Hitachi S-4800 manual Oil Change

4.2Maintenance of Rotary Pump （Only for P/N 539-9010 and 539-9060）

NOTICE

Instruments shipped to Europe area where CE marking conformity is necessary do not provide with the rotary pump. Also instruments those shall be compliant to SEMI-S2 guideline do not provide with the rotary pump even when shipped to outside of Europe area.

CAUTION

Beware of high

temperature

Rotary pump

The surface of the rotary pump reaches a temperature of about 70°C while the pump is operating.

Touching it could result in a serious burn.

The time point of inspection cannot be uniformly determined because operating conditions of vacuum pumps differ. To minimize trouble and maximize service life, conduct periodic inspections (at least once every six months) according to the operating conditions.

4.2.1Oil Change

Condition of the pump oil exerts a great influence on the ultimate vacuum level and the service life of pump. For enabling the pump to provide adequate performance, check the level and contamination of oil through the oil gauge window as frequently as possible.

Under normal operating conditions, oil should be replaced with new one every 6 months, though the recommended period of oil change differs according to actual operating conditions.

(1)Discharge of Oil

(a)Remove the oil injection plug.

(b)Turn the drain valve to discharge oil from inside the box (or remove the drain plug in case of VR16-K/N).

Drain valve

Drain plug

Oil injection plug

NOTICE: For fastening the drain plug, screw it in correctly by hand, and then tighten lightly with a spanner or the like.

CAUTION

The rotary pump is a heavy object weighing about 30 kg. So be careful when lifting the pump for oil change or the like.

4-5