3.5.7.6X, Y, R axes operation

(1) Manual operation using trackball

Stage moves to the direction of rotating trackball.

Upper button

Ball

Lower button

Amount of stage motion by ball rotation is linked with magnification. To move long distance, it is advisable to lower the magnification.

When you rotate ball pressing down one of upper buttons, stage moves only to Y direction. And pressing down one og lower buttons, only to X direction.

Stage moving direction for ball rotation direction can be reversed. Check the Trackball / Joystick check box in the Reverse mode area of the Stage tab in the Optional setup dialog window. (Refer to <3.9.15 Optional Setting>)

(2)Entering Absolute or Relative Coordinates Value

For X and Y axes, enter absolute coordinates for X and Y axes to XY Display / Input box and then, press ENTER key.

For R axis, both absolute and relative value can be used. Select Abs (absolute) or Rel (relative) with Abs / Rel select buttons, and enter coordinate value to R Display / Input box and then, click Go button. Range of R coordinate is 0 to 360 for absolute and –180 to +180 for relative value.

When the Rotation eucentric check box is checked, also X and Y axes moves so as the present field of view is kept after after the stage is rotated.

(3) Continuous rotation (R axis)

 

 

The R axis is driven with the Rotation. Press

or

button to drive the R axis

continuously or click the buttons to drive stepwise.

 

 

A driving speed can be selected using the Speed slider in four steps.

(4) Mouse operation on the scanning image

All 5 axes operation by using mouse is available.

Refer to <3.5.7.8 Stage mouse operation on the scanning image>

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Hitachi S-4800 manual 7.6 X, Y, R axes operation, Upper button Ball Lower button