3.8At the End of Daily Use

3.8.1Turning High Voltage Off

(1)Close opening dialog windows. Save data if necessary

(2)Click the HV OFF button on the control panel.

3.8.2Setting the Stage at the Specimen Exchange Position

Set the all 5 axes of the specimen stage at the exchange position.

(1)Type1 manual stage Release the stage lock.

Set X = 25.0, Y = 25.0, Z = 8.0 Tilt = 0 and R = 0.

(2)Type2 motorized stage

Release the stage lock.

Click EXC button on the control panel. Wait until the indicator of the button changed to green color.

3.8.3.Taking Out a Specimen

(1)Press the OPEN button on the specimen exchange chamber. Once the exchange chamber will be evacuated and then, the gate valve will open.

(2)Turn the knob of the specimen exchange rod clockwise so as the Unlock mark comes upwards.

Insert the rod straightly and plug the two spring pins at the end of the rod to holes of the specimen holder.

3-80

Page 198
Image 198
Hitachi S-4800 manual Turning High Voltage Off, Setting the Stage at the Specimen Exchange Position, Taking Out a Specimen