Hitachi S-4800 manual 50

Table of Contents (Cont’d)

	3.9.8	Data Entry Function ................................................................................	3-94
	3.9.9	Raster Rotation, Dynamic Focus and Tilt Compensation .......................	3-97
	3.9.11	Printing images using Report generation function ..................................	3-99
	3.9.12	Copy Image ............................................................................................	3-101
	3.9.13	Copy Image information text...................................................................	3-101
	3.9.14	Oblique Image ........................................................................................	3-102
	3.9.15	Optional setting.......................................................................................	3-103
	3.9.16	Password Setting....................................................................................	3-105
	3.9.17	Setting Login Name ................................................................................	3-105
3.10	Image Quality........................................................................................................		3-107
	3.10.1	Accelerating Voltage and Image Quality.................................................	3-107
	3.10.2	Condenser Lens Setting and Image Quality ...........................................	3-108
	3.10.3	Objective Lens Aperture Size and Image Quality ...................................	3-108
3.11	Mechanical Column Alignment .............................................................................		3-109
	3.11.1	Preparative Operation for Alignment ......................................................	3-109
	3.11.2	Mechanical Alignment of the Electron Gun.............................................	3-110
	3.11.3	Alignment of the Beam Monitor Aperture................................................	3-110
	3.11.4	Alignment of the Objective Lens Aperture ..............................................	3-111
	3.11.5	Mechanical Alignment of the First Condenser Lens ...............................	3-111
	3.11.6	Mechanical Alignment of the Second Condenser Lens ..........................	3-111
	3.11.7	Stigma Alignment (electro-magnetic alignment) .....................................	3-112
	3.11.8	Aperture Alignment (electro-magnetic alignment) ..................................	3-112
3.12	Using SEM Data Manager ....................................................................................		3-114
	3.12.1	Precaution About SEM Data Manager....................................................	3-114
	3.12.2	Functions ................................................................................................	3-115
	3.12.3	Operation ................................................................................................	3-119
4. MAINTENANCE.............................................................................................................			4-1
4.1	Maintenance of Electron optical Column ..............................................................		4-1
	4.1.1	Maintaining Vacuum of Electron Gun and Intermediate Chamber .........	4-1
	4.1.2	Replacement and Cleaning of Objective Lens Aperture.........................	4-1
	4.1.3	Cleaning of Aperture Plates....................................................................	4-3
4.2	Maintenance of Rotary Pump ...............................................................................		4-5
	4.2.1	Oil Change..............................................................................................	4-5
	4.2.2	Replacement of Oil Mist Trap .................................................................	4-6
	4.2.3	Troubleshooting ......................................................................................	4-7
4.3	Maintenance of Air Compressor ...........................................................................		4-8
	4.3.1	Checkup and Maintenance .....................................................................	4-8
	4.3.2	Troubleshooting of Air Compressor ........................................................	4-10
	4.3.3	Location and Functions of Major Components .......................................	4-11

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