Hitachi S-4800 manual Operation when power line failure recovered

Set the APT HEATER switch to AUTO.

(6)For ion pumps vacuum recovery, usually half to one day is necessary. (it is shorter when short period power down)

Check ion pump vacuum after waiting above time. If it is degraded than the following value, gun baking operation is necessary.

IP1 : 2 × 10-7 Pa

IP2 : 2 × 10-6 Pa

IP3 : 5 × 10-5 Pa

(7)After recovery of ion pump and specimen chamber vacuum you may start image observation. Supply cooling water or start water circulator before starting Display power.

If the water circulator is linked with SEM power, it will be started when the Display power turned ON.

4.8Operation when power line failure recovered

Use the same steps as above 4.6.

4.9Operation when Water supply stopped by failure

When cooling water stops while the Display power is ON, E-12 error will be shown on the evacuation control panel and buzzer sounds.

Close S-4800 control program. If water recovery needs long tome, also shut down PC and turn the Display power off. He error and buzzer will be terminated.

No operation is necessary for evacuation system.

You may start operation when water supply is recovered.

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