Hitachi S-4800 NOTICE:

NOTICE:

1.Information contained in this document is subject to change without notice for improvement.

No part of this manual may be reproduced, transmitted or disclosed to a third party in any form or by any means without the express written permission of Hitachi High-Technologies Corporation.

3.Hitachi High-Technologies Corporation assumes no liability for any direct, indirect, or consequential damages arising from use not described in this manual.

Utmost care must be exercised when using the instrument.

4.This document does not provide any warranty or permission for industrial properties or any rights to grant license lawfully and without infringement.

Contents

Please read through this manual carefully before using the instrument NOTICE: APPLICATION CAUTION Page Period of Guarantee Details of Guarantee Exclusions from Guarantee Limitations on Guarantee Installation After-salesService Available Training Programs Handling of Chemicals Instruction Manual General Safety Guidelines DANGER WARNING NOTICE Maintenance of Warning Labels Warning Labels Electrical Hazard High Temperature Hazard Magnetic Field Hazard Laser light Hazard Page Pinch Fig S-3Warning labels on the Main unit (ANSI style labels) Fig S-3Warning labels on the Display unit (ANSI style labels) Beware of electric shock Electron Gun / Ion pump Baking Beware of high Rotary Pump Laser Light •Water Leakage Detection •Third Party’s Industrial or Proprietary Rights •Cooling Water •Backup of Important Data •Third Party’s Application Programs •Protection against Computer Viruses •Do Not Change Computer Settings •OS operation during S-4800SEM operation •Power Failure •Personal Computer (PC) Alt, Ctrl Delete Emergency Off Button Fig S- 5 Location of Emergency Off button NOTE Main Power Disconnect Power Supply and Grounding Connection INTERLOCK Electron Gun Ion Pump Other High Voltages Baking power supply Page Page Page Page Page Fig S- 11 Gravity location of Display unit Page 1.PRECAUTIONS FOR TRANSPORT 2.PRECAUTIONS FOR POWER CONNECTION Page EVAC POWER DISPLAY POWER EMERGENCY 3.GENERAL PRECAUTIONS 4.MEASURES FOR EMERGENCY 5.CAUTIONS ON OPERATION HV OFF 6.OTHERS 7.FLASHING Fig. 1 Principle of Field Emission Gun Fig. 2 Change of Emission Current with Time Fig. 3 Status Transition of Adsorbed Gas Molecules on Cathode Tip Execute ‘2’ HV ON ‘3’ 1. Resolution: 2. Magnification: 3.Electron Optics: 4.Specimen Stage 5.Display Unit 6.Evacuation System 7.Protection Devices 1.Power Requirements 2.Physical Dimensions 3.Installation Environment Oscillation Allowable Amplitude (X, Y) Allowable Amplitude (Z) Frequency : f (Hz) Allowable Noise Level（Type I） 4.Water Supply and Drain Table of Contents Table of Contents (Cont’d) PRECAUTIONS ON HANDLING PRECAUTION-1 Precautions for Transport Precautions for Power Connection Page Page Page Page 1.1Installation Requirements 1.1.1General 1.1.2Room Temperature and Humidity 1.1.3Line Power Requirement 1.1.4Grounding 1.1.5Water Supply and Drain 1.1.6Stray Magnetic Field 1.1.7Floor Vibration Table 1-2Allowable Vibration Vibration Fig. 1-1Vibration Transmittance - Frequency Characteristics 1.1.8Power Line Noise and Electric Field Noise Table 1-3External Noise Sources 1.1.9Disturbance by Sound Waves 1.1.10 Site Requirements 1.1.10Site requirements Floor loading capability (kg / m2 ) Total mass of equipment (kg) Fig. 1-2Installation Layout example 1.2Materials or Instruments to be prepared by User See Table Table 1-4Materials or Instruments to be Prepared by User Name Quantity 1.3.1Power and Ground Wirings Fig 1-3Connection of the step down transformer Fig 1-4Connection of the step down transformer Fig 1-5Connection of the step down transformer Fig. 2-1aModel S-4800System (type 1) Fig. 2-1bModel S-4800System (type 2) 2.1Control Knobs and Switches on Main Unit 2.1.1Main unit (Column) Fig. 2-2shows the appearance of the S-4800main unit (type I) Fig. 2-2 S-4800Main Unit (type 1) Fig. 2-3sketches the sectional view of the S-4800column Fig. 2-3Sectional View of S-4800Column Fig. 2-4Specimen Stage (type I) Fig. 2-5Large Specimen Stage (type II) Fig. 2-6specimen exchange device Fig. 2-7Evacuating System Fig. 2-8aEvacuation Control Panel Fig. 2-8aDisplay / Operation area Page Page Page 2.2Control Knobs and Switches on Display Unit 2.2.1Display Fig. 2-9Display Unit Fig. 2-10PC Panel Fig. 2-11Manual operation Panel Fig. 2-12Mouse Fig. 2-13Manual operation Panel 2.3Graphical User Interface (GUI) 2.3.1Starting the PC and logging in the S-4800program Administrator : Power User Fig. 2-14example of Windows desktop Fig. 2-15 S-4800Loin dialog window 2.3.2S-4800SEM Main Window Fig. 2-16 S-4700Operation Window Fig 2-16 S-4800Main window Fig 2-17 S-4800Main window (Small and Dual screen mode) 2.3.3Control arrangement on the window Page 2.3.4Menu File •Open SEM Data Manager Opens the SEM Data Manager window • Direct Save Save • Column Column • Condition Load Op. Cond • Condition Save Scan • Run (Freeze) • Capture • Capture Reso • Split DM Mode Option •Optional Setup Op. Panel Setting Toolbar Setting - Stage Help • Maintenance ECO mode setting • Index Show the index of S-4800Help 2.3.5Control Panel 2.3.5.1Functional blocks on the Control Panel Fig 2-18Control panel 2.3.5.2HV control block • Vacc select (3) Flashing controller 2.3.5.3Scan control block 2.3.5.4Auto control 2.3.5.5Monitoring function (1) Align 2.3.5.6Magnification control 2.3.5.7Image recording (1) Capture button (2) Layout Print Report Generation SEM Data Manager Direct Photo Memory Photo: 2.3.5.9Extension for Dual screen mode Fig 2-19Control Panel (Dual screen mode) (1) Run / Freeze buttons 2.3.6Operation Panel Fig 2-20Operation panel 2.3.6.1SIGNAL SELECT block 2.3.6.2OPE CONDITION block 2.3.6.3R.ROTATION block 2.3.6.4SCAN MODE block 2.3.6.5SCAN SIZE block 2.3.6.6DATA ENTRY block 2.3.6.7SIGNAL PROCESSING block • Smooth : • Sharpen : • Edge Enhance : • Invert : 2.3.6.8TILT COMPENSATION block 2.3.6.9COLOR MIXING block 2.3.6.10Scroll bar and area marker block 2.3.6.11Scroll bar and area marker block 2.3.6.12Other optional function block 2.3.6.13Arrangement of control blocks 2.3.7Mouse operation on the scanning image 2.3.7.1.Exchanging mouse control functions S button Fig 20-21Mouse 2.3.7.2Focus/stigma/contrast/brightness adjustment Page 2.3.7.3Stage and image shift tools Fig 2-23Mouse control (stage) 2.3.8Setup dialog window 2.3.8.1 Column tab Page 2.3.8.2 Image tab 2.3.8.3 Record tab (1-1) Auto Data Display Data Number (1-5) Embed into Image checkbox For Photograph is checked (4-1) Film Speed 2.3.8.4OP. Cond tab Fig 2-24Condition Load/Save 2.3.9Captured Image Window Captured images are displayed as thumbnails on this window Fig 2-25Captured Image window Delete button : Deletes the selected image View button : Open the selected image on the viewer window 2.3.10SEM Data Manager Window 2.3.11Alignment Dialog Window Fig 2-26Alignment window Off Aperture Align button 2.3.12CD Measurement dialog window (option) 2.3.13Comm Port Setting Dialog Window Comm Port Setting Comm Port Speed 2.3.15Oblique Dialog Window Oblique 2.3.16Password Setting Dialog Window Password Setting 2.3.17Save Image Dialog Window 2.3.18Opt Signal Processing Dialog Window 2.3.19Split/Dual Mag Controller Split DM 2.3.20Using Short-CutKeys Alt Direct Save arrow Enter 3.1Preliminary Operation 3.2Specimen Setting 3.3Application of High Voltage 3.4Optimizing the Electron Beam 3.5Operation for Image Observation Page 3.1Preliminary Operation 3.1.1Check of Column Vacuum IP1 IP2 IP3 3.1.2Flow the cooling water 3.1.3Starting the Display DISPLAY 3.1.4Use of Anti-ContaminationTrap 3.2Specimen Setting and Specimen Exchange 3.2.1Cautions on Specimen Preparation 3.2.2Specimen Preparation for Materials stage lock EXC Stop 3.2.5How to Set Specimen 3.2.5.1 Extracting specimen from stage Page 3.2.5.2Opening the specimen exchange chamber door 3.2.5.3 Setting a specimen Turn the knob clockwise so as the Unlock mark comes upwards 3.3Application of High Voltage 3.3.1Condition where the gun high voltage is applicable 3.3.2Flashing 3.3.2.1 About flashing 3.3.2.2Flashing Procedure 3.3.3Setting of Accelerating Voltage and Emission Current Vacc Set Ie to Accelerating VoltageEmission Current 3.3.4Application of High Voltage SET 3.4Optimizing the Electron Beam 3.4.1Selecting a Magnification Mode 3.4.2Selecting Electron Optical Column Condition 3.4.2.1 High Mag mode Page Page NOTES ABCC Link Column Tab manner 3.4.3Column Alignment Operation STIGMA/ALIGNMENT Aperture Align DeGauss NOTE: Stigma Align Stigma Align Y Area Marker Page 3.5Operation for Image Observation 3.5.1SE detector U/D Variable 3.5.1.1Secondary and backscattered signals and their Characteristics General Characteristic of signals utilized in S-4800 3.5.1.2Signal Control H.A 3.5.2Selecting Magnification Preset Preset Magnification 3.5.3Selecting Scanning Speed Run/Freeze Scanning Image Page 3.5.4Image Brightness and Contrast Adjustment control panel ABCC Adjust Beam Monitor Signal Scroll Bar BC Monitor Cancel BC Monitor mode Scanning Speed Page 3.5.5Focus and Astigmatism Correction Auto Focus Auto Stigma Page 3.5.6Operation of the Specimen Stage (Type I - Manual Stage) 3.5.6.1 Movable range and specimen exchange position 3.5.6.2 Movable range limitation of X, Y and R axes 3.5.6.3 Tilt and Z axes limitation Important 3.5.6.43 axes motorized stage (Type1 stage option) Movable range of X and Y directions (3 axes motorized stage) 3.5.6.5Stage Locking 3.5.7Operation of the Specimen Stage (Type 2 - 5-AxisMotorized Stage) 3.5.7.1 Coordinate notation 3.5.7.2 Movable range and specimen exchange position 3.5.7.3 Setting specimen size and detectors in use Set Sample Size/Detector Set HOME 3.5.7.4Valious operation for specimen stage 3.5.7.5Stage tab Basically use the Stage tab of the operation panel for stage operation 3.5.7.6X, Y, R axes operation XY Display / Input Abs / Rel select R Display / Input Rotation eucentric 3.5.7.7Z and Tilt axes operation Priority Tilt Continuous Page 3.5.7.8 Stage mouse operation on the scanning image Page Page Page Page Page 3.5.7.9 Position memory function Get Position Comment Rel Get 3.5.7.10 Stage History function 3.5.7.11Image Navigation Page 3.5.7.12 Rotation Assist function Page 3.5.7.13 Rotation / tilt eucentric function and calibration Page Stage tilt calibration Page Page 3.5.7.14 Stage lock Lock Release 3.5.7.15Stopping stage and Returning to previous stage position 3.5.7.16Moveable range and limitation by optional detectors Fig 3-1XY movable range for various specimen size Page 3.6Saving and Recording Images 3.6.1Saving and Recording Images 3.6.2Preparing Images for Recording Embed Into Image Data Display Record For Photograph 3.6.3Setting Conditions for Image Capturing 3.6.4Image Capturing 3.6.5Saving a Scanning Image (Direct Save) Image Type Save Option Quick Save All Save 3.6.6Saving Captured Images Save Image 3.6.7Taking Photographs (Option) sensitive specimens, or to shorten recording Memory Photo (c)Photographing saved images SEM Data Manager 3.7Using SEM Data Manager 3.8At the End of Daily Use 3.8.1Turning High Voltage Off 3.8.2Setting the Stage at the Specimen Exchange Position 3.8.3.Taking Out a Specimen Important: 3.8.4Closing Windows and Shutting the Display Power CAUTION: 3.9Using Other Functions 3.9.1Screen Mode Signal Select 3.9.2Split Screen and Dual Mag Mode Split DM Mode Split/Dual Mag 3.9.3 Signal Selection and Color Mixing Record A/B 3.9.4 X-rayAnalysis Mode Back Ground Page 3.9.5Signal Processing Page 3.9.6Operating Condition Memory Page 3.9.7Pseudo Color Display 3.9.8Data Entry Function Shadow Page 3.9.9Raster Rotation, Dynamic Focus and Tilt Compensation R. Rotation WD-Rotation Link Dynamic Focus Tilt Compensation 3.9.11Printing images using Report generation function Page 3.9.12Copy Image 3.9.13Copy Image information text Copy Attribute 3.9.14Oblique Image 3.9.15Optional setting U/L SED Ratio Variable Stage Slow Fast 3.9.16Password Setting Old Password New Password Confirm Password New Login Name 3.10Image Quality 3.10.1Accelerating Voltage and Image Quality 3.10.2Condenser Lens Setting and Image Quality 3.10.3Objective Lens Aperture Size and Image Quality 3.11Mechanical Column Alignment 3.11.1Preparative Operation for Alignment 3.11.2Mechanical Alignment of the Electron Gun 3.11.3Alignment of the Beam Monitor Aperture 3.11.4Alignment of the Objective Lens Aperture 3.11.5Mechanical Alignment of the First Condenser Lens Cond Lens 3.11.6Mechanical Alignment of the Second Condenser Lens 3.11.7Stigma Alignment (electro-magneticalignment) 3.11.8Aperture Alignment (electro-magneticalignment) Beam Monit 3.12Using SEM Data Manager 3.12.1Precaution About SEM Data Manager Batch Process Remove List Add From File 3.12.2Functions 3.12.2.1 Image Database 3.12.2.2Menu and tool buttons Page Page 3.12.3 Operation 3.12.3.1 Registering Images on SEM Data Manager Database 3.12.3.2 Selecting User name and opening data tree 3.12.3.3Image display 3.12.3.4Image information 3.12.3.5Viewer display 3.12.3.6Data Entry Page Page 3.12.3.7Contrast Conversion Page Page 3.12.3.8Image Processing 3.12.3.9Color Mixing Page 3.12.3.10Printing images 3.12.3.11Image file operation Image Save Page Page 3.12.3.13Slide show Slide Show 3.12.3.14Optimizing and repairing database file 4.1Maintenance of Electron optical Column 4.1.1Maintaining Vacuum of Electron Gun and Intermediate Chamber 4.1.2Replacement and Cleaning of Objective Lens Aperture Fig. 4-1Objective Lens Aperture unit 4.1.3Cleaning of Aperture Plates Fig. 4-2Baking of Aperture Plate 4.2Maintenance of Rotary Pump （Only for P/N 539-9010and 539-9060） 4.2.1Oil Change NEOVAC MR-100 4.2.2Replacement of Oil Mist Trap 4.2.3 Troubleshooting Symptom Cause Countermeasure 4.3Maintenance of Air Compressor（Only for P/N 539-9010and 539-9060） 4.3.1Checkup and Maintenance Check the following items regularly Before checkup/maintenance, be sure turn the main switch off Service Cycle Page 4.3.2Troubleshooting of Air Compressor Probable Cause Remedy •When asking the service agent for repair, please notify them of the following 1. Model code 2. Symptom of trouble 3. Location of installation site 4.3.3Location and Functions of Major Components 4.4Troubleshooting 4.4.1When Column Evacuation does not Work 4.4.2When Specimen Exchange Chamber Vacuum is not Good 4.4.3When Specimen Chamber Vacuum is not Good 4.4.4When Ion Pump Vacuum Degraded 4.4.5When Emission Current is not Set at Normal Value 4.4.6When Image is not Shown on Screen 4.4.7When Image is Very Noisy 4.4.8When You cannot Correct Astigmatism 4.4.9When Auto Focus or Auto Stigma does not Work Satisfactorily 4.4.10When S-4800control program does not start up 4.4.11When PC has Hanged up 4.4.12When Error Messages are shown 4.5Operation for shutting down all power supply of S-4800 POFF OFF 4.6Operation when power was shut down by power line failure 4.7Operation for Starting S-4800 4.8Operation when power line failure recovered 4.9Operation when Water supply stopped by failure 4.10Gun Baking operation Page Page Page 4.11Caution on Maintenance 5.1Consumables and Spare Parts 5.1.1Consumables The items shown in Table 5-1should always be on hand for normal operation Table Part No 5.1.2Replacement Parts The items below should be prepared in the necessary quantities Table 5-2Replacement Parts Expiration 5.1.3Spare Parts 6.1Model S-5080 Auto-Camera(option) 6.1.1Configuration Fig. 6-1Model S-5080 Auto-Camera (Configuration for image ratios of 1:1 is shown.) Fig. 6-2Configurations of Various Film Holder Units (Option) 6.1.2Specifications REMARKS: Page 6.1.3Assembling the Camera Fig. 6-34″ ⋅ 5″ Film (Magnification of 1.0) Fig. 6-4Polaroid 107 Film (Magnification of 0.8) Fig. 6-5Roll Film 120 (Magnification of 0.6) 6.1.4Operation Table 6-2Aperture for Each Kind of Film Page INDEX 2-22, 2-25, 2-27, 2-28, 2-32, 2-46, 2-47 3-18, 3-19, 3-23, 3-25, 3-31, 3-32 1-3, 3-13, 3-107, PRECAUTION-11 2-10~2-12 INDEX 2-24, 3-62~3-66 2-23, 2-30, 2-32, 3-57, 3-58 3-72~3-75, 3-85 Color 2-38, 2-39, 3-74, 3-86, 3-87, 3-94, 3-114, 3-118 Copy Attribute command 3-110, 4-1, PRECAUTION-5, SAFETY-3 3-13, 4-14, PRECAUTION-5 2-21, 2-56, 3-75, 3-78, 3-82 3-99, 3-116, 3-125 2-22, 2-29 Image menu 3-44, 3-57~3-59 3-114, 3-118 3-107 2-23, 2-54 Operate menu ABCC command 2-22, 2-52, 3-31, 3-32, 3-34, 3-35, 3-92 2-35, 2-50, 3-92 2-21, 2-31, 2-51, 2-55, 3-75, 3-76 Scan menu 2-23, 2-55 2-21, 2-31, 2-38, 2-52, 2-56, 3-74~3-76, 3-78 3-79, 3-94, 3-114, 3-115, 3-117~3-120, 3-122 2-24 2-6, 2-21, 2-31, 2-48, 3-72 Troubleshooting 4-7, 4-10, 4-12, FOREWORD-2 WD