Hitachi S-4800 manual Baking of Aperture Plate

(7)After completion of heating, wait for 10 to 15 minutes and introduce air into the vacuum evaporator. Then remove the aperture plate with tweezers.

NOTICE: Do not touch to aperture plate directly by hand.

(8)To further improve image quality at low accelerating voltages, coat both sides of the aperture plate with platinum-palladium (Pt-Pd) or gold- palladium (Au-Pd) to a thickness of 10 to 20 nm using an ion coater after heating the aperture plate.

Aperture plate

Molybdenum board (533-1337)

Fig. 4-2 Baking of Aperture Plate

4-4