Hitachi S-4800 manual Operation of the Specimen Stage Type I Manual Stage

3.5.6Operation of the Specimen Stage (Type I - Manual Stage)

The S-4800 type I SEM provides a 5-axis manual stage.

3.5.6.1 Movable range and specimen exchange position

The following table shows movable range and specimen exchange position.

	Movable Range	Exchange position
X	0 to 50 mm	25.0 mm
Y	0 to 50 mm	25.0 mm
R	0 to 360°	0°
T	-5 to 70°	0°
Z	1.5 to 30 mm	8.0 mm

3.5.6.2 Movable range limitation of X, Y and R axes

(1)When no optional detector is in its operation position, no limitation for a specimen smaller then 5 inches diameter.

For 6 inches diameter, 100mm square and 125mm square, X axis range has no limitation and Y axis range is limited as

・6mm ≦ Y ≦ 50mm.

(2)When the YAG type BSE detector has been inserted to its operating position, limit X axis range as follows.

・smaller than 4 inches diameter : no limitation

・5 inches diameter : 2mm ≦ X ≦ 50mm

・6 inches diameter : 15mm ≦ X ≦ 50mm

・100mm square : 15mm ≦ X ≦ 50mm

・125mm square : 15mm≦ X ≦ 50mm

(3)For 125mm square specimen, Use rotation angle of 0,90,180 and 270 deg. only.

And rotate R axis only at X=Y=25mm (center position). If rotate specimen at other X,Y position, specimen may hit the detector.

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