objective lens by clicking the DeGauss button in the Column tab.
Precise Aperture Alignment is difficult at low magnifications of 10,000 times or lower. After coarse alignment at low magnifications, do fine alignment at high magnifications of a few ten thousand times. It is important to adjust the focus optimally in order to carry out precise aperture alignment.
NOTE: | You can bring Aperture Alignment mode directly by clicking the Align | button on |
| the Control Panel. |
|
(3) Stigma Alignment X, Y
Stigma Alignment is necessary to minimize image drift seen when correcting the astigmatism.
(a)Set the magnification to about 5,000× and position a point of interest in the center of the display.
(b)Focus the image and correct astigmatism.
(c)Click Stigma Align X button in the Alignment dialog window and make adjustments so that the wobbling motion of the image is minimized.
(d)Click the Stigma Align Y button in the Alignment dialog window and repeat the same adjustment as above (c).
(e)Turn off the Stigma Align mode (click Off button in the Alignment dialog window).
NOTICE: Stigma Alignment may cause
Repeat Aperture Alignment again after completing Stigma Alignment (X/Y). Stigma Alignment does not change by Aperture Alignment.
(4) Adjustment of Low Mag Position
The
Low Mag Position adjustment is necessary to minimize a shift in the field of view for the two magnification modes. Perform the following procedure to keep the area of interest centered when going between Low Mag and High Mag modes.
(a)In High Mag mode, go to the minimum magnification allowable and place a point of interest in the center of the display. It is recommended to display the cross hair cursor by checking the Area Marker box on the Operation panel.
(b)Go to Low Mag mode by clicking H/L button in the magnification display area.
(c)Focus the image and correct astigmatism.
(d)Click the Low Mag Position button in the Alignment dialog window and make adjustments so that the point of interest on the specimen is in the center of the display (drag the mouse holding down the left button in the Alignment operation area, or adjust STIGMA/ALIGNMENT knobs on the operation panel).
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