little or no surface detail on the specimen, or when the specimen is charged, Auto Focus will not operate properly.
2.3.5.5Monitoring function
(1) Align
Opens Alignment dialog window and starts Aperture alignment.
Refer to <3.4.3 Column Alignment operation>
(2) Monit
Waveform monitor mode is activated. The focus monitor and B/C monitor modes are set alternately by clicking the button.
By first click, A waveform is displayed for monitoring the focus. The magnification is set at 1,000X. Focus the image so that the waveform shows sharp peaks.
The next click changes the mode to B/C monitor. A waveform and reference lines are displayed for monitoring contrast (amplitude of the waveform) and brightness (vertical level of the waveform).
When the maximum and minimum values of the waveform are adjusted to fit within the upper and lower reference lines, appropriate brightness and contrast will be obtained.
To terminate the focus monitor and B/C monitor mode, click the Cancel button in the massage dialog shown while in the monitor modes, or click one of the Scan speed buttons.
Refer to <3.5.4 Image Brightness and Contrast adjustment> and <3.5.5 Focus and Astigmatism correction>
2.3.5.6Magnification control
(1)Magnification indicator area Indicates magnification.
On the area, moving mouse pressing down left or right button changes magnification. To increase magnification, drag the mouse to the right. To decrease, to the left.
For coarse changes, press the right button and for fine changes, the left button.
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