5.REPLACEMENT PARTS

5.1Consumables and Spare Parts

5.1.1Consumables

The items shown in Table 5-1 should always be on hand for normal operation.

 

Table 5-1

Consumables

 

 

 

 

 

 

Part No.

Part Name

 

Use

Remarks

G370009

Conductive paint

 

For protection against chargeup

30 g

 

 

 

 

 

G370250

Metal polishing paste

 

For cleaning parts

50 g

 

 

 

 

 

G743002

Bamboo stick

 

For cleaning parts

10 pcs

 

 

 

 

 

S370061

Absorbent cotton

 

For cleaning parts

 

 

 

 

 

 

S370057

Gauze

 

For cleaning parts

 

 

 

 

 

 

S269003

Aluminum foil

 

For cleaning parts

 

 

 

 

 

 

585-4267

Vacuum grease (in tube)

 

For vacuum seal (stationary part)

 

 

 

 

 

 

537-2320

Objective lens aperture plate

 

(0.03, 0.05, 0.05, 0.1 mm dia.)

 

 

 

 

 

 

 

Acetone

 

For cleaning

 

 

 

 

 

 

533-1337

Molybdenum board

 

For baking aperture plate

 

 

 

 

 

 

S263001

Polyethylene gloves

 

For handling parts

 

 

 

 

 

 

L474074

AIR Filter

 

Valve open and close

 

 

 

 

 

 

45891500

Cooling water Filter

 

DP/OBJ Cooling

 

 

 

 

 

 

5 - 1

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Hitachi S-4800 manual Consumables and Spare Parts
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