Hitachi S-4800 manual General Precautions

NOTICE

(1)Allow an interval of at least 20 seconds between turning on or off the EVAC POWER and DISPLAY POWER switches.

(2)Replace the oil filter of the oil-sealed rotary pump every six months.

(3)For the air compressor and oil-sealed rotary pump, perform draining of water, check of oil level etc. with reference to the check card attached to the instrument.

(4)Do not press the EMERGENCY switch except in emergencies. Using this switch causes a complete instrument shutdown that will necessitate a complete instrument restarting.

(5)When attaching the electron gun cover, make sure the lead wires are not in contact with the heater.

3.GENERAL PRECAUTIONS

(1)Maintenance items other than those described in this manual should be left to the service engineer.

(2)Any replacement of the FE (field emission) tip should be performed by a Hitachi High-Technologies Corporation service representative.

4.MEASURES FOR EMERGENCY

(1)Turn off the main switch on the distribution board.

(2)If water is leaking, close the valve of cooling water to cut off the water supply.

(3)After taking steps (1) and (2), carry out other suitable measures.

(4)Inform the service shop.

PRECAUTION - 3