Fig. 2-5 shows the appearance of large specimen stage driven by motors (type II).

Fine opening control X knob

Opening selector

Fine opening control Y knob

Absorbed current measuring terminal

(normally used for specimen bias voltage terminal)

Fig. 2-5 Large Specimen Stage (type II)

Range of movement in X direction

: 0 to 110 mm

Range of movement in Y direction

: 0 to 110 mm

Range of movement in Z direction

: WD = 1.5 to 40 mm

 

 

(X-ray analysis position is at 15 mm working distance)

Range of movement in R direction

:

360° continuously

Range of movement in T direction

:

-5° to 70°

2 - 5

Page 67
Image 67
Hitachi S-4800 manual Large Specimen Stage type