Hitachi S-4800 manual 6.4 3 axes motorized stage Type1 stage option

CAUTION

Set Z and T within the allowable range; otherwise, the specimen may strike the objective lens and cause damage to the specimen and objective lens.

Important

In case of φ 15mm and φ 25mm specimens, by applying limitation in X and Y directions written in page 3-40, the figure for 3 axes motorized stage (shown below) can be used. For avoiding damage of specimen and objective lens, be careful not to exceed limits of each axis.

3.5.6.43 axes motorized stage (Type1 stage option)

This is motorized control of type 1 stage in X, Y, R directions. Figure of relationship between allowable tilting angle for various Z position is shown below. For details of this option, refer to the manual of 3 axes motorized stage.

70
			φ15mm
				φ25mm
60
						φ50mm
						φ75mm
						φ100mm
50						φ125mm
						φ150mm
40
T (deg)
30
20
10
0
0	5	10	15	20	25	30

Z(mm)

3 - 39