 3-22, 3-35, 3-112 294 2-242-6, 2-21, 2-31, 2-48, 3-72 Troubleshooting 4-7, 4-10, 4-12, FOREWORD-2 WD 2-4, 2-5, 2-35, 2-39, 2-46, 3-15, 3-16, 3-19 3-23~3-25, 3-28, 3-63~3-66, 3-97, 3-98 3-103, 3-110, 4-23, PRECAUTION-10 2-6, 2-18, 2-21, 2-24, 2-51~2-55 Window menu 2-24, 2-51 1-3, 2-4, 3-15, PRECAUTION-11 X-rayAnalysis Mode
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