(7)After completion of heating, wait for 10 to 15 minutes and introduce air into the vacuum evaporator. Then remove the aperture plate with tweezers.

NOTICE: Do not touch to aperture plate directly by hand.

(8)To further improve image quality at low accelerating voltages, coat both sides of the aperture plate with platinum-palladium (Pt-Pd) or gold- palladium (Au-Pd) to a thickness of 10 to 20 nm using an ion coater after heating the aperture plate.

Aperture plate

Molybdenum board (533-1337)

Fig. 4-2 Baking of Aperture Plate

4-4

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Hitachi S-4800 manual Baking of Aperture Plate