Replacement Parts, Part Name Use Expiration

5.1.2Replacement Parts

The items below should be prepared in the necessary quantities.

Table 5-2 Replacement Parts

Part No.	Part Name	Use	Expiration
J386012	Photo multiplier R268	Secondary electron detector	5 years

580-4289	FE tip	Electron gun	2 years

539-1561	Pulse motor(X,Y)	Type2 stage	4 years
539-1562	Pulse motor(T,Z)	Type2 stage	4 years
539-1563	Mini motor R	Type2 stage	2 years
539-1564	Encoder R	Type2 stage	3 years
533-0286	Scintillator	For lower detector	3 years

589-3565	Scintillator	For upper detector	3 years

－	RP oil (SMR-100)	For rotary pump (1 L)	0.5 years

589-8652	Oil mist trap	RP	0.5 years

K433004	Pirani gauge bulb	Evacuation system	3 years

	Rubber tube for evacuation	Evacuation system	5 years

	Air tube	Evacuation system	3 years

	Vinyl hose for cooling water	Objective lens cooling	5 years

	PC monitor	PC	5 years

	Hard disk	PC	3 years

	Keyboard	PC	3 years

	Mouse	PC	2 years

	Battery for PC	PC	2 years

K429012	Rotary encoder	Manual operation panel (Mag.)	3 years
K429013	Rotary encoder	Manual operation panel (others)	5 years

NOTE : The Expiration column indicates the approximate lifetime of the part, and not the guaranteed period.

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