Hitachi S-4800 manual Functions

Table of Contents (Cont’d)

2.	FUNCTIONS		..................................................................................................................	2-1
	2.1 Control Knobs and Switches on Main Unit			2-2
		2.1.1	Main unit (column)	2-2
	2.2	Control Knobs and Switches on Display Unit		2-13
		2.2.1	Display	2-13
	2.3 Graphical User Interface (GUI)			2-16
		2.3.1	Starting the PC and Logging in the S-4800 Program	2-16
		2.3.2	S-4800 SEM Main Window	2-18
		2.3.3	Control arrangement on the window	2-19
		2.3.4	Menu	2-21
		2.3.5	Control Panel	2-26
		2.3.6	Operation Panel	2-33
		2.3.7	Mouse operation on the scanning image	2-42
		2.3.8	Setup dialog window	2-44
		2.3.9	Captured Image Window	2-51
		2.3.10	SEM Data Manager Window	2-52
		2.3.11	Alignment Dialog Window	2-52
		2.3.12	CD Measurement dialog window (option)	2-53
		2.3.13	Comm Port Setting Dialog Window	2-53
		2.3.14	Login Setting Dialog Window	2-53
		2.3.15	Oblique Dialog Window	2-54
		2.3.16	Password Setting Dialog Window	2-54
		2.3.17	Save Image Dialog Window	2-55
		2.3.18	Opt Signal Processing Dialog Window	2-55
		2.3.19	Split/Dual Mag Controller	2-55
		2.3.20	Using Short-Cut Keys	2-56
3.	OPERATION		..................................................................................................................	3-1
	3.1	Preliminary Operation		3-3
		3.1.1	Check of Column Vacuum	3-3
		3.1.2	Flow the cooling water	3-4
		3.1.3	Starting the Display	3-5
		3.1.4	Use of Anti-Contamination Trap	3-6
	3.2 Specimen Setting and Specimen Exchange			3-7
		3.2.1	Cautions on Specimen Preparation	3-7
		3.2.2	Specimen Preparation for Materials	3-7
		3.2.3	Adjustment of Specimen Height	3-8
		3.2.4	Specimen Exchange Position	3-8
		3.2.5	How to Set Specimen	3-9

- iii -