Other Relevant Precautions

•Water Leakage Detection

A water-leakage detector is not provided with this equipment. Water leakage may be caused by corrosion and cracks along the water flow system developed by changes in cooling-water quality and pressure. If a cooling-water circulating system is not installed, you should install a water-supply kit; the water-supply kit is provided with a pressure- reducing valve and a water-leakage sensor, preventing an accident of water pooling.

•Third Party’s Industrial or Proprietary Rights

Hitachi shall not be responsible for a third party’s claim regarding infringement of any patent rights or industrial properties with respect either to products manufactured through the use of equipment supplied by Hitachi or its related companies or to applications of the Hitachi equipment.

•Cooling Water

(a)You can use city water of which chlorine concentration is less than 0.5 ppm for cooling water. If the chlorine concentration is higher, use a cooling-water circulating system to prevent water-leakage due to corrosion of the water flow system.

(b)Necessary flow rate of the cooling water is about 1.5 L/min.

(c)Use a pipe taper-thread to fix the hose to the water faucet.

(d)Be sure to secure the drain hose to the drainage. Loose drain hose can be responsible for a water pool.

(e)Close the supply valve of the cooling water when not in use.

(f)Soft polyvinyl chloride is used for the supply and drain hoses. These hoses may become hardened and less flexible after a long period of time. Therefore, regular replacement is recommended, and be sure to check against water leakage before use.

(g)If you anticipate the cooling water to freeze in winter, use antifreeze on a cooling- water circulating system.

(h)Cooling water temperature should be controlled so it is not more than 7 °C below the room temperature. If the temperature difference is greater than this, condensation may form along the cooling water flow path. And long use under this condition may cause rusting of the important cooled parts such as objective lens magnetic path and eventually result in damage to them, whereby the complete set of objective lens will require replacement. It is thus recommended to use a closed water circulator and maintain a suitable water temperature.

•Backup of Important Data

Trouble-free operation cannot be guaranteed for the computer system. You are recommended to copy important data on the hard disk into floppy disks (FD) or magneto- optical disks (MO) at a regular interval.

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