Hitachi S-4800 manual OPE Condition block

2.3.6.2OPE CONDITION block

Probe Current mode selection box

Focus mode selection box

WD(Working distance) set / indicate box

WD range indication

Condition Load / Save button

Setup button

(1) Probe Current mode selection

Select Normal for resolution prior application or High for application needs large probe current. Refer to <3.4 Optimizing the Electron beam>

(2) Focus mode selection

Select UHR or HR. In UHR mode, full working distance range is available. In HR mode, short working distance range is limited but easier to use at long working distance.

Refer to <3.4 Optimizing the Electron beam>

(3)WD(Working distance) set / indicate box

When a working distance value is selected with the pull down list, focus point will be set to the specified working distance. The box also indicates present focal length if varied with manual focusing.

(4) WD range indication

Possible focusing range with present mode and accelerating voltage is indicated.

(5) Condition Load / Save button

Saving present column condition or retrieving previously saved condition. Refer to <3.9.6 Operating Condition mamory>

(6) Setup button

Opens Column tab of the Setup dialog window for detailed column condition setting. Refer to <3.4 Optimizing the Electron beam>

2 - 35