Hitachi manual General Characteristic of signals utilized in S-4800, Signal Control

General Characteristic of signals utilized in S-4800

Signal	Characteristics	Applications
SE signal	･High resolution surface information	Useful for ultra high resolution
	･Voltage contrast	topmost surface observation of light
	･High edge contrast	materials like carbon
	･Sensitive to specimen charging
BSE-L	･Sensitive to compositional	Useful for microscopy of a wide range
signal	information	of materials, specifically for
	･information of depth of specimen	suppressing edge contrast, enhanced
	･Less sensitive to specimen charging	compositional information, reducing
		specimen charging artifact.
	･Less edge contrast
BSE-H	･Sensitive to compositional	Useful for microscopy of enhanced
signal	information	compositional contrast or inner
	･information of depth of specimen	structures. Low signal amount may
	･Less sensitive to specimen charging	limit applications for some materials
	･Less edge contrast
	･Signal amount varies with materials

3.5.1.2Signal Control

When Mix or Upper has been selected, the ratio of SE, BSE-L and BSE-H signals included in the upper detector output is controllable with the Signal control tools.

Signal control tools

BSE ratio selection box

When SE is selected,

When +BSE is selected, amount of BSE signal is controlled by BSE ratio selection box. Select a ratio from the pull down list clicking the arrow button. Low angle BSE will be detected with L.A0 to L.A100. With larger number, amount of SE is suppressed and results BSE richer image. H.A results high angle BSE image.

(1) SE Signal Detection

When the SE button is selected, the upper detector signal will be of pure SE

Although BSE is detected with the upper detector, amount of SE signal is significantly greater.

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