(4)Floor vibration

S-4800 Type I

Oscillation

Allowable Amplitude (X, Y)

Frequency

(m Peak to Peak)

(Hz)

1.0

Less than 7.0

1.4

Less than 2.0

2.0

Less than 2.0

3.0

Less than 4.0

4.0

Less than 4.5

5.0

Less than 4.5

6.0

Less than 4.0

10.0

Less than 3.0

Oscillation

Allowable Amplitude (Z)

Frequency

(m Peak to Peak)

(Hz)

1.0

Less than 25.0

2.0

Less than 14.0

3.0

Less than 5.0

3.5

Less than 2.9

4.0

Less than 1.8

5.0

Less than 1.0

6.0

Less than 1.1

10.0

Less than 1.2

S-4800 Type II

Oscillation

Allowable Amplitude (X, Y)

Frequency

(m Peak to Peak)

(Hz)

1.0

Less than 8.0

1.5

Less than 3.0

2.0

Less than 1.4

2.4

Less than 1.4

3.0

Less than 3.0

5.0

Less than 4.0

6.0

Less than 3.5

10.0

Less than 3.5

Oscillation

Allowable Amplitude (Z)

Frequency

(m Peak to Peak)

(Hz)

1.0

Less than 20.0

2.0

Less than 10.0

3.0

Less than 5.0

4.0

Less than 2.7

5.0

Less than 1.8

6.0

Less than 1.0

7.0

Less than 1.0

10.0

Less than 1.0

The allowable amplitude corresponds to an image deviation of less than 0.2 mm on a micrograph at magnification 220,000×

(5)Acoustic noise .................. The following table shows the relation between allowable noise level (C characteristic) and frequency at the S-4800 installation site. The allowable amplitude corresponds to an image deviation of less than 0.2 mm on a micrograph at magnification 220,000× .

Frequency : f (Hz)

Allowable Noise LevelType I

Allowable Noise Level (Type II

f≦150

75 dB or less

72 dB or less

150≦f≦800

60 dB or less

60 dB or less

800≦f≦2000

54 dB or less

52 dB or less

PRECAUTION - 12

Page 44
Image 44
Hitachi S-4800 manual Oscillation Allowable Amplitude X, Y, ∝m Peak to Peak, Oscillation Allowable Amplitude Z