3.2.5.2Opening the specimen exchange chamber door
When a specimen is not set inside the chamber and the specimen exchange chamber has been evacuated, open the exchange chamber door as follows.
(1)Press the AIR button on the specimen exchange chamber. Air is introduced into the specimen exchange chamber. Buzzer will sound after about 15 seconds to inform completion of air introduction.
(2)Open the exchange chamber door.
3.2.5.3 Setting a specimen
When a specimen is set inside the chamber, extract the specimen as follows.
(1)Turn the knob of the specimen exchange rod clockwise so as the Unlock mark comes upwards.
Plug the two spring pins at the end of the rod to holes of the specimen holder.
(2)Turn the knob of the specimen exchange rod counterclockwise so as the Lock mark comes upwards.
Confirm that the specimen holder is hooked to the rod.
Pull out the rod completely and close the exchange chamber door.
(3)Press the OPEN button on the specimen exchange chamber.
The chamber is evacuated and then, the gate valve will open.
(4)Looking into the specimen chamber, insert the exchange rod and set the specimen holder into the stage by sliding it along the guide rails.
Turn the knob clockwise so as the Unlock mark comes upwards.
Pull out the rod completely confirming that the specimen holder does not move out with the rod.
(5)Press the CLOSE button on the specimen exchange chamber. The gate valve will be closed and after about one minute, gun high voltage becomes applicable.
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