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Hitachi S-4800 manual Fig S- 10 Gravity location of Main unit Type2

Models: S-4800

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Troubleshooting Specification Install Error codes Signal Select block Password Login Wiring Warranty Dimension

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Fig S- 10 Gravity location of Main unit (Type2)

SAFETY - 22

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Hitachi S-4800 manual Fig S- 10 Gravity location of Main unit Type2

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Contents

For Page Foreword Foreword Period of Guarantee Details of GuaranteeExclusions from Guarantee Limitations on Guarantee Installation After-sales Service Available Training Programs Safety Summary Safety SUMMARYcont’d Maintenance of Warning Labels Electrical Hazard High Temperature Hazard Laser light Hazard Fig S-1 Warning labels on the Main unit standard version Pinch Fig S-2 Warning labels on the Display unit standard version Fig S-3 Warning labels on the Main unit Ansi style labels Fig S-3 Warning labels on the Display unit Ansi style labels Electric shock Beware of high Rotary Pump TemperatureBeware Electron Gun / Ion pump Baking Laser Light Third Party’s Industrial or Proprietary Rights Backup of Important DataWater Leakage Detection Cooling Water Do Not Change Computer Settings Third Party’s Application ProgramsProtection against Computer Viruses Power Failure Personal Computer PC Emergency Off Button Fig S- 5 Location of Emergency Off button Main Power Disconnect Power Supply and Grounding Connection Electron Gun Baking power supplyUnit power supply Ion Pump Fig S- 6 Location of safety interlock Safety Safety Fig S- 9 Gravity location of Main unit Type1 Fig S- 10 Gravity location of Main unit Type2 Fig S- 11 Gravity location of Display unit Fig S- 12 An example of the water-leakage detector Precautions on Handling Precaution General Precautions Others Flashing Status Transition of Adsorbed Gas Molecules on Cathode Tip Precaution Magnification Electron Optics Specimen Stage Display Unit Evacuation System Protection Devices Power Requirements Physical DimensionsInstallation Environment Oscillation Allowable Amplitude X, Y ∝m Peak to PeakOscillation Allowable Amplitude Z Water Supply and Drain Model S-4800 Field Emission Scanning Electron Microscope Table of Contents Cont’d Functions Table of Contents Cont’d Maintenance Replacement Parts Installation Requirements General Room Temperature and Humidity Line Power Requirement Grounding Stray Magnetic Field Vibration Allowable Amplitude X, Y Floor VibrationAllowable Vibration Vibration Allowable Amplitude Z Vibration Transmittance Frequency Characteristics Power Line Noise and Electric Field Noise External Noise Sources Disturbance by Sound Waves Site Requirements Installation Layout example Wiring Materials or Instruments to be prepared by User Power and Ground Wirings Connection of the step down transformer 100/200V Safety circuit Functions Control Knobs and Switches on Main Unit Main unit Column S-4800 Main Unit type Sectional View of S-4800 Column Specimen Stage type Large Specimen Stage type Specimen exchange device Evacuating System 8a Evacuation Control Panel 8a Display / Operation area IP1 Page Page Control Knobs and Switches on Display Unit Shows the display unit PC power switch 10 PC Panel 12 Mouse Initially following users are set when sipped Administrator Administrator level, no password4800 Power user level, no password 15 S-4800 Loin dialog window 2 S-4800 SEM Main Window 16 S-4800 Main windowPage Page Direct Save MenuOpen SEM Data Manager Opens the SEM Data Manager window Direct Photo Condition Load Mag ModeColumn Condition Save Capture Split DM ModeRun Freeze Capture Reso Optional Setup General Optional SetupOptional Setup Stage Login Setting Maintenance ECO mode setting 18 Control panel HV control block Control PanelFunctional blocks on the Control Panel Vacc select Intensity Execute button Scan control block Auto control Monitoring function Align Magnification control Image recording Capture buttonPage Extension for Dual screen mode 19 Control Panel Dual screen mode Run / Freeze buttons Operation Panel 20 Operation panel Signal Select block OPE Condition block Scan Mode block 6.3 R.ROTATION block Scan Size block Data Entry block Sharpen Signal Processing blockSmooth Edge Enhance Tilt Compensation block Color Mixing block Scroll bar and area marker block Other optional function block Arrangement of control blocks Exchanging mouse control functions 21 Mouse Focus/stigma/contrast/brightness adjustmentMouse operation on the scanning image 22 Mouse control Focus/stigma/contrast/brightnessPage Setup dialog window Stage and image shift tools23 Mouse control stage Column tab Page Image tab 5Embed into Image checkbox Record tab1Auto Data Display 1Memory Photo 1Film Speed 8.4 OP. Cond tab 24 Condition Load/Save Captured Image Window SEM Data Manager Window Reset buttonReset All button Alignment Dialog Window Comm Port Selects one of communication ports Speed Password Setting Dialog Window Oblique Dialog Window Opt Signal Processing Dialog Window Save Image Dialog WindowSplit/Dual Mag Controller Using Short-Cut Keys Operation Display Power Preliminary Operation Check of Column Vacuum Flow the cooling water Starting the Display Use of Anti-Contamination Trap Specimen Setting and Specimen Exchange Specimen Preparation for Materials Adjustment of Specimen Height Specimen Exchange Position How to Set Specimen Extracting specimen from stagePage Setting a specimen Opening the specimen exchange chamber doorTurn the knob clockwise so as the Unlock mark comes upwards Flashing Procedure Flashing About flashing Setting of Accelerating Voltage and Emission Current Accelerating VoltageEmission Current Application of High Voltage Optimizing the Electron Beam Selecting a Magnification Mode High Mag modeSelecting Electron Optical Column Condition Objective lens Specimen Low Mag mode area Page Low Mag Mode Column Alignment Operation Circular image Adjust Page WD mm Lowest magnification High Mag Mode Operation for Image Observation SE detector BSE-H General Characteristic of signals utilized in S-4800 Signal ControlPage Selecting Magnification Selecting Scanning Speed Slow 4 38 sec/frameFull screen Image Brightness and Contrast Adjustment Page Page Focus and Astigmatism Correction Page Defocusedfocused Operation of the Specimen Stage Type I Manual Stage Movable range and specimen exchange positionMovable range limitation of X, Y and R axes Tilt and Z axes limitation 6.4 3 axes motorized stage Type1 stage option Movable range of X and Y directions 3 axes motorized stage Stage Locking Coordinate notation Movable range and specimen exchange position Setting specimen size and detectors in use Specimen block Valious operation for specimen stage Stage tab 7.6 X, Y, R axes operation Upper button Ball Lower button Tilt axes operation Page Stage mouse operation on the scanning image Page Page Page Page Adjust tool Position memory function Stage History function Image Navigation Page Rotation Assist function 35､-55 75,-55 62.5,0 35,0 50,10 -34,10 35,55 75,55 Rotation / tilt eucentric function and calibration Calibration Following calibration commands are provided Page Page Page Stage lock Stopping stage and Returning to previous stage position Moveable range and limitation by optional detectors XY movable range for various specimen size Φ75 specimen Allowable plus Tilting angle for various specimen size Allowable minus Tilting angle Saving and Recording Images Preparing Images for Recording Setting Conditions for Image Capturing Image Capturing Saving a Scanning Image Direct Save Manager Saving Captured Images Taking Photographs OptionPage Photographing saved images Using SEM Data Manager Setting the Stage at the Specimen Exchange Position Turning High Voltage OffTaking Out a Specimen Page Closing Windows and Shutting the Display Power Using Other Functions Screen ModePage Split Screen and Dual Mag Mode Signal Selection and Color Mixing Page Ray Analysis Mode Drag the cursor with the mouse Signal Processing Page Operating Condition Memory Page Pseudo Color Display Data Entry FunctionPage Show Raster Rotation, Dynamic Focus and Tilt Compensation Page Printing images using Report generation function 100 Copy Image information text Oblique Image Optional setting 104 Setting Login Name 106 Image Quality Accelerating Voltage and Image Quality Condenser Lens Setting and Image Quality Objective Lens Aperture Size and Image Quality Mechanical Column Alignment Preparative Operation for Alignment Mechanical Alignment of the Electron Gun Alignment of the Beam Monitor Aperture Alignment of the Objective Lens Aperture Mechanical Alignment of the First Condenser LensMechanical Alignment of the Second Condenser Lens Stigma Alignment electro-magnetic alignment Aperture Alignment electro-magnetic alignment 113 Precaution About SEM Data Manager Functions 3.12.2.1 Image Database Menu and tool buttons 117 118 Operation Registering Images on SEM Data Manager Database Selecting User name and opening data tree 121 Image information Viewer displayData Entry 123 124 Contrast Conversion → → 127 Image Processing Color Mixing 130 Printing images Image file operation 132 133 Optimizing and repairing database file Slide show Maintenance Replacement and Cleaning of Objective Lens Aperture Objective Lens Aperture unit Cleaning of Aperture Plates Baking of Aperture Plate Oil Change Replacement of Oil Mist Trap Troubleshooting Symptom Cause Countermeasure Checkup and Maintenance Page Troubleshooting of Air Compressor Symptom Probable Cause Remedy Location and Functions of Major Components Troubleshooting When Column Evacuation does not Work When Specimen Exchange Chamber Vacuum is not Good When Specimen Chamber Vacuum is not Good When Ion Pump Vacuum Degraded When Emission Current is not Set at Normal Value When Image is not Shown on Screen When Image is Very Noisy When You cannot Correct Astigmatism When Auto Focus or Auto Stigma does not Work Satisfactorily When S-4800 control program does not start up When PC has Hanged up When Error Messages are shown Operation for shutting down all power supply of S-4800Operation when power was shut down by power line failure Operation for Starting S-4800 Operation when power line failure recovered Operation when Water supply stopped by failure Gun Baking operation Beware of high Temperature Page Beware of high Temperature Page Consumables and Spare Parts Consumables Replacement Parts Part Name Use Expiration Spare Parts Part Name Location ’ty Used Configuration Model S-5080 Auto-Camera option Configurations of Various Film Holder Units Option Specifications Remarks Model S-5080 Auto-Camera option Assembling the Camera 4″ × 5″ Film Magnification Operation Aperture for Each Kind of Film Installation Manual for the SEC Guide Rail for Installer Index PRECAUTION-7, PRECAUTION-9, PRECAUTION-11 Edit menu Copy Attribute command 21, 3-101 PRECAUTION-8, PRECAUTION-11 PCI PRECAUTION-10 Transfer 2-21, 2-31, 2-48, 3-72

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