Other Relevant Precautions
•Water Leakage Detection
A
•Third Party’s Industrial or Proprietary Rights
Hitachi shall not be responsible for a third party’s claim regarding infringement of any patent rights or industrial properties with respect either to products manufactured through the use of equipment supplied by Hitachi or its related companies or to applications of the Hitachi equipment.
•Cooling Water
(a)You can use city water of which chlorine concentration is less than 0.5 ppm for cooling water. If the chlorine concentration is higher, use a
(b)Necessary flow rate of the cooling water is about 1.5 L/min.
(c)Use a pipe
(d)Be sure to secure the drain hose to the drainage. Loose drain hose can be responsible for a water pool.
(e)Close the supply valve of the cooling water when not in use.
(f)Soft polyvinyl chloride is used for the supply and drain hoses. These hoses may become hardened and less flexible after a long period of time. Therefore, regular replacement is recommended, and be sure to check against water leakage before use.
(g)If you anticipate the cooling water to freeze in winter, use antifreeze on a cooling- water circulating system.
(h)Cooling water temperature should be controlled so it is not more than 7 °C below the room temperature. If the temperature difference is greater than this, condensation may form along the cooling water flow path. And long use under this condition may cause rusting of the important cooled parts such as objective lens magnetic path and eventually result in damage to them, whereby the complete set of objective lens will require replacement. It is thus recommended to use a closed water circulator and maintain a suitable water temperature.
•Backup of Important Data
SAFETY - 12