Relationship between minus tilting angle and Z position is the same as manual stage.

Movable range of X and Y directions (3 axes motorized stage)

Specimen

 

Type1

Size

 

 

 

X

 

Y

 

 

 

 

φ 15mm

17.532.5

 

17.532.5

φ 25mm

12.537.5

 

12.537.5

φ 50mm

050

 

050

φ 75mm

050

 

050

φ 100mm

050

 

050

φ 125mm

050

 

050

φ 150mm

050

 

650

□100mm

050

 

650

□125mm

050

 

650

NOTICE

When optional detector has been inserted to its operating position, further limitation is required.

Refer to the operation manual of using optional detector.

3.5.6.5Stage Locking

For high magnification work, stage locking is recommended for better mechanical stability. The Z and T axes are locked or released by Lock button on the specimen stage.

Release the lock to move Z and T axes.

CAUTION

If the Z or T axes are moved while stage is locked, the stage mechanism may be damaged. X, Y and R axes are free and available when the stage is locked.

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Image 158
Hitachi S-4800 manual Movable range of X and Y directions 3 axes motorized stage, Stage Locking