Relationship between minus tilting angle and Z position is the same as manual stage.
Movable range of X and Y directions (3 axes motorized stage)
Specimen |
| Type1 | |
Size |
|
|
|
X |
| Y | |
|
|
|
|
φ 15mm | 17.5～32.5 |
| 17.5～32.5 |
φ 25mm | 12.5～37.5 |
| 12.5～37.5 |
φ 50mm | 0～50 |
| 0～50 |
φ 75mm | 0～50 |
| 0～50 |
φ 100mm | 0～50 |
| 0～50 |
φ 125mm | 0～50 |
| 0～50 |
φ 150mm | 0～50 |
| 6～50 |
□100mm | 0～50 |
| 6～50 |
□125mm | 0～50 |
| 6～50 |
NOTICE
When optional detector has been inserted to its operating position, further limitation is required.
Refer to the operation manual of using optional detector.
3.5.6.5Stage Locking
For high magnification work, stage locking is recommended for better mechanical stability. The Z and T axes are locked or released by Lock button on the specimen stage.
Release the lock to move Z and T axes.
CAUTION
If the Z or T axes are moved while stage is locked, the stage mechanism may be damaged. X, Y and R axes are free and available when the stage is locked.
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