Hitachi S-4800 manual 35、-55 75,-55 62.5,0 35,0 50,10 -34,10 35,55 75,55

Models: S-4800

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5 inches sample

Stage movable area

 

(0,62.5)

(-35-55)

(75,-55)

(-62.5,0)

(-35,0)

AB

(-50,10) (-34,10)

Y

(62.5,0)

X

(0,0)

(-35,55)

(75,55)

(0,-62.5)

The gray area is not covered with X and Y movable range but can be observed with stage rotation. If the point A is specified by coordinate (X=50, Y=10) input, the following message will be shown.

Select a rotation angle and click OK. The stage will be rotated and X,Y axes are moved so as the specified point comes under the beam. If you click Cancel, stage will not move and input coordinate value is canceled.

When the point B where is within movable range but is very near (less than 2mm) to X axis limit is specified, the following recommendation message will be shown.

OK rotates the stage and move X and Y axes so as the specified point comes under the beam. Move without assist moves the stage without rotation.

(2) Using Assist button

When you click Assist button beside the Position display, one of following two message will

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Page 178
Image 178
Hitachi S-4800 manual 35、-55 75,-55 62.5,0 35,0 50,10 -34,10 35,55 75,55