Please read through this manual carefully before using the instrument
NOTICE:
APPLICATION
CAUTION
Page
Period of Guarantee
Details of Guarantee
Exclusions from Guarantee
Limitations on Guarantee
Installation
After-salesService
Available Training Programs
Handling of Chemicals
Instruction Manual
General Safety Guidelines
DANGER
WARNING
NOTICE
Maintenance of Warning Labels
Warning Labels
Electrical Hazard
High Temperature Hazard
Magnetic Field Hazard
Laser light Hazard
Page
Pinch
Fig S-3Warning labels on the Main unit (ANSI style labels)
Fig S-3Warning labels on the Display unit (ANSI style labels)
Beware of
electric shock
Electron Gun / Ion pump Baking
Beware of high
Rotary Pump
Laser Light
•Water Leakage Detection
•Third Party’s Industrial or Proprietary Rights
•Cooling Water
•Backup of Important Data
•Third Party’s Application Programs
•Protection against Computer Viruses
•Do Not Change Computer Settings
•OS operation during S-4800SEM operation
•Power Failure
•Personal Computer (PC)
Alt, Ctrl
Delete
Emergency Off Button
Fig S- 5 Location of Emergency Off button
NOTE
Main Power Disconnect
Power Supply and Grounding Connection
INTERLOCK
Electron Gun
Ion Pump
Other High Voltages
Baking power supply
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Fig S- 11 Gravity location of Display unit
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1.PRECAUTIONS FOR TRANSPORT
2.PRECAUTIONS FOR POWER CONNECTION
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EVAC POWER
DISPLAY POWER
EMERGENCY
3.GENERAL PRECAUTIONS
4.MEASURES FOR EMERGENCY
5.CAUTIONS ON OPERATION
HV OFF
6.OTHERS
7.FLASHING
Fig. 1 Principle of Field Emission Gun
Fig. 2 Change of Emission Current with Time
Fig. 3 Status Transition of Adsorbed Gas Molecules on Cathode Tip
Execute
‘2’
HV ON
‘3’
1. Resolution:
2. Magnification:
3.Electron Optics:
4.Specimen Stage
5.Display Unit
6.Evacuation System
7.Protection Devices
1.Power Requirements
2.Physical Dimensions
3.Installation Environment
Oscillation
Allowable Amplitude (X, Y)
Allowable Amplitude (Z)
Frequency : f (Hz)
Allowable Noise Level(Type I)
4.Water Supply and Drain
Table of Contents
Table of Contents (Cont’d)
PRECAUTIONS ON HANDLING
PRECAUTION-1
Precautions for Transport
Precautions for Power Connection
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1.1Installation Requirements
1.1.1General
1.1.2Room Temperature and Humidity
1.1.3Line Power Requirement
1.1.4Grounding
1.1.5Water Supply and Drain
1.1.6Stray Magnetic Field
1.1.7Floor Vibration
Table 1-2Allowable Vibration
Vibration
Fig. 1-1Vibration Transmittance - Frequency Characteristics
1.1.8Power Line Noise and Electric Field Noise
Table 1-3External Noise Sources
1.1.9Disturbance by Sound Waves
1.1.10 Site Requirements
1.1.10Site requirements
Floor loading capability (kg / m2 )
Total mass of equipment (kg)
Fig. 1-2Installation Layout example
1.2Materials or Instruments to be prepared by User
See Table
Table 1-4Materials or Instruments to be Prepared by User
Name
Quantity
1.3.1Power and Ground Wirings
Fig 1-3Connection of the step down transformer
Fig 1-4Connection of the step down transformer
Fig 1-5Connection of the step down transformer
Fig. 2-1aModel S-4800System (type 1)
Fig. 2-1bModel S-4800System (type 2)
2.1Control Knobs and Switches on Main Unit
2.1.1Main unit (Column)
Fig. 2-2shows the appearance of the S-4800main unit (type I)
Fig. 2-2 S-4800Main Unit (type 1)
Fig. 2-3sketches the sectional view of the S-4800column
Fig. 2-3Sectional View of S-4800Column
Fig. 2-4Specimen Stage (type I)
Fig. 2-5Large Specimen Stage (type II)
Fig. 2-6specimen exchange device
Fig. 2-7Evacuating System
Fig. 2-8aEvacuation Control Panel
Fig. 2-8aDisplay / Operation area
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2.2Control Knobs and Switches on Display Unit
2.2.1Display
Fig. 2-9Display Unit
Fig. 2-10PC Panel
Fig. 2-11Manual operation Panel
Fig. 2-12Mouse
Fig. 2-13Manual operation Panel
2.3Graphical User Interface (GUI)
2.3.1Starting the PC and logging in the S-4800program
Administrator :
Power User
Fig. 2-14example of Windows desktop
Fig. 2-15 S-4800Loin dialog window
2.3.2S-4800SEM Main Window
Fig. 2-16 S-4700Operation Window
Fig 2-16 S-4800Main window
Fig 2-17 S-4800Main window (Small and Dual screen mode)
2.3.3Control arrangement on the window
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2.3.4Menu
File
•Open SEM Data Manager Opens the SEM Data Manager window
• Direct Save
Save
• Column
Column
• Condition Load
Op. Cond
• Condition Save
Scan
• Run (Freeze)
• Capture
• Capture Reso
• Split DM Mode
Option
•Optional Setup
Op. Panel Setting
Toolbar Setting
- Stage
Help
• Maintenance
ECO mode setting
• Index
Show the index of S-4800Help
2.3.5Control Panel
2.3.5.1Functional blocks on the Control Panel
Fig 2-18Control panel
2.3.5.2HV control block
• Vacc select
(3) Flashing controller
2.3.5.3Scan control block
2.3.5.4Auto control
2.3.5.5Monitoring function
(1) Align
2.3.5.6Magnification control
2.3.5.7Image recording
(1) Capture button
(2)
Layout Print
Report Generation
SEM Data Manager
Direct Photo
Memory Photo:
2.3.5.9Extension for Dual screen mode
Fig 2-19Control Panel (Dual screen mode)
(1) Run / Freeze buttons
2.3.6Operation Panel
Fig 2-20Operation panel
2.3.6.1SIGNAL SELECT block
2.3.6.2OPE CONDITION block
2.3.6.3R.ROTATION block
2.3.6.4SCAN MODE block
2.3.6.5SCAN SIZE block
2.3.6.6DATA ENTRY block
2.3.6.7SIGNAL PROCESSING block
• Smooth :
• Sharpen :
• Edge Enhance :
• Invert :
2.3.6.8TILT COMPENSATION block
2.3.6.9COLOR MIXING block
2.3.6.10Scroll bar and area marker block
2.3.6.11Scroll bar and area marker block
2.3.6.12Other optional function block
2.3.6.13Arrangement of control blocks
2.3.7Mouse operation on the scanning image
2.3.7.1.Exchanging mouse control functions
S button
Fig 20-21Mouse
2.3.7.2Focus/stigma/contrast/brightness adjustment
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2.3.7.3Stage and image shift tools
Fig 2-23Mouse control (stage)
2.3.8Setup dialog window
2.3.8.1 Column tab
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2.3.8.2 Image tab
2.3.8.3 Record tab
(1-1) Auto Data Display
Data Number
(1-5) Embed into Image checkbox
For Photograph is checked
(4-1) Film Speed
2.3.8.4OP. Cond tab
Fig 2-24Condition Load/Save
2.3.9Captured Image Window
Captured images are displayed as thumbnails on this window
Fig 2-25Captured Image window
Delete button : Deletes the selected image
View button : Open the selected image on the viewer window
2.3.10SEM Data Manager Window
2.3.11Alignment Dialog Window
Fig 2-26Alignment window
Off
Aperture Align button
2.3.12CD Measurement dialog window (option)
2.3.13Comm Port Setting Dialog Window
Comm Port Setting
Comm Port
Speed
2.3.15Oblique Dialog Window
Oblique
2.3.16Password Setting Dialog Window
Password Setting
2.3.17Save Image Dialog Window
2.3.18Opt Signal Processing Dialog Window
2.3.19Split/Dual Mag Controller
Split DM
2.3.20Using Short-CutKeys
Alt
Direct Save
arrow
Enter
3.1Preliminary Operation
3.2Specimen Setting
3.3Application of High Voltage
3.4Optimizing the Electron Beam
3.5Operation for Image Observation
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3.1Preliminary Operation
3.1.1Check of Column Vacuum
IP1
IP2
IP3
3.1.2Flow the cooling water
3.1.3Starting the Display
DISPLAY
3.1.4Use of Anti-ContaminationTrap
3.2Specimen Setting and Specimen Exchange
3.2.1Cautions on Specimen Preparation
3.2.2Specimen Preparation for Materials
stage lock
EXC
Stop
3.2.5How to Set Specimen
3.2.5.1 Extracting specimen from stage
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3.2.5.2Opening the specimen exchange chamber door
3.2.5.3 Setting a specimen
Turn the knob clockwise so as the Unlock mark comes upwards
3.3Application of High Voltage
3.3.1Condition where the gun high voltage is applicable
3.3.2Flashing
3.3.2.1 About flashing
3.3.2.2Flashing Procedure
3.3.3Setting of Accelerating Voltage and Emission Current
Vacc
Set Ie to
Accelerating VoltageEmission Current
3.3.4Application of High Voltage
SET
3.4Optimizing the Electron Beam
3.4.1Selecting a Magnification Mode
3.4.2Selecting Electron Optical Column Condition
3.4.2.1 High Mag mode
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NOTES
ABCC Link
Column Tab
manner
3.4.3Column Alignment Operation
STIGMA/ALIGNMENT
Aperture Align
DeGauss
NOTE:
Stigma Align
Stigma Align Y
Area Marker
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3.5Operation for Image Observation
3.5.1SE detector
U/D Variable
3.5.1.1Secondary and backscattered signals and their Characteristics
General Characteristic of signals utilized in S-4800
3.5.1.2Signal Control
H.A
3.5.2Selecting Magnification
Preset
Preset Magnification
3.5.3Selecting Scanning Speed
Run/Freeze
Scanning Image
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3.5.4Image Brightness and Contrast Adjustment
control panel
ABCC
Adjust Beam Monitor
Signal
Scroll Bar
BC Monitor
Cancel
BC Monitor mode
Scanning Speed
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3.5.5Focus and Astigmatism Correction
Auto Focus
Auto Stigma
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3.5.6Operation of the Specimen Stage (Type I - Manual Stage)
3.5.6.1 Movable range and specimen exchange position
3.5.6.2 Movable range limitation of X, Y and R axes
3.5.6.3 Tilt and Z axes limitation
Important
3.5.6.43 axes motorized stage (Type1 stage option)
Movable range of X and Y directions (3 axes motorized stage)
3.5.6.5Stage Locking
3.5.7Operation of the Specimen Stage (Type 2 - 5-AxisMotorized Stage)
3.5.7.1 Coordinate notation
3.5.7.2 Movable range and specimen exchange position
3.5.7.3 Setting specimen size and detectors in use
Set Sample Size/Detector
Set
HOME
3.5.7.4Valious operation for specimen stage
3.5.7.5Stage tab
Basically use the Stage tab of the operation panel for stage operation
3.5.7.6X, Y, R axes operation
XY Display / Input
Abs / Rel select
R Display / Input
Rotation eucentric
3.5.7.7Z and Tilt axes operation
Priority
Tilt
Continuous
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3.5.7.8 Stage mouse operation on the scanning image
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3.5.7.9 Position memory function
Get Position
Comment
Rel
Get
3.5.7.10 Stage History function
3.5.7.11Image Navigation
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3.5.7.12 Rotation Assist function
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3.5.7.13 Rotation / tilt eucentric function and calibration
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Stage tilt calibration
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3.5.7.14 Stage lock
Lock
Release
3.5.7.15Stopping stage and Returning to previous stage position
3.5.7.16Moveable range and limitation by optional detectors
Fig 3-1XY movable range for various specimen size
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3.6Saving and Recording Images
3.6.1Saving and Recording Images
3.6.2Preparing Images for Recording
Embed Into Image
Data Display
Record
For Photograph
3.6.3Setting Conditions for Image Capturing
3.6.4Image Capturing
3.6.5Saving a Scanning Image (Direct Save)
Image Type
Save Option
Quick Save
All Save
3.6.6Saving Captured Images
Save Image
3.6.7Taking Photographs (Option)
sensitive
specimens, or to shorten recording
Memory Photo
(c)Photographing saved images
SEM Data Manager
3.7Using SEM Data Manager
3.8At the End of Daily Use
3.8.1Turning High Voltage Off
3.8.2Setting the Stage at the Specimen Exchange Position
3.8.3.Taking Out a Specimen
Important:
3.8.4Closing Windows and Shutting the Display Power
CAUTION:
3.9Using Other Functions
3.9.1Screen Mode
Signal Select
3.9.2Split Screen and Dual Mag Mode
Split DM Mode
Split/Dual Mag
3.9.3 Signal Selection and Color Mixing
Record A/B
3.9.4 X-rayAnalysis Mode
Back Ground
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3.9.5Signal Processing
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3.9.6Operating Condition Memory
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3.9.7Pseudo Color Display
3.9.8Data Entry Function
Shadow
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3.9.9Raster Rotation, Dynamic Focus and Tilt Compensation
R. Rotation
WD-Rotation
Link
Dynamic Focus
Tilt Compensation
3.9.11Printing images using Report generation function
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3.9.12Copy Image
3.9.13Copy Image information text
Copy Attribute
3.9.14Oblique Image
3.9.15Optional setting
U/L SED Ratio Variable
Stage
Slow
Fast
3.9.16Password Setting
Old Password
New Password
Confirm Password
New
Login Name
3.10Image Quality
3.10.1Accelerating Voltage and Image Quality
3.10.2Condenser Lens Setting and Image Quality
3.10.3Objective Lens Aperture Size and Image Quality
3.11Mechanical Column Alignment
3.11.1Preparative Operation for Alignment
3.11.2Mechanical Alignment of the Electron Gun
3.11.3Alignment of the Beam Monitor Aperture
3.11.4Alignment of the Objective Lens Aperture
3.11.5Mechanical Alignment of the First Condenser Lens
Cond Lens
3.11.6Mechanical Alignment of the Second Condenser Lens
3.11.7Stigma Alignment (electro-magneticalignment)
3.11.8Aperture Alignment (electro-magneticalignment)
Beam Monit
3.12Using SEM Data Manager
3.12.1Precaution About SEM Data Manager
Batch Process
Remove List
Add From File
3.12.2Functions 3.12.2.1 Image Database
3.12.2.2Menu and tool buttons
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3.12.3 Operation
3.12.3.1 Registering Images on SEM Data Manager Database
3.12.3.2 Selecting User name and opening data tree
3.12.3.3Image display
3.12.3.4Image information
3.12.3.5Viewer display
3.12.3.6Data Entry
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3.12.3.7Contrast Conversion
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3.12.3.8Image Processing
3.12.3.9Color Mixing
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3.12.3.10Printing images
3.12.3.11Image file operation
Image Save
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3.12.3.13Slide show
Slide Show
3.12.3.14Optimizing and repairing database file
4.1Maintenance of Electron optical Column
4.1.1Maintaining Vacuum of Electron Gun and Intermediate Chamber
4.1.2Replacement and Cleaning of Objective Lens Aperture
Fig. 4-1Objective Lens Aperture unit
4.1.3Cleaning of Aperture Plates
Fig. 4-2Baking of Aperture Plate
4.2Maintenance of Rotary Pump (Only for P/N 539-9010and 539-9060)
4.2.1Oil Change
NEOVAC
MR-100
4.2.2Replacement of Oil Mist Trap
4.2.3 Troubleshooting
Symptom
Cause
Countermeasure
4.3Maintenance of Air Compressor(Only for P/N 539-9010and 539-9060)
4.3.1Checkup and Maintenance
Check the following items regularly
Before checkup/maintenance, be sure turn the main switch off
Service Cycle
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4.3.2Troubleshooting of Air Compressor
Probable Cause
Remedy
•When asking the service agent for repair, please notify them of the following
1. Model code 2. Symptom of trouble 3. Location of installation site
4.3.3Location and Functions of Major Components
4.4Troubleshooting
4.4.1When Column Evacuation does not Work
4.4.2When Specimen Exchange Chamber Vacuum is not Good
4.4.3When Specimen Chamber Vacuum is not Good
4.4.4When Ion Pump Vacuum Degraded
4.4.5When Emission Current is not Set at Normal Value
4.4.6When Image is not Shown on Screen
4.4.7When Image is Very Noisy
4.4.8When You cannot Correct Astigmatism
4.4.9When Auto Focus or Auto Stigma does not Work Satisfactorily
4.4.10When S-4800control program does not start up
4.4.11When PC has Hanged up
4.4.12When Error Messages are shown
4.5Operation for shutting down all power supply of S-4800
POFF
OFF
4.6Operation when power was shut down by power line failure
4.7Operation for Starting S-4800
4.8Operation when power line failure recovered
4.9Operation when Water supply stopped by failure
4.10Gun Baking operation
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4.11Caution on Maintenance
5.1Consumables and Spare Parts
5.1.1Consumables
The items shown in Table 5-1should always be on hand for normal operation
Table
Part No
5.1.2Replacement Parts
The items below should be prepared in the necessary quantities
Table 5-2Replacement Parts
Expiration
5.1.3Spare Parts
6.1Model S-5080 Auto-Camera(option)
6.1.1Configuration
Fig. 6-1Model S-5080 Auto-Camera
(Configuration for image ratios of 1:1 is shown.)
Fig. 6-2Configurations of Various Film Holder Units (Option)
6.1.2Specifications
REMARKS:
Page
6.1.3Assembling the Camera
Fig. 6-34″ ⋅ 5″ Film (Magnification of 1.0)
Fig. 6-4Polaroid 107 Film (Magnification of 0.8)
Fig. 6-5Roll Film 120 (Magnification of 0.6)
6.1.4Operation
Table 6-2Aperture for Each Kind of Film
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INDEX
2-22, 2-25, 2-27, 2-28, 2-32, 2-46, 2-47
3-18, 3-19, 3-23, 3-25, 3-31, 3-32
1-3, 3-13, 3-107, PRECAUTION-11
2-10~2-12
INDEX
2-24, 3-62~3-66
2-23, 2-30, 2-32, 3-57, 3-58
3-72~3-75, 3-85
Color
2-38, 2-39, 3-74, 3-86, 3-87, 3-94, 3-114, 3-118
Copy Attribute command
3-110, 4-1, PRECAUTION-5, SAFETY-3
3-13, 4-14, PRECAUTION-5
2-21, 2-56, 3-75, 3-78, 3-82
3-99, 3-116, 3-125
2-22, 2-29
Image menu
3-44, 3-57~3-59
3-114, 3-118
3-107
2-23, 2-54
Operate menu
ABCC command
2-22, 2-52, 3-31, 3-32, 3-34, 3-35, 3-92
2-35, 2-50, 3-92
2-21, 2-31, 2-51, 2-55, 3-75, 3-76
Scan menu
2-23, 2-55
2-21, 2-31, 2-38, 2-52, 2-56, 3-74~3-76, 3-78
3-79, 3-94, 3-114, 3-115, 3-117~3-120, 3-122
2-24
2-6, 2-21, 2-31, 2-48, 3-72
Troubleshooting
4-7, 4-10, 4-12, FOREWORD-2
WD