(5) Position display
The size of specimen, its present position and rotation angle are displayed on the XYR position monitor area.
The white circle shows specimen, blue rectangle movable area, red cross observing point, gray straight line rotation angle and green rectangle beam scanning direction.
Followings are 5 inches sample examples.
The scales at the left and below show coordinate values of beam irradiation point when the sample is at the center and moved to each end of indication area.
Sample coordinate | Stage coordinate |
3.5.7.7Z and Tilt axes operation
(1) Priority of Z or Tilt axis
The movable range of the Z and Tilt axes is limited by all other axes conditions. Maximum tilt angle is limited to 4° when the Z is 2.5 mm, or minimum the Z is limited to 22 mm when the tilt angle is 60°.
The Priority button selects which axis has priority when moving the stage (available with non- continuous movement).
When
This priority selection is available only when the Continuous checkbox is off.
For example when 45° tilt is necessary, first select Tilt of the Priority buttons and set Tilt scrollber to 45. The blue indication above the Z scrollbar shows allowable range of Z axis for 45° tilt angle. Specify Z value within the range.
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