(5)Click the DeGauss button in the Column tab and adjust focus again.
(6)Click the Aperture Align button in the Alignment dialog window, and adjust alignment knobs of the second condenser lens so that wobbling motion of the image is reduced.
(7)Click the Off button in Alignment dialog window to terminate Aperture Align mode.
3.11.7Stigma Alignment (electro-magnetic alignment)
Stigma Alignment is necessary to minimize image drift seen when correcting the astigmatism.
(1)Set the magnification to about 5,000× and position a point of interest in the center of the display.
(2)Focus the image and correct astigmatism.
(3)Click Stigma Align X button in the Alignment dialog window and make adjustments so that the wobbling motion of the image is minimized.
(4)Click the Stigma Align Y button in the Alignment dialog window and repeat the same adjustment as above (3).
(5)Turn off the Stigma Align mode (click Off button in the Alignment dialog window).
NOTICE: Stigma Alignment may not completely stop image movement. Use X50,000 or lower magnification for adjustment.
3.11.8Aperture Alignment (electro-magnetic alignment)
Aperture Alignment is necessary to align the electron beam through the center of the objective lens.
(1)Set the magnification to about 5,000× and position a point of interest in the center of the display.
(2)Focus the image and correct astigmatism.
(3)Click Aperture Align button in the Alignment dialog window and make adjustments so that the wobbling motion of the image is minimized.
(4)Turn off the Aperture Align mode (click Off button in Alignment dialog window).
