3.5.6Operation of the Specimen Stage (Type I - Manual Stage)
The
3.5.6.1 Movable range and specimen exchange position
The following table shows movable range and specimen exchange position.
| Movable Range | Exchange position |
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|
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X | 0 to 50 mm | 25.0 mm |
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|
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Y | 0 to 50 mm | 25.0 mm |
|
|
|
R | 0 to 360° | 0° |
|
|
|
T | 0° | |
|
|
|
Z | 1.5 to 30 mm | 8.0 mm |
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|
|
3.5.6.2 Movable range limitation of X, Y and R axes
(1)When no optional detector is in its operation position, no limitation for a specimen smaller then 5 inches diameter.
For 6 inches diameter, 100mm square and 125mm square, X axis range has no limitation and Y axis range is limited as
・6mm ≦ Y ≦ 50mm.
(2)When the YAG type BSE detector has been inserted to its operating position, limit X axis range as follows.
・smaller than 4 inches diameter : no limitation
・5 inches diameter : 2mm ≦ X ≦ 50mm
・6 inches diameter : 15mm ≦ X ≦ 50mm
・100mm square : 15mm ≦ X ≦ 50mm
・125mm square : 15mm≦ X ≦ 50mm
(3)For 125mm square specimen, Use rotation angle of 0,90,180 and 270 deg. only.
And rotate R axis only at X=Y=25mm (center position). If rotate specimen at other X,Y position, specimen may hit the detector.
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